From bilee at stanford.edu  Mon Dec  1 01:46:31 2008
From: bilee at stanford.edu (Byoungil Lee)
Date: Mon, 1 Dec 2008 01:46:31 -0800
Subject: Innotec free now
References: <1023604424.1327431228040840352.JavaMail.root@zm01.stanford.edu>
Message-ID: <09BAD806197C424D980A722B7EFE05E6@BILEEOFFICE>

Couldn't do Pt deposition since it is still in bad shape. 



From jennyhu at stanford.edu  Mon Dec  1 16:53:17 2008
From: jennyhu at stanford.edu (Jenny Hu)
Date: Mon, 1 Dec 2008 16:53:17 -0800
Subject: Innotec Free 5:30 PM to 8 PM
Message-ID: <005601c95418$5d692550$183b6ff0$@edu>

 

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From filip at stanford.edu  Thu Dec  4 13:48:29 2008
From: filip at stanford.edu (Filip Crnogorac)
Date: Thu, 4 Dec 2008 13:48:29 -0800 (PST)
Subject: shadowing question
In-Reply-To: <1335315191.1821981228427151508.JavaMail.root@zm09.stanford.edu>
Message-ID: <1821536457.1822601228427309502.JavaMail.root@zm09.stanford.edu>

Hi Innotec users,

I am asking for advice on how to shadow mask 10mm wide stripe on a 4" wafer? I have used Kapton tape, but it left a residue that I was unable to remove with solvents/PRS1000/O2 plasma/etc.

Do you use aluminum foil? or another piece of Si? I'm depositing a pretty thick film (400nm).
Any suggestions would be useful.

Thanks in advance,

Filip

--------------------------------------
Ph.D. Candidate, Stanford University
Department of Electrical Engineering
Center for Integrated Systems
B-103, 420 Via Palou
Stanford, CA 94305



From rohank at stanford.edu  Thu Dec  4 16:05:39 2008
From: rohank at stanford.edu (Rohan Deodatta Kekatpure)
Date: Thu, 4 Dec 2008 16:05:39 -0800 (PST)
Subject: shadowing question
In-Reply-To: <1821536457.1822601228427309502.JavaMail.root@zm09.stanford.edu>
Message-ID: <1212374579.2443541228435539109.JavaMail.root@zm07.stanford.edu>

Hi Filip,

Kapton tape is a definite NO. Its residue is evil. Cannot be removed by any known chemical/Process in SNF. There is a company that sells shadow masks. Cant remember the name but they were in one of the job fairs. You might try searching online. If the lead time is not too much (>Dec 17th) you can give it a try. It is a clean method. Otherwise, for the time being try the blue vacuum tape in the stock room.

If you can tolerate some Kapton residue on the very end of your wafer, you can ask Tim brand (in ginzton) to dice 10 mm wide silicon pieces for you. you can then glue them to your wafer using Kapton tape at the end. Once you are done just remove them


-Rohan

----- Original Message -----
From: Filip Crnogorac <filip at stanford.edu>
To: innotec <innotec at snf.stanford.edu>
Sent: Thu, 4 Dec 2008 13:48:29 -0800 (PST)
Subject: shadowing question

Hi Innotec users,

I am asking for advice on how to shadow mask 10mm wide stripe on a 4" wafer? I have used Kapton tape, but it left a residue that I was unable to remove with solvents/PRS1000/O2 plasma/etc.

Do you use aluminum foil? or another piece of Si? I'm depositing a pretty thick film (400nm).
Any suggestions would be useful.

Thanks in advance,

Filip

--------------------------------------
Ph.D. Candidate, Stanford University
Department of Electrical Engineering
Center for Integrated Systems
B-103, 420 Via Palou
Stanford, CA 94305




From chen0622 at yahoo.com  Thu Dec  4 17:14:26 2008
From: chen0622 at yahoo.com (c.c.)
Date: Thu, 4 Dec 2008 17:14:26 -0800 (PST)
Subject: Dec. 9 (Tue.) reservation released 7:00 AM to 10:00 AM
Message-ID: <707815.35015.qm@web56807.mail.re3.yahoo.com>

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From kj.jackson at comcast.net  Fri Dec  5 19:06:38 2008
From: kj.jackson at comcast.net (kj.jackson at comcast.net)
Date: Sat, 06 Dec 2008 03:06:38 +0000
Subject: finished early...free till 9:00pm
Message-ID: <120620080306.24691.4939EC3E0003410B00006073221556707402019C050C0E06D20605@comcast.net>




