From jperez at snf.stanford.edu  Mon Feb  2 12:25:36 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 02 Feb 2009 12:25:36 -0800
Subject: Removed tomorrow's Innotec reservation 10-3PM
Message-ID: <6.2.5.6.2.20090202122451.01e20bd8@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From mrlin at stanford.edu  Mon Feb  2 12:31:22 2009
From: mrlin at stanford.edu (Albert Lin)
Date: Mon, 2 Feb 2009 12:31:22 -0800 (PST)
Subject: Innotec free today at 1pm
Message-ID: <21989298.3607361233606682467.JavaMail.root@zm07.stanford.edu>

Sorry for the late notice, but some other equipment was down, so samples not ready.


From tsarmie at stanford.edu  Fri Feb  6 04:02:01 2009
From: tsarmie at stanford.edu (Tomas Sarmiento)
Date: Fri, 06 Feb 2009 04:02:01 -0800
Subject: INNOTEC FREE: Sunday 1:00-5:00am
Message-ID: <6.2.1.2.2.20090206035801.02515e98@tsarmie.pobox.stanford.edu>





From dongrip at stanford.edu  Fri Feb  6 09:37:07 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Fri, 6 Feb 2009 09:37:07 -0800 (PST)
Subject: INNOTEC FREE: Sunday 1:00-5:00am
In-Reply-To: <6.2.1.2.2.20090206035801.02515e98@tsarmie.pobox.stanford.edu>
Message-ID: <147639284.1252711233941827203.JavaMail.root@zm02.stanford.edu>

Taken, thanks.

----- Original Message -----
From: "Tomas Sarmiento" <tsarmie at stanford.edu>
To: innotec at snf.stanford.edu
Sent: Friday, February 6, 2009 4:02:01 AM GMT -08:00 US/Canada Pacific
Subject: INNOTEC FREE: Sunday 1:00-5:00am





From jperez at snf.stanford.edu  Mon Feb  9 07:26:39 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 09 Feb 2009 07:26:39 -0800
Subject: Innotec will be going down for Shield change 2/10/09
Message-ID: <6.2.5.6.2.20090209072525.01d803c0@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From jimkruger at yahoo.com  Mon Feb  9 09:13:32 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Mon, 9 Feb 2009 09:13:32 -0800 (PST)
Subject: Innotec Released 2-09-09    1430 TO 1730  Monday  EOM
Message-ID: <71709.81809.qm@web38901.mail.mud.yahoo.com>




      


From mferrier at stanford.edu  Mon Feb  9 18:49:04 2009
From: mferrier at stanford.edu (Marlene Marjorie Ferrier)
Date: Mon, 9 Feb 2009 18:49:04 -0800 (PST)
Subject: innotec free tues 2-7am
Message-ID: <1551829752.6881141234234144355.JavaMail.root@zm08.stanford.edu>



From David.Druist at grandisinc.com  Tue Feb 10 10:52:37 2009
From: David.Druist at grandisinc.com (David Druist)
Date: Tue, 10 Feb 2009 10:52:37 -0800
Subject: Wed 2/10 9:30AM-12:30PM free
Message-ID: <887C381D359942449ABF950AC230469901D528309D@PDCSERVER.grandis.local>

Samples will not be ready

David Druist
Memory Process and Device Integration
Grandis, Inc.
408-945-2168
David.Druist at GrandisInc.com


From mrlin at stanford.edu  Tue Feb 10 16:27:28 2009
From: mrlin at stanford.edu (Albert Lin)
Date: Tue, 10 Feb 2009 16:27:28 -0800 (PST)
Subject: innotec free at 22:30
Message-ID: <1712085716.5257161234312048472.JavaMail.root@zm07.stanford.edu>

samples broke


From ahryciw at stanford.edu  Tue Feb 10 16:52:40 2009
From: ahryciw at stanford.edu (Aaron Hryciw)
Date: Tue, 10 Feb 2009 16:52:40 -0800
Subject: innotec free 02/11 from 02:00 to 06:00
Message-ID: <4d36fb940902101652g5742cf44g3caefac9ead42c5c@mail.gmail.com>

Took Albert Lin's slot.

