the problem of Innotec

qian Wang qqqwang at
Wed Jun 28 16:44:10 PDT 2006

The set point of the chiller is set wrong point.

The chiller is being repaired. My wafers are loaded and please do not use it 
until I remove them. I can not vent the chamber now because it will result a 
lot of water condensing in the chamber at low temperature.


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