From grace.m.credo at intel.com  Fri Dec  5 21:24:07 2008
From: grace.m.credo at intel.com (Credo, Grace M)
Date: Fri, 5 Dec 2008 21:24:07 -0800
Subject: cancelling for sat 12/6, 7am-10:30am
In-Reply-To: <120620080306.24691.4939EC3E0003410B00006073221556707402019C050C0E06D20605@comcast.net>
References: <120620080306.24691.4939EC3E0003410B00006073221556707402019C050C0E06D20605@comcast.net>
Message-ID: <517AF11CC9FF404E8B27650E116B147C46F9C943@orsmsx505.amr.corp.intel.com>

Samples not ready



From dlee76 at stanford.edu  Sat Dec  6 02:59:59 2008
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Sat, 6 Dec 2008 02:59:59 -0800 (PST)
Subject: Reservation released Sat 4:00 AM to 6:30 AM
Message-ID: <1561016969.2600961228561199135.JavaMail.root@zm03.stanford.edu>

Sorry for the late notice. The samples are not ready yet.


From popomoo at stanford.edu  Sat Dec  6 18:01:08 2008
From: popomoo at stanford.edu (SangMoo Jeong)
Date: Sat, 6 Dec 2008 18:01:08 -0800
Subject: innotec free from 20:30~00:00
Message-ID: <83e9e5400812061801u23932f35xf2f5573107ee6b2f@mail.gmail.com>

sample not ready

-- 
Sangmoo Jeong

Graduate student
Department of Electrical Engineering
Stanford University
Email: popomoo at gmail.com
Phone: 650-704-3295
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From Salowitz at stanford.edu  Sat Dec  6 18:08:18 2008
From: Salowitz at stanford.edu (Nathan Salowitz)
Date: Sat, 06 Dec 2008 18:08:18 -0800
Subject: Innotech released 9:30 to 13:00 Sunday 
Message-ID: <493B3012.30808@Stanford.edu>

Got an earlier spot.


From Salowitz at stanford.edu  Sat Dec  6 18:08:23 2008
From: Salowitz at stanford.edu (Nathan Salowitz)
Date: Sat, 06 Dec 2008 18:08:23 -0800
Subject: innotec free from 20:30~00:00
In-Reply-To: <83e9e5400812061801u23932f35xf2f5573107ee6b2f@mail.gmail.com>
References: <83e9e5400812061801u23932f35xf2f5573107ee6b2f@mail.gmail.com>
Message-ID: <493B3017.3050605@Stanford.edu>

Taken

SangMoo Jeong wrote:
> sample not ready
>
> -- 
> Sangmoo Jeong
>
> Graduate student
> Department of Electrical Engineering
> Stanford University
> Email: popomoo at gmail.com <mailto:popomoo at gmail.com>
> Phone: 650-704-3295


From mrlin at stanford.edu  Sat Dec  6 22:15:42 2008
From: mrlin at stanford.edu (Albert Lin)
Date: Sat, 06 Dec 2008 22:15:42 -0800
Subject: Innotec free Sunday 1pm
Message-ID: <6.2.5.6.2.20081206221527.03565828@stanford.edu>

samples not ready



From dejia at stanford.edu  Sun Dec  7 17:34:30 2008
From: dejia at stanford.edu (Deji A.)
Date: Sun, 07 Dec 2008 17:34:30 -0800
Subject: innotec free 12midnight to 2am..sample not ready
Message-ID: <493C79A6.4050002@stanford.edu>

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From lwchang at stanford.edu  Sun Dec  7 23:03:35 2008
From: lwchang at stanford.edu (Li-Wen Chang)
Date: Sun, 7 Dec 2008 23:03:35 -0800
Subject: Innotec free 12-2:30pm on 12/8
Message-ID: <8ab79e460812072303x18305384ub86f4311ab81366e@mail.gmail.com>

Bad samples...


