Innotec seems to be ok now. On Wed, 28 Jun 2006, qian Wang wrote: > The set point of the chiller is set wrong point. > > The chiller is being repaired. My wafers are loaded and please do not use it > until I remove them. I can not vent the chamber now because it will result a > lot of water condensing in the chamber at low temperature. > > qian > > >