 - Aaron


On Tue, Feb 10, 2009 at 4:27 PM, Albert Lin <mrlin at stanford.edu> wrote:

> samples broke
>



-- 
Dr. Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA  94305-4045

Tel.:  (650) 723-5840
Fax.:  (650) 736-1984
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From jperez at snf.stanford.edu  Thu Feb 12 14:44:43 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Thu, 12 Feb 2009 14:44:43 -0800
Subject: How Many samples do you deposit in Innotec using one pump down?
Message-ID: <6.2.5.6.2.20090212143453.01def608@snf.stanford.edu>

Hi,
We are thinking of buying another Carousel / Planetary. Does anyone 
use four or more 4 inch slots at one pump down time
for deposition? If you are using four or more slots in Innotec please 
reply to this E-mail.
Thank you,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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From jimkruger at yahoo.com  Fri Feb 13 09:31:00 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Fri, 13 Feb 2009 09:31:00 -0800 (PST)
Subject: Innotec Released 2-13-09    1630 TO 2030  Today Friday 13  EOM
Message-ID: <444556.32629.qm@web38906.mail.mud.yahoo.com>




      


From nppatil at stanford.edu  Fri Feb 13 15:42:58 2009
From: nppatil at stanford.edu (Nishant Parag Patil)
Date: Fri, 13 Feb 2009 15:42:58 -0800 (PST)
Subject: How Many samples do you deposit in Innotec using one pump down?
In-Reply-To: <6.2.5.6.2.20090212143453.01def608@snf.stanford.edu>
Message-ID: <149586896.6299181234568578637.JavaMail.root@zm06.stanford.edu>

Jeannie,

We use 4 wafers at a time quite often, sometimes more.

Thanks,
Nishant


----- Original Message -----
From: Jeannie Perez <jperez at snf.stanford.edu>
To: Innotec at snf.stanford.edu
Sent: Thu, 12 Feb 2009 14:44:43 -0800 (PST)
Subject: How Many samples do you deposit in Innotec using one pump down?

Hi,
We are thinking of buying another Carousel / Planetary. Does anyone 
use four or more 4 inch slots at one pump down time
for deposition? If you are using four or more slots in Innotec please 
reply to this E-mail.
Thank you,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From jennyhu at stanford.edu  Sun Feb 15 14:29:03 2009
From: jennyhu at stanford.edu (Jenny Hu)
Date: Sun, 15 Feb 2009 14:29:03 -0800
Subject: Innotec free at 3PM today 
Message-ID: <46553DE1-D001-415B-AD4B-989F9914FB06@stanford.edu>

Problem with samples. Sorry for the late notice.




From mferrier at stanford.edu  Mon Feb 16 11:44:26 2009
From: mferrier at stanford.edu (Marlene Marjorie Ferrier)
Date: Mon, 16 Feb 2009 11:44:26 -0800 (PST)
Subject: Innotec free Tues. 6-9am
Message-ID: <663046721.161041234813466696.JavaMail.root@zm08.stanford.edu>



From sbasumal at stanford.edu  Mon Feb 16 22:35:37 2009
From: sbasumal at stanford.edu (Shrestha Basu Mallick)
Date: Mon, 16 Feb 2009 22:35:37 -0800
Subject: Innotec free from 6.00 - 9.00 am tomorrow
Message-ID: <499A5AB9.6070304@stanford.edu>


-- 
Shrestha Basu Mallick
 ---------------------------------
 Research Assistant
 E.L. Ginzton Labs
 450 Via Palou S31
 Stanford, CA 94305
 phone: 650-455-6691
 fax: 650-725-2533
 email: sbasumal at stanford.edu




From jimkruger at yahoo.com  Tue Feb 17 17:09:05 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Tue, 17 Feb 2009 17:09:05 -0800 (PST)
Subject: innotec released tomorrow 2-18-09,  0900-1200  EOM
Message-ID: <60335.72985.qm@web38902.mail.mud.yahoo.com>




      


From ytcheng at stanford.edu  Tue Feb 17 17:12:29 2009
From: ytcheng at stanford.edu (Yao-Te Cheng)
Date: Tue, 17 Feb 2009 17:12:29 -0800
Subject: innotec released tomorrow 2-18-09,  0900-1200  EOM
In-Reply-To: <60335.72985.qm@web38902.mail.mud.yahoo.com>
References: <60335.72985.qm@web38902.mail.mud.yahoo.com>
Message-ID: <002001c99165$f8034ca0$e809e5e0$@edu>

Taken. Thank you.

