tonight 3:30 am -6:00am cancelled and Au stuck on crucible

Donghun Choi donghun.choi at
Sun Dec 16 19:16:43 PST 2007

When I check Au after deposition, Au was stuck on crucible.
I tried to take it out, but it didn't work.
That is Harris group innotec Au source.
Sorry to cause inconvenience.

  Donghun Choi
  Ph.D Candidate

  Dep. of Electrical Engineering         Center for Integrated Systerms
  Prof. James S. Harris group              420 Via Ortega, CIS-X Rm 126x
  Solid State & Photonics Lab             Stanford, CA 94305
  Ph: (650) 725-8313  Fax : (650)  723-4659
  E-Mail:donghun.choi at
----- Original Message ----- 
From: "Mihir Tendulkar" <mihirt at>
To: <innotec at>
Sent: Sunday, December 16, 2007 6:08 PM
Subject: Anyone depositing Pt soon?

> Hi all,
>      Is anyone depositing Pt in the Innotec soon? I just had a failed 
> deposition in the Metalica, and I am not sure whether the problem will  be 
> fixed before shutdown. I'd like to piggyback on your deposition if 
> possible. I have 4 wafers that need 40 to 60 nm of Pt (I'm shooting  for 
> 50, but I am willing to be flexible).
>      Any help you can give will be massively appreciated... Thanks in 
> advance!
> -- 
> Mihir Tendulkar
> Applied Physics PhD Candidate
> Nishi Group, Stanford University 

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