Aluminum starter source

Jeannie Perez jperez at
Tue Oct 2 15:39:05 PDT 2007

For those of you wishing to deposit  Aluminum with our 7cc Aluminum 
starter source can use it in C3 until we can get C2 cleaned up or 
replace our hearth. I am limiting the deposition thickness to no more 
then 5000 angstroms. Please remember to add pellets and keep the 
E-beam in the center. The power used today (10%) gave me a deposition 
rate of ~3.0 A/second (+/- 0.3). Because of the size, you'll see the 
Aluminum starter source red hot.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the innotec mailing list