Yao-Te

-----Original Message-----
From: jim kruger [mailto:jimkruger at yahoo.com] 
Sent: Tuesday, February 17, 2009 5:09 PM
To: Innotec
Subject: innotec released tomorrow 2-18-09, 0900-1200 EOM




      



From jasonlin at stanford.edu  Wed Feb 18 00:18:27 2009
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Wed, 18 Feb 2009 00:18:27 -0800
Subject: Innotec free Thurs 9pm - 1am 
Message-ID: <3EF88A42-2991-4A23-A1AE-6413165AE118@stanford.edu>



From jennyhu at stanford.edu  Thu Feb 19 15:56:21 2009
From: jennyhu at stanford.edu (Jenny Hu)
Date: Thu, 19 Feb 2009 15:56:21 -0800 (PST)
Subject: Innotec Free Friday 5 - 8 PM
Message-ID: <509423050.993891235087781829.JavaMail.root@zm06.stanford.edu>



From ahazeghi at stanford.edu  Thu Feb 19 15:57:27 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Thu, 19 Feb 2009 15:57:27 -0800
Subject: Innotec Free Friday 5 - 8 PM
In-Reply-To: <509423050.993891235087781829.JavaMail.root@zm06.stanford.edu>
References: <509423050.993891235087781829.JavaMail.root@zm06.stanford.edu>
Message-ID: <000601c992ed$d19e80a0$74db81e0$@edu>

Taken,

Thanks

 

 

 

From: Jenny Hu [mailto:jennyhu at stanford.edu] 
Sent: Thursday, February 19, 2009 3:56 PM
To: Innotec
Subject: Innotec Free Friday 5 - 8 PM

 

 

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From bdai at stanford.edu  Sat Feb 21 03:58:56 2009
From: bdai at stanford.edu (Bing Dai)
Date: Sat, 21 Feb 2009 03:58:56 -0800 (PST)
Subject: Innotec Error: crucible stuck
In-Reply-To: <1897912701.1255551235217468620.JavaMail.root@zm06.stanford.edu>
Message-ID: <292884296.1255621235217536398.JavaMail.root@zm06.stanford.edu>

Hi,

I tried to rotate the crucibles for inspection and it was stuck at C2. I retried toggle F2 once but the problem remains. Had to cancel my session. Next user please be aware.

Thanks,
Bing


From raymondawu at yahoo.com  Sat Feb 21 08:48:26 2009
From: raymondawu at yahoo.com (Raymond Wu)
Date: Sat, 21 Feb 2009 08:48:26 -0800 (PST)
Subject: Innotec Error: crucible stuck
In-Reply-To: <292884296.1255621235217536398.JavaMail.root@zm06.stanford.edu>
Message-ID: <528788.64005.qm@web30001.mail.mud.yahoo.com>

I found pellots stuck to the crucible rotation platform, which were
preventing the crucibles from rotating,? and I removed them.?
The machine can still be used.



Ray

--- On Sat, 2/21/09, Bing Dai <bdai at stanford.edu> wrote:
From: Bing Dai <bdai at stanford.edu>
Subject: Innotec Error: crucible stuck
To: innotec at snf.stanford.edu
Date: Saturday, February 21, 2009, 3:58 AM

Hi,

I tried to rotate the crucibles for inspection and it was stuck at C2. I
retried toggle F2 once but the problem remains. Had to cancel my session. Next
user please be aware.

Thanks,
Bing



      
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From ytcheng at stanford.edu  Sat Feb 21 09:28:02 2009
From: ytcheng at stanford.edu (Yao-Te Cheng)
Date: Sat, 21 Feb 2009 09:28:02 -0800 (PST)
Subject: Innotec free 9am-12pm tomorrow
In-Reply-To: <663046721.161041234813466696.JavaMail.root@zm08.stanford.edu>
Message-ID: <1482204836.1260191235237282677.JavaMail.root@zm06.stanford.edu>



From sbasumal at stanford.edu  Sat Feb 21 10:02:13 2009
From: sbasumal at stanford.edu (Shrestha Basu Mallick)
Date: Sat, 21 Feb 2009 10:02:13 -0800
Subject: Taken :Re: Innotec free 9am-12pm tomorrow
In-Reply-To: <1482204836.1260191235237282677.JavaMail.root@zm06.stanford.edu>
References: <1482204836.1260191235237282677.JavaMail.root@zm06.stanford.edu>
Message-ID: <49A041A5.8040203@stanford.edu>



