Innotec will be Down this week-end

Jeannie Perez jperez at snf.stanford.edu
Fri May 2 11:57:07 PDT 2008


All Users,
Oil has back filled into the  chamber. We are trying to expedite the 
parts for clean. I have not heard back from Quantum if they can
have all parts back by Monday. But even if they can, maintenance will 
have to clean out all the oil on Monday before installing clean 
parts. The roughing pump will need to be checked if damage has 
occurred. I am estimating (if all goes will) the earliest the Innotec 
can  recover would be Tuesday.
To be continued,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





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