Warning/Reminder! Bell Jar Problem!

Mary Tang mtang at stanford.edu
Tue Sep 18 11:13:10 PDT 2007

Hi Innotec users --

As per Jeannie and Jim Haydon: "Please check back of bell jar when down 
before starting the roughing pump. I am having to press down on the back 
of the
bell jar to help the bell jar lay flat in the back."

In addition, make sure to follow the operating procedures when you pump 
down the system. For your reference, here's the pumpdown procedure:

1. Press the Vent key to stop venting (F6).
2. Press Pump Only to start pumping (F5). WAIT, YOU”RE NOT FINISHED YET!
3. Monitor the pump down to be sure the chamber was correctly positioned:
a. Verify that the amber ATM light goes out with in 10 sec.
b. Watch for the pressure to drop to the crossover point, i.e. for the 
cryopump to take over at about 150 millitorr. This will take 5 minutes.

If you do not follow these instructions, realize that the pump may 
become severely damaged!

If the light does not turn on or the pressure does not drop to the cross 
over point in about 6 minutes, do the following:

1. Open up the chamber and check the seal. Try pump down again.
2. If it fails pumpdown, then STOP the pump (this will prevent it from 
burning out), shutdown the innotec on Coral, and notify Staff of the 

Please do note these and any other problems on Coral -- more information 
will help staff members troubleshoot these problems.



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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