interlock WFS1?

[SangBum Kim]

Here is an update. The 'interlock WFS1' has disappeared. It seems like an intermittent problem as Eric told to me.

Innotec is working fine as of now.

Thanks,
SangBum

----- Original Message -----
From: "J. Jason Lin" <jasonlin at stanford.edu>
To: "SangBum Kim" <kimsangb at stanford.edu>
Sent: Saturday, February 28, 2009 12:09:17 PM GMT -08:00 US/Canada Pacific
Subject: Re: interlock WFS1?

Hi SangBum,

I had that problem as well (see problem on 11/21/2008 and more  
recently 1/9/2009).  In my case, I was not able to finish the  
deposition, but I'm not sure if you'll have the same problem.

Jason


On Feb 28, 2009, at 11:43 AM, SangBum Kim wrote:

> Hello,
>
> While I was loading my sample, I noticed that 'interlock WFS1'  
> message is shown on VSC screen. What does it mean? How do you clear  
> that interlock?
>
> Is it OK to proceed?
>
> Thanks,
> SangBum