From rcordova at kovio.com Tue Sep 2 07:35:06 2008 From: rcordova at kovio.com (Rosie Cordova) Date: Tue, 2 Sep 2008 07:35:06 -0700 Subject: Cancelled: Wednesday: 9:00am-12:30pm Message-ID: <0A734412B02624499172B7366A97336B106C168149@server.print-this.com> From jhaydon at stanford.edu Tue Sep 2 07:44:10 2008 From: jhaydon at stanford.edu (Jim Haydon) Date: Tue, 02 Sep 2008 07:44:10 -0700 Subject: chiller problem Message-ID: <48BD513A.6070905@stanford.edu> Hi Innotec users The chiller is not cooling and I will need to replace it or have it repaired. I hope to have it back up later today if the replacement works. If not it will be down for at least a couple of days. Jim From jhaydon at stanford.edu Wed Sep 3 14:54:13 2008 From: jhaydon at stanford.edu (Jim Haydon) Date: Wed, 03 Sep 2008 14:54:13 -0700 Subject: update on chiller Message-ID: <48BF0785.9060907@stanford.edu> The chiller I had planed on using seems to have problems of it own. Parts have been ordered but I do not expect it to be up until late this week or early next week. I am working on a different cooling system that will not need a chiller and should be much more reliable. Jim From jhaydon at stanford.edu Fri Sep 5 10:35:07 2008 From: jhaydon at stanford.edu (Jim Haydon) Date: Fri, 05 Sep 2008 10:35:07 -0700 Subject: UPDATE Message-ID: <48C16DCB.5060600@stanford.edu> It is looking like it will be at least 09/09/08 before the Innotec will be up. I am very sorry for the inconvenience and frustration. Jim From yjhuo at stanford.edu Fri Sep 5 11:39:43 2008 From: yjhuo at stanford.edu (Yijie Huo) Date: Fri, 5 Sep 2008 11:39:43 -0700 Subject: Innotec free from 3:30pm to 6:30pm In-Reply-To: <872318997.580561220206203448.JavaMail.root@zm03.stanford.edu> Message-ID: <20080905183952.C607365AA6E@smtp2.stanford.edu> Sample is not ready yet. Sorry for the late notice. Best, Yijie From jhaydon at stanford.edu Wed Sep 10 15:04:48 2008 From: jhaydon at stanford.edu (Jim Haydon) Date: Wed, 10 Sep 2008 15:04:48 -0700 Subject: update Message-ID: <48C84480.4090403@stanford.edu> I am still waiting for chiller parts to come in. Jim From jhaydon at stanford.edu Fri Sep 12 11:00:00 2008 From: jhaydon at stanford.edu (Jim Haydon) Date: Fri, 12 Sep 2008 11:00:00 -0700 Subject: update Message-ID: <48CAAE20.3020207@stanford.edu> The chiller should be back up later today. It is cooling but not heating. A valve seat was accidentally left out during assembly. so the system has to be drained, evacuated and refilled then it should work. Jim From jperez at snf.stanford.edu Fri Sep 12 15:20:42 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 12 Sep 2008 15:20:42 -0700 Subject: Innotec still down, but Jim Haydon will work on it this evening. Message-ID: <6.2.5.6.2.20080912150914.03536ae0@snf.stanford.edu> Hi, I left the chamber loaded with the Aluminum starter source. Two test wafers loaded, one with a shadow mask. If you happen to be the one unloading please be careful. If Innotec comes up, please run a 1000 A of Alum and save them for me. Thanks, Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From xinranw at stanford.edu Fri Sep 12 22:04:35 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Fri, 12 Sep 2008 22:04:35 -0700 Subject: innotec status? Message-ID: <22ffcd060809122204w4fb847du258574a11d01c3fb@mail.gmail.com> Hi, Does anybody know if we can use innotec now or if it can be fixed by tonight? Thanks, Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From grace.m.credo at intel.com Sat Sep 13 06:47:42 2008 From: grace.m.credo at intel.com (Credo, Grace M) Date: Sat, 13 Sep 2008 06:47:42 -0700 Subject: innotec status? In-Reply-To: <22ffcd060809122204w4fb847du258574a11d01c3fb@mail.gmail.com> References: <22ffcd060809122204w4fb847du258574a11d01c3fb@mail.gmail.com> Message-ID: <517AF11CC9FF404E8B27650E116B147C2B47F478@orsmsx505.amr.corp.intel.com> I would like to know too. It's still red light icon, but from the message yesterday it