interlock WFS1?

SangBum Kim kimsangb at
Sat Feb 28 13:49:38 PST 2009

Here is an update. The 'interlock WFS1' has disappeared. It seems like an intermittent problem as Eric told to me.

Innotec is working fine as of now.


----- Original Message -----
From: "J. Jason Lin" <jasonlin at>
To: "SangBum Kim" <kimsangb at>
Sent: Saturday, February 28, 2009 12:09:17 PM GMT -08:00 US/Canada Pacific
Subject: Re: interlock WFS1?

Hi SangBum,

I had that problem as well (see problem on 11/21/2008 and more  
recently 1/9/2009).  In my case, I was not able to finish the  
deposition, but I'm not sure if you'll have the same problem.


On Feb 28, 2009, at 11:43 AM, SangBum Kim wrote:

> Hello,
> While I was loading my sample, I noticed that 'interlock WFS1'  
> message is shown on VSC screen. What does it mean? How do you clear  
> that interlock?
> Is it OK to proceed?
> Thanks,
> SangBum

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