Anyone depositing Pt soon?

Mihir Tendulkar mihirt at stanford.edu
Sun Dec 16 18:08:54 PST 2007


Hi all,

      Is anyone depositing Pt in the Innotec soon? I just had a failed  
deposition in the Metalica, and I am not sure whether the problem will  
be fixed before shutdown. I'd like to piggyback on your deposition if  
possible. I have 4 wafers that need 40 to 60 nm of Pt (I'm shooting  
for 50, but I am willing to be flexible).

      Any help you can give will be massively appreciated... Thanks in advance!

-- 
Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University



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