sounded like Jeannie loaded test wafers and thought someone might be able to deposit on them sometime this weekend? >From yesterday: ________________________________ From: xinranw at gmail.com [mailto:xinranw at gmail.com] On Behalf Of Xinran Wang Sent: Friday, September 12, 2008 10:05 PM To: innotec at snf.stanford.edu Subject: innotec status? Hi, Does anybody know if we can use innotec now or if it can be fixed by tonight? Thanks, Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From grace.m.credo at intel.com Sat Sep 13 07:02:16 2008 From: grace.m.credo at intel.com (Credo, Grace M) Date: Sat, 13 Sep 2008 07:02:16 -0700 Subject: cancelling 7:30-11:30am this morning In-Reply-To: <517AF11CC9FF404E8B27650E116B147C2B47F478@orsmsx505.amr.corp.intel.com> References: <22ffcd060809122204w4fb847du258574a11d01c3fb@mail.gmail.com> <517AF11CC9FF404E8B27650E116B147C2B47F478@orsmsx505.amr.corp.intel.com> Message-ID: <517AF11CC9FF404E8B27650E116B147C2B47F47D@orsmsx505.amr.corp.intel.com> Tool still in red light condition ________________________________ From: Credo, Grace M [mailto:grace.m.credo at intel.com] Sent: Saturday, September 13, 2008 6:48 AM To: Xinran Wang; innotec at snf.stanford.edu Subject: RE: innotec status? I would like to know too. It's still red light icon, but from the message yesterday it sounded like Jeannie loaded test wafers and thought someone might be able to deposit on them sometime this weekend? >From yesterday: ________________________________ From: xinranw at gmail.com [mailto:xinranw at gmail.com] On Behalf Of Xinran Wang Sent: Friday, September 12, 2008 10:05 PM To: innotec at snf.stanford.edu Subject: innotec status? Hi, Does anybody know if we can use innotec now or if it can be fixed by tonight? Thanks, Xinran -------------- next part -------------- An HTML attachment was scrubbed... URL: From shott at stanford.edu Sat Sep 13 11:39:53 2008 From: shott at stanford.edu (John Shott) Date: Sat, 13 Sep 2008 11:39:53 -0700 Subject: innotec status? In-Reply-To: <517AF11CC9FF404E8B27650E116B147C2B47F478@orsmsx505.amr.corp.intel.com> References: <22ffcd060809122204w4fb847du258574a11d01c3fb@mail.gmail.com> <517AF11CC9FF404E8B27650E116B147C2B47F478@orsmsx505.amr.corp.intel.com> Message-ID: <48CC08F9.6090704@stanford.edu> Grace, Xinran, and Innotec community ... I've spoken with Jim Haydon. The chiller has been repaired and I've been authorized to clear the shutdown. There is a chance that either the gun or chamber cooling water flow switches will need to be adjusted .... apparently these switches are rather sensitive and flow that is either too low or too high will cause them to report a failure. At this point, I don't know enough about those switches to know how to adjust them. However I believe that Jim may stop by early this afternoon to look at them. To my knowledge, Jeannie's wafers (described below) are still in the system and still need to have an evaporation of 1000 A of aluminum on them. If someone is nearby and can test whether they can do this evaporation or whether the water interlock still seems to show, I'm sure that we'd all be appreciative. If you can get the interlock to fire up, please send out email to this mailing list. If you still see an interlock error, please tell us which one. Either Jim or I will try to resolve that. Here is Jeannie's request for an evaporation ... > I left the chamber loaded with the Aluminum starter source. Two test > wafers loaded, one with a shadow mask. If you happen to be the one > unloading please be careful. If Innotec comes up, please run a 1000 A > of Alum and save them for me. Thanks for your support, John From xinranw at stanford.edu Sat Sep 13 14:45:29 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Sat, 13 Sep 2008 14:45:29 -0700 Subject: innotec status? In-Reply-To: <48CC08F9.6090704@stanford.edu> References: <22ffcd060809122204w4fb847du258574a11d01c3fb@mail.gmail.com> <517AF11CC9FF404E8B27650E116B147C2B47F478@orsmsx505.amr.corp.intel.com> <48CC08F9.6090704@stanford.edu> Message-ID: <22ffcd060809131445l266ccd13ob8ab94bd4189152f@mail.gmail.com> Hi John, I just tested innotec and everything was fine except the view port. All the interlocks are gone and vacuum is very good, and I was able to power it up with no problem. The problem only is the viewport, which is totally dark and I cannot see anything through (seems to be a problem for a while). I also talked to Eric and it seems that he already finished the Al deposition and took the test wafers out. I just put my wafer in and Eric and I will do my deposition later today, which is pretty thin and doesn't need too high power. Innotec users should be very cautious if you decide to use the system. Eric suggested that only experienced user that can deposit without looking through the viewport should use the system. Thanks, Xinran On 9/13/08, John Shott wrote: > > Grace, Xinran, and Innotec community ... > > I've spoken with Jim Haydon. The chiller has been repaired and I've been > authorized to clear the shutdown. There is a chance that either the gun or > chamber cooling water flow switches will need to be adjusted .... apparently > these switches are rather sensitive and flow that is either too low or too > high will cause them to report a failure. At this point, I don't know > enough about those switches to know how to adjust them. However I believe > that Jim may stop by early this afternoon to look at them. > > To my knowledge, Jeannie's wafers (described below) are still in the system > and still need to have an evaporation of 1000 A of aluminum on them. > > If someone is nearby and can test whether they can do this evaporation or > whether the water interlock still seems to show, I'm sure that we'd all be > appreciative. If you can get the interlock to fire up, please send out > email to this mailing list. If you still see an interlock error, please > tell us which one. Either Jim or I will try to resolve that. > > Here is Jeannie's request for an evaporation ... > > I left the chamber loaded with the Aluminum starter source. Two test >> wafers loaded, one with a shadow mask. If you happen to be the one unloading >> please be careful. If Innotec comes up, please run a 1000 A of Alum and >> save them for me. >> > Thanks for your support, > > John > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Sun Sep 14 01:53:47 2008 From: kimsangb at stanford.edu (SangBum Kim) Date: Sun, 14 Sep 2008 01:53:47 -0700 (PDT) Subject: innotec free from 11AM to 4PM Message-ID: <159041436.334591221382427809.JavaMail.root@zm01.stanford.edu> Got earlier session! SangBum From kimsangb at stanford.edu Sun Sep 14 19:51:02 2008 From: kimsangb at stanford.edu (SangBum Kim) Date: Sun, 14 Sep 2008 19:51:02 -0700 Subject: innotec free from 10PM to midnight Message-ID: <007a01c916dd$e3bbd0d0$ab337270$@edu> Sorry for late notice.. SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From hailiang at stanford.edu Sun Sep 14 20:30:44 2008 From: hailiang at stanford.edu (Hailiang Wang) Date: Sun, 14 Sep 2008 20:30:44 -0700 (PDT) Subject: =?utf-8?Q?=E7=AD=94=E5=A4=8D:_innotec_free_from_10PM_to_midnight?= In-Reply-To: <007a01c916dd$e3bbd0d0$ab337270$@edu> Message-ID: <1456321181.287141221449444923.JavaMail.root@zm06.stanford.edu> taken, thanks Hailiang ----- ???? ----- ???: "SangBum Kim" ???: innotec at snf.stanford.edu ????: ???, 2008? 9 ? 14? ?? 7:51:02 GMT -08:00 ??