From chen0622 at yahoo.com  Mon Dec  8 17:51:01 2008
From: chen0622 at yahoo.com (c.c.)
Date: Mon, 8 Dec 2008 17:51:01 -0800 (PST)
Subject: reservation released Wed. 6:00 AM to 9:00 AM
Message-ID: <496700.54420.qm@web56805.mail.re3.yahoo.com>


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From jennyhu at stanford.edu  Mon Dec  8 19:18:13 2008
From: jennyhu at stanford.edu (Jenny Hu)
Date: Mon, 8 Dec 2008 19:18:13 -0800
Subject: Innotec Free Tomorrow 7:30 - 10 PM
Message-ID: <002101c959ac$c5ab61c0$51022540$@edu>

Sorry, sample will not be ready.  

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From dongrip at stanford.edu  Mon Dec  8 22:13:07 2008
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Mon, 8 Dec 2008 22:13:07 -0800 (PST)
Subject: Innotec Dec. 9th 12am-4am reservation released
Message-ID: <779514417.416271228803187174.JavaMail.root@zm02.stanford.edu>

Sample's quality is pretty bad. I'm really sorry for the late notice.


From ehe at stanford.edu  Tue Dec  9 13:26:28 2008
From: ehe at stanford.edu (Elizabeth Edwards)
Date: Tue, 9 Dec 2008 13:26:28 -0800
Subject: innotec reservation removed Wed. 9a-12p
Message-ID: <aa86d2b00812091326r726160c5tcd75038dfa3a453e@mail.gmail.com>


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From mrlin at stanford.edu  Thu Dec 11 00:30:50 2008
From: mrlin at stanford.edu (Albert Lin)
Date: Thu, 11 Dec 2008 00:30:50 -0800 (PST)
Subject: innotec free now until 2AM
Message-ID: <2132860149.3363621228984250629.JavaMail.root@zm07.stanford.edu>

started early and finished early.


From David.Druist at grandisinc.com  Thu Dec 11 09:26:01 2008
From: David.Druist at grandisinc.com (David Druist)
Date: Thu, 11 Dec 2008 09:26:01 -0800
Subject: innotec free Friday 12/12 noon-3PM
Message-ID: <887C381D359942449ABF950AC230469901C72822BD@PDCSERVER.grandis.local>



David Druist
Memory Process and Device Integration
Grandis, Inc.
408-945-2168
David.Druist at GrandisInc.com


From chen0622 at yahoo.com  Fri Dec 12 16:22:32 2008
From: chen0622 at yahoo.com (c.c.)
Date: Fri, 12 Dec 2008 16:22:32 -0800 (PST)
Subject: innotec reservation released tonight 12:00 AM to 2:30 AM 
Message-ID: <765832.82838.qm@web56801.mail.re3.yahoo.com>

Reservation moved to tomorrow.? Sorry for late response.? 
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From mrlin at stanford.edu  Fri Dec 12 19:58:24 2008
From: mrlin at stanford.edu (Albert Lin)
Date: Fri, 12 Dec 2008 19:58:24 -0800 (PST)
Subject: Innotec Will be free at 10:30pm
In-Reply-To: <765832.82838.qm@web56801.mail.re3.yahoo.com>
Message-ID: <1230267176.3663831229140704369.JavaMail.root@zm07.stanford.edu>

I am starting early (now), so will finish early.


From jrjain at stanford.edu  Fri Dec 12 21:00:40 2008
From: jrjain at stanford.edu (Raja Jain)
Date: Fri, 12 Dec 2008 21:00:40 -0800
Subject: Innotec free at 2:30am
Message-ID: <000301c95cdf$bf4d5af0$3de810d0$@edu>

Wafers won't be ready in time for reservation

 

 

 

 

 

Jinendra Raja Jain

PhD Candidate

Stanford University, Department of Electrical Engineering

Allen Center for Integrated Systems

420 Via Palou

Stanford, CA 94305

(650) 248-0770

 

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From jameson at stanford.edu  Mon Dec 15 13:23:00 2008
From: jameson at stanford.edu (John Ross Jameson)
Date: Mon, 15 Dec 2008 13:23:00 -0800 (PST)
Subject: Ti/Au piggyback?
Message-ID: <Pine.LNX.4.44.0812151321530.18495-100000@myth13.stanford.edu>

Hi,

Is anyone doing a Ti/Au deposition before shutdown that I could add
some wafers to?

Thanks in advance,
John



From jperez at snf.stanford.edu  Tue Dec 16 09:27:04 2008
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Tue, 16 Dec 2008 09:27:04 -0800
Subject: Available  9:30 to noon today
Message-ID: <6.2.5.6.2.20081216092621.01dbf1e0@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278