From zhangdw at stanford.edu Tue Dec 5 03:12:08 2006 From: zhangdw at stanford.edu (zhang dawei) Date: Tue, 5 Dec 2006 19:12:08 +0800 Subject: innotec free from 9:30pm-11:30pm Message-ID: <000001c7185e$35ddf6c0$538c0c80@stanfordzhangd> Took some earlier slots. With Regards, Dawei Zhang PhD Candidate Stanford University Phone: (650)-796-6166 Email: zhangdw at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Tue Dec 5 06:48:53 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Tue, 5 Dec 2006 06:48:53 -0800 Subject: innotec free from 9:30pm-11:30pm In-Reply-To: <000001c7185e$35ddf6c0$538c0c80@stanfordzhangd> Message-ID: <001001c7187c$7b99b230$a9b50c80@sangbumhome> I will take it. Thanks, SangBum _____ From: zhang dawei [mailto:zhangdw at stanford.edu] Sent: Tuesday, December 05, 2006 3:12 AM To: innotec at snf.stanford.edu Subject: innotec free from 9:30pm-11:30pm Took some earlier slots. With Regards, Dawei Zhang PhD Candidate Stanford University Phone: (650)-796-6166 Email: zhangdw at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Thu Dec 7 10:06:23 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Thu, 7 Dec 2006 10:06:23 -0800 Subject: innotec free 5pm to 8:30pm today Message-ID: <003401c71a2a$679fe830$a9b50c80@sangbumhome> Sample would not be ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Fri Dec 8 13:47:01 2006 From: jimkruger at yahoo.com (jim kruger) Date: Fri, 8 Dec 2006 13:47:01 -0800 (PST) Subject: Innotec Finishing early Message-ID: <724878.79482.qm@web38901.mail.mud.yahoo.com> I believe jperez will not use the short reservation at 2:30. ____________________________________________________________________________________ Do you Yahoo!? Everyone is raving about the all-new Yahoo! Mail beta. http://new.mail.yahoo.com From eric.pop at intel.com Fri Dec 8 13:49:47 2006 From: eric.pop at intel.com (Pop, Eric) Date: Fri, 8 Dec 2006 13:49:47 -0800 Subject: Al on two wafer pieces Message-ID: <2BCF8A1CC7A24341BCAA8193857F947E0101EAA9@scsmsx413.amr.corp.intel.com> Dear Innotec users, I need to evaporate Al (100-200nm) capacitor gates on two wafer pieces, through a shadow mask. I am not yet trained on Innotec and I doubt I'll be able to do that and this evaporation before the shutdown on the 18th. If anyone is doing an Al evaporation soon, could you let me piggyback two wafer pieces in there at the same time? I would gladly offer to buy you lunch/coffee or a six-pack of beer -- AND (something money can't buy) you'll have my eternal gratitude. Thank you in advance, -Eric From jperez at snf.stanford.edu Fri Dec 8 13:57:13 2006 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 08 Dec 2006 13:57:13 -0800 Subject: Innotec available from 2- 3:30 today Message-ID: <6.2.5.6.2.20061208135550.02fb9c80@snf.stanford.edu> Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From niti.goel at intel.com Sat Dec 9 21:51:30 2006 From: niti.goel at intel.com (Goel, Niti) Date: Sat, 9 Dec 2006 21:51:30 -0800 Subject: Innotec free Dec. 10 from 8 am to 12 pm Message-ID: <97D612E30E1F88419025B06CB4CF1BE1015DC436@scsmsx412.amr.corp.intel.com> From hideoiw at yahoo.co.jp Sat Dec 9 22:53:04 2006 From: hideoiw at yahoo.co.jp (=?ISO-2022-JP?B?GyRCNGRAJRsoQiAbJEI9KElXGyhC?=) Date: Sun, 10 Dec 2006 15:53:04 +0900 (JST) Subject: Innotec free Dec. 10 from 8 am to 12 pm In-Reply-To: <97D612E30E1F88419025B06CB4CF1BE1015DC436@scsmsx412.amr.corp.intel.com> Message-ID: <20061210065304.40285.qmail@web3701.mail.tnz.yahoo.co.jp> I will take it Hideo -------------- next part -------------- An HTML attachment was scrubbed... URL: From niti.goel at intel.com Sun Dec 10 16:25:33 2006 From: niti.goel at intel.com (Goel, Niti) Date: Sun, 10 Dec 2006 16:25:33 -0800 Subject: innotec free Dec. 11---8am to 12 pm Message-ID: <97D612E30E1F88419025B06CB4CF1BE1015DC4E7@scsmsx412.amr.corp.intel.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mike.wiemer at gmail.com Sun Dec 10 22:12:04 2006 From: mike.wiemer at gmail.com (Michael Wiemer) Date: Sun, 10 Dec 2006 22:12:04 -0800 Subject: innotec free Dec. 11---4am to 8am Message-ID: 4am-8am is now open. I moved my reservation to the newly open slot from 8am-12pm. -Mike On 12/10/06, Goel, Niti wrote: > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From cquayhl at stanford.edu Mon Dec 11 18:40:18 2006 From: cquayhl at stanford.edu (Charis Quay Huei Li) Date: Mon, 11 Dec 2006 21:40:18 -0500 (EST) Subject: help with evaporating tungsten In-Reply-To: <97D612E30E1F88419025B06CB4CF1BE1015DC4E7@scsmsx412.amr.corp.intel.com> References: <97D612E30E1F88419025B06CB4CF1BE1015DC4E7@scsmsx412.amr.corp.intel.com> Message-ID: Dear