the problem of Innotec

Eric Perozziello eap at gloworm.Stanford.EDU
Wed Jun 28 17:42:00 PDT 2006


Innotec seems to be ok now.


On Wed, 28 Jun 2006, qian Wang wrote:

> The set point of the chiller is set wrong point.
>
> The chiller is being repaired. My wafers are loaded and please do not use it
> until I remove them. I can not vent the chamber now because it will result a
> lot of water condensing in the chamber at low temperature.
>
> qian
>
>
>




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