Yao-Te Cheng wrote:

-- 
Shrestha Basu Mallick
 ---------------------------------
 Research Assistant
 E.L. Ginzton Labs
 450 Via Palou S31
 Stanford, CA 94305
 phone: 650-455-6691
 fax: 650-725-2533
 email: sbasumal at stanford.edu




From raneeyoo at stanford.edu  Mon Feb 23 16:39:51 2009
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Mon, 23 Feb 2009 16:39:51 -0800 (PST)
Subject: innotec from 7-10:30pm today will be used by Albert and Nishant
Message-ID: <2137859709.1623771235435991614.JavaMail.root@zm06.stanford.edu>

My samples will not be ready by then.
So Nishant and Albert will use my time from 7-10:30pm.

Kyeongran


From jimkruger at yahoo.com  Tue Feb 24 15:06:44 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Tue, 24 Feb 2009 15:06:44 -0800 (PST)
Subject: innotec released tomorrow 2-25-09 9:30 am  eom
Message-ID: <841024.33317.qm@web38903.mail.mud.yahoo.com>




      


From filip at stanford.edu  Tue Feb 24 16:48:42 2009
From: filip at stanford.edu (Filip Crnogorac)
Date: Tue, 24 Feb 2009 16:48:42 -0800 (PST)
Subject: innotec free midnight-2am tonight (eom)
Message-ID: <594593818.1725871235522922628.JavaMail.root@zm09.stanford.edu>




From jennyhu at stanford.edu  Tue Feb 24 17:00:54 2009
From: jennyhu at stanford.edu (Jenny Hu)
Date: Tue, 24 Feb 2009 17:00:54 -0800 (PST)
Subject: Innotec released 7 to 9:30 PM Today
Message-ID: <1629451856.1855151235523654104.JavaMail.root@zm06.stanford.edu>

Sorry for the late notice.  Some last minute changes.


From mferrier at stanford.edu  Thu Feb 26 10:30:47 2009
From: mferrier at stanford.edu (Marlene Ferrier)
Date: Thu, 26 Feb 2009 10:30:47 -0800 (PST)
Subject: iNNOTEC FREE TODAY 1-3 PM
Message-ID: <607807470.90691235673047834.JavaMail.root@zm08.stanford.edu>

sorry fit the late notice


From jperez at snf.stanford.edu  Thu Feb 26 11:44:12 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Thu, 26 Feb 2009 11:44:12 -0800
Subject: Innotec reservations have been deleted
Message-ID: <6.2.5.6.2.20090226112121.01db2350@snf.stanford.edu>

Good Morning Everyone,
I've deleted two reservations that were for one half hour today. I 
don't know why, but we all know that no one can  do a deposition in 
one half hour. I am also concern when I see reservations for one and 
one half hours. Before I start deleting those reservations, please 
see me. I will only except a minimum of two hours and more.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From filip at stanford.edu  Thu Feb 26 15:06:27 2009
From: filip at stanford.edu (Filip Crnogorac)
Date: Thu, 26 Feb 2009 15:06:27 -0800 (PST)
Subject: innotec 6-8am Fri free (eom)
Message-ID: <1088406430.160291235689587447.JavaMail.root@zm09.stanford.edu>



From linyouc at stanford.edu  Thu Feb 26 15:15:25 2009
From: linyouc at stanford.edu (Linyou Cao)
Date: Thu, 26 Feb 2009 15:15:25 -0800 (PST)
Subject: innotec 6-8am Fri free (eom)
In-Reply-To: <1088406430.160291235689587447.JavaMail.root@zm09.stanford.edu>
Message-ID: <1237616480.180831235690125239.JavaMail.root@zm06.stanford.edu>

Taken.  Thanks

Linyou
----- Original Message -----
From: "Filip Crnogorac" <filip at stanford.edu>
To: "innotec" <innotec at snf.stanford.edu>
Sent: Thursday, February 26, 2009 3:06:27 PM GMT -08:00 US/Canada Pacific
Subject: innotec 6-8am Fri free (eom)



From eap at gloworm.Stanford.EDU  Thu Feb 26 17:19:01 2009
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Thu, 26 Feb 2009 17:19:01 -0800 (PST)
Subject: Innotec reservations have been deleted
In-Reply-To: <6.2.5.6.2.20090226112121.01db2350@snf.stanford.edu>
Message-ID: <Pine.GSO.4.44.0902261717550.24377-100000@gloworm.Stanford.EDU>


What?