all, Recently we have been trying in our lab to evaporate tungsten as e-beam alignment marks. We are encountering some problems with poor adhesion during liftoff and we were wondering if ay of you who do a similar process would mind sharing your steps? Our smallest feature size is about 100nm and we are using either 200K/950K or 495K/950K PMMA bilayer. Initially, after just soaking in acetone, squirting and heating up the acetone (and squirting again) one chip came out with extra metal all over the place. I then tried sonicating in larger and larger time increments, starting with 10s and finally going up to minutes at a time. It looked like the metal wouldn't come off and wouldn't come off, and then suddenly a lot of it came off at once at t = 20 minutes roughly. Please let me know if you have any insight into this. Thanks very much. Cheers, Charis. From cquayhl at stanford.edu Mon Dec 11 18:41:41 2006 From: cquayhl at stanford.edu (Charis Quay Huei Li) Date: Mon, 11 Dec 2006 21:41:41 -0500 (EST) Subject: help with evaporating tungsten In-Reply-To: References: <97D612E30E1F88419025B06CB4CF1BE1015DC4E7@scsmsx412.amr.corp.intel.com> Message-ID: P.S. I'm not sure if it makes any difference, but we have been getting evaporations done in Ginzton instead of using the Innotec as it is heavily booked. From dejia at stanford.edu Mon Dec 11 21:02:34 2006 From: dejia at stanford.edu (Deji A.) Date: Mon, 11 Dec 2006 21:02:34 -0800 Subject: help with evaporating tungsten In-Reply-To: References: <97D612E30E1F88419025B06CB4CF1BE1015DC4E7@scsmsx412.amr.corp.intel.com> Message-ID: <457E37EA.4090100@stanford.edu> Charis, I and many other users have done tungsten liftoff successfully routinely. How thick is your metal and how thick is your resist? Many Cheerz Deji A. EE rocks ------------------------------------- Nature is the teacher of all things Charis Quay Huei Li wrote: > Dear all, > > Recently we have been trying in our lab to evaporate tungsten as > e-beam alignment marks. We are encountering some problems with poor > adhesion during liftoff and we were wondering if ay of you who do a > similar process would mind sharing your steps? > Our smallest feature size is about 100nm and we are using either > 200K/950K or 495K/950K PMMA bilayer. > Initially, after just soaking in acetone, squirting and heating up > the acetone (and squirting again) one chip came out with extra metal all > over the place. I then tried sonicating in larger and larger time > increments, starting with 10s and finally going up to minutes at a time. > It looked like the metal wouldn't come off and wouldn't come off, and then > suddenly a lot of it came off at once at t = 20 minutes roughly. > Please let me know if you have any insight into this. > Thanks very much. > > Cheers, > Charis. > > From zhangy at stanford.edu Mon Dec 11 22:23:04 2006 From: zhangy at stanford.edu (Yuan Zhang) Date: Mon, 11 Dec 2006 22:23:04 -0800 Subject: innotec free till 12am Message-ID: <1165904584.457e4ac8d2893@webmail.stanford.edu> Samples not ready. Sorry for the late notice Yuan Zhang EE department From QWang at nano.com Tue Dec 12 10:35:02 2006 From: QWang at nano.com (Qian Wang) Date: Tue, 12 Dec 2006 10:35:02 -0800 Subject: innotec is free this morning Message-ID: Sorry for so late notice. I have some emergency stuff should be finished. -------------- next part -------------- An HTML attachment was scrubbed... URL: From abutterwick at gmail.com Wed Dec 13 15:31:39 2006 From: abutterwick at gmail.com (Alex Butterwick) Date: Wed, 13 Dec 2006 15:31:39 -0800 Subject: Innotec free 5pm - 8:30pm Thurs (Dec 13th) Message-ID: <107F0067-3C7B-4E5B-A11D-39E5ECD2D6B1@gmail.com> Innotec free 5pm - 8:30pm Thurs (Dec 13th). From kimsangb at stanford.edu Wed Dec 13 16:52:20 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Wed, 13 Dec 2006 16:52:20 -0800 Subject: innotec free from 2:00am to 6:00pm Message-ID: <000601c71f1a$1c6acac0$a9b50c80@sangbumhome> Sample not ready -------------- next part -------------- An HTML attachment was scrubbed... URL: From sqliu at stanford.edu Thu Dec 14 14:25:43 2006 From: sqliu at stanford.edu (John Liu) Date: Thu, 14 Dec 2006 14:25:43 -0800 Subject: innotec free 5:00-8:30pm Thursday 12/14 Message-ID: <000001c71fce$cb08e3f0$336543ab@IBMC0B9E4E795E> Sample not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Fri Dec 15 21:06:44 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Fri, 15 Dec 2006 21:06:44 -0800 Subject: innotec free from midnight to 6:00AM Message-ID: <003801c720cf$fb1bf120$a9b50c80@sangbumhome> Sorry for late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: