How Many samples do you deposit in Innotec using one pump down?

Nishant Parag Patil nppatil at stanford.edu
Fri Feb 13 15:42:58 PST 2009


Jeannie,

We use 4 wafers at a time quite often, sometimes more.

Thanks,
Nishant


----- Original Message -----
From: Jeannie Perez <jperez at snf.stanford.edu>
To: Innotec at snf.stanford.edu
Sent: Thu, 12 Feb 2009 14:44:43 -0800 (PST)
Subject: How Many samples do you deposit in Innotec using one pump down?

Hi,
We are thinking of buying another Carousel / Planetary. Does anyone 
use four or more 4 inch slots at one pump down time
for deposition? If you are using four or more slots in Innotec please 
reply to this E-mail.
Thank you,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





More information about the innotec mailing list