It's ENTIRELY possible to do a safe, good deposition in
1.5 hours, or less!!

Why screw up a machine that's already overbooked with
nonsense regulations?



On Thu, 26 Feb 2009, Jeannie Perez wrote:

> Good Morning Everyone,
> I've deleted two reservations that were for one half hour today. I
> don't know why, but we all know that no one can  do a deposition in
> one half hour. I am also concern when I see reservations for one and
> one half hours. Before I start deleting those reservations, please
> see me. I will only except a minimum of two hours and more.
>
> Jeannie Perez
> Science and Engineering Technician
> Stanford Nanofabrication Facility
> Stanford University
> Tel: (650) 723-7997
> Fax: (650) 725-6278
>
>
>



From jimkruger at yahoo.com  Thu Feb 26 18:16:03 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Thu, 26 Feb 2009 18:16:03 -0800 (PST)
Subject: innotec released tomorrow, Friday 2-27-09 1200 to 1500  eom
Message-ID: <137554.8492.qm@web38903.mail.mud.yahoo.com>




      


From audet at stanford.edu  Thu Feb 26 18:59:32 2009
From: audet at stanford.edu (Ross Audet)
Date: Thu, 26 Feb 2009 18:59:32 -0800
Subject: innotec free now to 10PM
Message-ID: <004401c99887$6a02dff0$3e089fd0$@edu>

Sorry for the late notice.

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From yiyangg at stanford.edu  Thu Feb 26 19:52:33 2009
From: yiyangg at stanford.edu (Yiyang Gong)
Date: Thu, 26 Feb 2009 19:52:33 -0800
Subject: innotec free now to 10PM
In-Reply-To: <004401c99887$6a02dff0$3e089fd0$@edu>
References: <004401c99887$6a02dff0$3e089fd0$@edu>
Message-ID: <49A76381.7050005@stanford.edu>

I took this session and released Saturday Midnight.

Yiyang

Ross Audet wrote:
>
> Sorry for the late notice.
>



From kimsangb at stanford.edu  Sat Feb 28 11:43:17 2009
From: kimsangb at stanford.edu (SangBum Kim)
Date: Sat, 28 Feb 2009 11:43:17 -0800 (PST)
Subject: interlock WFS1?
Message-ID: <1478745567.494441235850197927.JavaMail.root@zm01.stanford.edu>

Hello,

 While I was loading my sample, I noticed that 'interlock WFS1' message is shown on VSC screen. What does it mean? How do you clear that interlock? 

 Is it OK to proceed?

Thanks,
SangBum


From kimsangb at stanford.edu  Sat Feb 28 13:49:38 2009
From: kimsangb at stanford.edu (SangBum Kim)
Date: Sat, 28 Feb 2009 13:49:38 -0800 (PST)
Subject: interlock WFS1?
In-Reply-To: <66349272.505921235857318700.JavaMail.root@zm01.stanford.edu>
Message-ID: <880405891.506891235857778702.JavaMail.root@zm01.stanford.edu>

Here is an update. The 'interlock WFS1' has disappeared. It seems like an intermittent problem as Eric told to me.

Innotec is working fine as of now.

Thanks,
SangBum

----- Original Message -----
From: "J. Jason Lin" <jasonlin at stanford.edu>
To: "SangBum Kim" <kimsangb at stanford.edu>
Sent: Saturday, February 28, 2009 12:09:17 PM GMT -08:00 US/Canada Pacific
Subject: Re: interlock WFS1?

Hi SangBum,

I had that problem as well (see problem on 11/21/2008 and more  
recently 1/9/2009).  In my case, I was not able to finish the  
deposition, but I'm not sure if you'll have the same problem.

Jason


On Feb 28, 2009, at 11:43 AM, SangBum Kim wrote:

> Hello,
>
> While I was loading my sample, I noticed that 'interlock WFS1'  
> message is shown on VSC screen. What does it mean? How do you clear  
> that interlock?
>
> Is it OK to proceed?
>
> Thanks,
> SangBum