Warning/Reminder! Bell Jar Problem!
Mary Tang
mtang at stanford.edu
Tue Sep 18 17:19:38 PDT 2007
Hello Innotec users --
Correction from Jeannie and Jim. DO NOT "HELP" THE BELL JAR. Please
use just the two buttons to move the bell jar. This is a safety concern
(moving parts and nearby fingers you know.)
Thanks,
Mary
Mary Tang wrote:
> Hi Innotec users --
>
> As per Jeannie and Jim Haydon: "Please check back of bell jar when
> down before starting the roughing pump. I am having to press down on
> the back of the
> bell jar to help the bell jar lay flat in the back."
>
> In addition, make sure to follow the operating procedures when you
> pump down the system. For your reference, here's the pumpdown procedure:
>
> 1. Press the Vent key to stop venting (F6).
> 2. Press Pump Only to start pumping (F5). WAIT, YOU”RE NOT FINISHED YET!
> 3. Monitor the pump down to be sure the chamber was correctly positioned:
> a. Verify that the amber ATM light goes out with in 10 sec.
> b. Watch for the pressure to drop to the crossover point, i.e. for the
> cryopump to take over at about 150 millitorr. This will take 5 minutes.
>
> If you do not follow these instructions, realize that the pump may
> become severely damaged!
>
> If the light does not turn on or the pressure does not drop to the
> cross over point in about 6 minutes, do the following:
>
> 1. Open up the chamber and check the seal. Try pump down again.
> 2. If it fails pumpdown, then STOP the pump (this will prevent it from
> burning out), shutdown the innotec on Coral, and notify Staff of the
> problem.
>
> Please do note these and any other problems on Coral -- more
> information will help staff members troubleshoot these problems.
>
> Thanks!
>
> Mary
>
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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