Innotec will be going down for CLEAN Sunday 11/19/06

Jeannie Perez jperez at snf.stanford.edu
Thu Nov 16 15:27:43 PST 2006


Hi,
Sorry for the interruption of your reservations on Nov. 19th 
(Sunday), but the Innotec has begun to peel badly enough that it is 
requiring too much vacuuming time and particles that may cause 
contamination to our metal sources.
Jim Haydon will put the Innotec down at 9 AM and hopefully have it 
back up within five to six hours. Once the Innotec parts have been
changed out, an one micron Aluminum deposition has to be done before 
anyone can use it.
Thanks for your patience,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





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