/?????? ??: innotec free from 10PM to midnight Sorry for late notice.. ? SangBum From lwchang at stanford.edu Tue Sep 16 13:49:10 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Tue, 16 Sep 2008 13:49:10 -0700 Subject: Innotec free 16:00-18:30 today Message-ID: <8ab79e460809161349j552bf371i153719a19ca83e05@mail.gmail.com> Sorry not ready From jimkruger at yahoo.com Thu Sep 18 09:12:34 2008 From: jimkruger at yahoo.com (jim kruger) Date: Thu, 18 Sep 2008 09:12:34 -0700 (PDT) Subject: Innotec Released 9-18-08 1030 TO 1300 Today EOM Message-ID: <947762.57736.qm@web38902.mail.mud.yahoo.com> Samples not ready. From yjhuo at stanford.edu Thu Sep 18 09:17:55 2008 From: yjhuo at stanford.edu (Yijie Huo) Date: Thu, 18 Sep 2008 09:17:55 -0700 Subject: Innotec Released 9-18-08 1030 TO 1300 Today EOM In-Reply-To: <947762.57736.qm@web38902.mail.mud.yahoo.com> References: <947762.57736.qm@web38902.mail.mud.yahoo.com> Message-ID: <000001c919aa$1bb6cf70$45b30c80@silverspring> Taken. Thanks. Yijie -----Original Message----- From: jim kruger [mailto:jimkruger at yahoo.com] Sent: Thursday, September 18, 2008 9:13 AM To: Innotec Subject: Innotec Released 9-18-08 1030 TO 1300 Today EOM Samples not ready. From rcordova at kovio.com Thu Sep 18 16:23:00 2008 From: rcordova at kovio.com (Rosie Cordova) Date: Thu, 18 Sep 2008 16:23:00 -0700 Subject: Innotec free Friday 7:30am-10:00am Message-ID: <0A734412B02624499172B7366A97336B107ACD2C1C@server.print-this.com> Sorry, I cannot access Coral (cannot connect) to remove my reservation, but I will not be using this slot. Rosie From Salowitz at stanford.edu Thu Sep 18 16:26:45 2008 From: Salowitz at stanford.edu (Nathan Salowitz) Date: Thu, 18 Sep 2008 16:26:45 -0700 Subject: Innotec free Friday 7:30am-10:00am In-Reply-To: <0A734412B02624499172B7366A97336B107ACD2C1C@server.print-this.com> References: <0A734412B02624499172B7366A97336B107ACD2C1C@server.print-this.com> Message-ID: <48D2E3B5.60202@Stanford.edu> I'll take it! I have the slot immediately preceeding Nate Rosie Cordova wrote: > Sorry, I cannot access Coral (cannot connect) to remove my reservation, but I will not be using this slot. > > Rosie > > From ycjun at stanford.edu Thu Sep 18 21:34:15 2008 From: ycjun at stanford.edu (Youngchul Jun) Date: Thu, 18 Sep 2008 21:34:15 -0700 (PDT) Subject: innotec free on Saturday 7:30am-11am (eom) In-Reply-To: <659842584.564141220153842932.JavaMail.root@zm03.stanford.edu> Message-ID: <1423850836.831341221798855394.JavaMail.root@zm03.stanford.edu> From xinranw at stanford.edu Thu Sep 18 21:54:37 2008 From: xinranw at stanford.edu (Xinran Wang) Date: Thu, 18 Sep 2008 21:54:37 -0700 Subject: innotec free on Saturday 7:30am-11am (eom) In-Reply-To: <1423850836.831341221798855394.JavaMail.root@zm03.stanford.edu> References: <659842584.564141220153842932.JavaMail.root@zm03.stanford.edu> <1423850836.831341221798855394.JavaMail.root@zm03.stanford.edu> Message-ID: <22ffcd060809182154y1e6af996x8044803d65bb2586@mail.gmail.com> taken, and release sunday from 5am to 8am. Xinran On Thu, Sep 18, 2008 at 9:34 PM, Youngchul Jun wrote: > -------------- next part -------------- An HTML attachment was scrubbed... URL: From grace.m.credo at intel.com Fri Sep 19 09:14:04 2008 From: grace.m.credo at intel.com (Credo, Grace M) Date: Fri, 19 Sep 2008 09:14:04 -0700 Subject: innotec free on Saturday 2:30am-7:30am In-Reply-To: <1423850836.831341221798855394.JavaMail.root@zm03.stanford.edu> References: <659842584.564141220153842932.JavaMail.root@zm03.stanford.edu> <1423850836.831341221798855394.JavaMail.root@zm03.stanford.edu> Message-ID: <517AF11CC9FF404E8B27650E116B147C2B6C4C95@orsmsx505.amr.corp.intel.com> I'm off campus and can't cancel my coral reservation. I'll clear my reservation tonight if anyone is interested. -----Original Message----- From: Youngchul Jun [mailto:ycjun at stanford.edu] Sent: Thursday, September 18, 2008 9:34 PM To: Innotec at snf.stanford.edu Subject: innotec free on Saturday 7:30am-11am (eom) From Salowitz at stanford.edu Fri Sep 19 10:47:03 2008 From: Salowitz at stanford.edu (Nathan Salowitz) Date: Fri, 19 Sep 2008 10:47:03 -0700 Subject: Released Sunday 8:00am to 11:30 Message-ID: <48D3E597.5030007@Stanford.edu> Got an earlier spot Nate From jperez at snf.stanford.edu Mon Sep 22 13:25:10 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 22 Sep 2008 13:25:10 -0700 Subject: Crucible 6 (C6) isn't available, Indium struck Message-ID: <6.2.5.6.2.20080922131738.03c00c78@snf.stanford.edu> At this time Indium will not work, due to the material being too soft. We can't remove it from the crucible. I will look into using "In" with a liner. Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From yeh at alcestech.com Tue Sep 23 14:34:19 2008 From: yeh at alcestech.com (Richard Yeh) Date: Tue, 23 Sep 2008 14:34:19 -0700 Subject: innotec free 9/24 6:30-10:30am Message-ID: <48D960DB.6060701@alcestech.com> From yeh at alcestech.com Wed Sep 24 18:38:09 2008 From: yeh at alcestech.com (Richard Yeh) Date: Wed, 24 Sep 2008 18:38:09 -0700 Subject: Innotec 9/25 4-8am free Message-ID: <48DAEB81.5000200@alcestech.com> From ahazeghi at stanford.edu Mon Sep 29 11:19:43 2008 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Mon, 29 Sep 2008 11:19:43 -0700 Subject: Innotec available at 1PM Message-ID: <002701c9225f$f1dbc840$d59358c0$@edu> Sorry for late notice but my sample did not arrive Thanks, Arash -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Mon Sep 29 11:31:12 2008 From: chen0622 at yahoo.com (c.c.) Date: Mon, 29 Sep 2008 11:31:12 -0700 (PDT) Subject: Innotec free 6:30 PM to 9:00 PM (Tue. 09/30) Message-ID: <922470.5912.qm@web56808.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jperez at snf.stanford.edu Mon Sep 29 14:19:19 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 29 Sep 2008 14:19:19 -0700 Subject: Indium starter source now available Message-ID: <6.2.5.6.2.20080929133756.01c7d038@snf.stanford.edu> Innotec community, I had our new 15 cc Indium starter source cut up into chunks (the one that was stuck in C6 pocket). I placed some of the pieces into a 7cc graphite liner and used in C3 pocket. Power was at 2.6%, deposition rate was fast, 20 angstroms per second. You can try reducing the fast dep. rate by reducing power and or using spiral/ triangle. I would like to monitor Indium for awhile, so if you would like to use Indium please see me. At this time I have it in our safe. Best Regards, Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Mon Sep 29 14:28:40 2008 From: jimkruger at yahoo.com (jim kruger) Date: Mon, 29 Sep 2008 14:28:40 -0700 (PDT) Subject: Innotec free NOW to 1800 TODAY, 9/29/08 EOM Message-ID: <698190.74672.qm@web38901.mail.mud.yahoo.com> From popomoo at stanford.edu Mon Sep 29 14:30:23 2008 From: popomoo at stanford.edu (SangMoo Jeong) Date: Mon, 29 Sep 2008 14:30:23 -0700 Subject: Innotec free NOW to 1800 TODAY, 9/29/08 EOM In-Reply-To: <698190.74672.qm@web38901.mail.mud.yahoo.com> References: <698190.74672.qm@web38901.mail.mud.yahoo.com> Message-ID: <83e9e5400809291430x512c40c1n116c8fe5f2311546@mail.gmail.com> Taken, thanks On Mon, Sep 29, 2008 at 2:28 PM, jim kruger wrote: > > > > > -- Sangmoo Jeong Graduate student Department of Electrical Engineering Stanford University Email: popomoo at gmail.com Phone: 650-704-3295 -------------- next part -------------- An HTML attachment was scrubbed... URL: From mferrier at stanford.edu Mon Sep 29 22:28:49 2008 From: mferrier at stanford.edu (Marlene Marjorie Ferrier) Date: Mon, 29 Sep 2008 22:28:49 -0700 (PDT) Subject: INNOTEC RELEASED TUESD 9:00-11:30 Message-ID: <1702776360.136931222752529513.JavaMail.root@zm08.stanford.edu> From jperez at snf.stanford.edu Tue Sep 30 10:15:10 2008 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Tue, 30 Sep 2008 10:15:10 -0700 Subject: Had to delete reservation today 11 - 3PM Message-ID: <6.2.5.6.2.20080930101234.03d2b318@snf.stanford.edu> I picked up this reservation this morning thinking on depositing wafers for a customer, but wafers haven't arrived. Sorry for the late notice. Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From zguo at stanford.edu Tue Sep 30 19:11:45 2008 From: zguo at stanford.edu (Zhiqiang Guo) Date: Tue, 30 Sep 2008 19:11:45 -0700 (PDT) Subject: Innotec free 3:30a~6:30a Wed. Message-ID: <465182472.347981222827105295.JavaMail.root@zm01.stanford.edu> Sample not ready. ZQ