Aluminum starter source
Jeannie Perez
jperez at snf.stanford.edu
Tue Oct 2 15:39:05 PDT 2007
For those of you wishing to deposit Aluminum with our 7cc Aluminum
starter source can use it in C3 until we can get C2 cleaned up or
replace our hearth. I am limiting the deposition thickness to no more
then 5000 angstroms. Please remember to add pellets and keep the
E-beam in the center. The power used today (10%) gave me a deposition
rate of ~3.0 A/second (+/- 0.3). Because of the size, you'll see the
Aluminum starter source red hot.
Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278
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