Warning/Reminder! Bell Jar Problem!

Young Chul Jun ycjun at stanford.edu
Sat Sep 29 20:59:09 PDT 2007


Hi All,

When I came to Innotec today, ATM light was on and the pump remained  
stopped. It looks like the previous user didn't close it and start  
pumping properly. I started pumping, but I couldn't get pumpdown. So,  
I stopped pumping again.

- Y.C.


Quoting Mary Tang <mtang at stanford.edu>:

> Hello Innotec users --
>
> Correction from Jeannie and Jim.  DO NOT "HELP" THE BELL JAR.  Please
> use just the two buttons to move the bell jar.  This is a safety
> concern (moving parts and nearby fingers you know.)
>
> Thanks,
>
> Mary
>
> Mary Tang wrote:
>> Hi Innotec users --
>>
>> As per Jeannie and Jim Haydon: "Please check back of bell jar when   
>> down before starting the roughing pump. I am having to press down   
>> on the back of the
>> bell jar to help the bell jar lay flat in the back."
>>
>> In addition, make sure to follow the operating procedures when you   
>> pump down the system. For your reference, here's the pumpdown   
>> procedure:
>>
>> 1. Press the Vent key to stop venting (F6).
>> 2. Press Pump Only to start pumping (F5). WAIT, YOU”RE NOT FINISHED YET!
>> 3. Monitor the pump down to be sure the chamber was correctly positioned:
>> a. Verify that the amber ATM light goes out with in 10 sec.
>> b. Watch for the pressure to drop to the crossover point, i.e. for   
>> the cryopump to take over at about 150 millitorr. This will take 5   
>> minutes.
>>
>> If you do not follow these instructions, realize that the pump may   
>> become severely damaged!
>>
>> If the light does not turn on or the pressure does not drop to the   
>> cross over point in about 6 minutes, do the following:
>>
>> 1. Open up the chamber and check the seal. Try pump down again.
>> 2. If it fails pumpdown, then STOP the pump (this will prevent it   
>> from burning out), shutdown the innotec on Coral, and notify Staff   
>> of the problem.
>>
>> Please do note these and any other problems on Coral -- more   
>> information will help staff members troubleshoot these problems.
>>
>> Thanks!
>>
>> Mary
>>
>
>
> -- 
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu





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