Anyone depositing Pt soon?
mihirt at stanford.edu
Sun Dec 16 18:08:54 PST 2007
Is anyone depositing Pt in the Innotec soon? I just had a failed
deposition in the Metalica, and I am not sure whether the problem will
be fixed before shutdown. I'd like to piggyback on your deposition if
possible. I have 4 wafers that need 40 to 60 nm of Pt (I'm shooting
for 50, but I am willing to be flexible).
Any help you can give will be massively appreciated... Thanks in advance!
Applied Physics PhD Candidate
Nishi Group, Stanford University
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