Anyone depositing Pt soon?

Mihir Tendulkar mihirt at
Sun Dec 16 18:08:54 PST 2007

Hi all,

      Is anyone depositing Pt in the Innotec soon? I just had a failed  
deposition in the Metalica, and I am not sure whether the problem will  
be fixed before shutdown. I'd like to piggyback on your deposition if  
possible. I have 4 wafers that need 40 to 60 nm of Pt (I'm shooting  
for 50, but I am willing to be flexible).

      Any help you can give will be massively appreciated... Thanks in advance!

Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University

More information about the innotec mailing list