Innotec is up with a New E-gun
jperez at snf.stanford.edu
Fri Jul 13 13:48:33 PDT 2007
Please, Please be careful when bring up power. The gun may react
slightly different to the different metals.
I tried Ti at 2.5% to 3.1% and had a faster dep. rate and not as
stable as I recall.
I tried Al at 17% power and dep. rate seems low, but I was right in the center.
The chamber pressure was below 5x10--7 after two hour of pumping
down. This should improve.
The temperature of the cryo pump is slightly high (14K), but that too
may improve with time.
Science and Engineering Technician
Stanford Nanofabrication Facility
Tel: (650) 723-7997
Fax: (650) 725-6278
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