Gold Adhesion Question
Rashid Zia
zia at stanford.edu
Sun Mar 13 22:56:01 PST 2005
Hello everyone,
I was wondering if anyone has tried to evaporator gold onto fused quartz or
silica without an adhesion layer. I have heard that cleaning a glass
surface just prior to deposition by plasma etching, argon ion milling, or
simple heating may promote adhesion. Has anyone ever tried these methods?
Right now, I am using a 1.5nm Cr layer for adhesion (of a 55nm Au layer
which is for an e-beam lithography process with PMMA and liftoff), but I
would like to eliminate or reduce this layer. I would really appreciate
any suggestions.
Thanks,
Rashid.
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