shadowing question

[Filip Crnogorac]

Hi Innotec users,

I am asking for advice on how to shadow mask 10mm wide stripe on a 4" wafer? I have used Kapton tape, but it left a residue that I was unable to remove with solvents/PRS1000/O2 plasma/etc.

Do you use aluminum foil? or another piece of Si? I'm depositing a pretty thick film (400nm).
Any suggestions would be useful.

Thanks in advance,

Filip

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Ph.D. Candidate, Stanford University
Department of Electrical Engineering
Center for Integrated Systems
B-103, 420 Via Palou
Stanford, CA 94305