kimsangb at stanford.edu
Sat Feb 28 13:49:38 PST 2009
Here is an update. The 'interlock WFS1' has disappeared. It seems like an intermittent problem as Eric told to me.
Innotec is working fine as of now.
----- Original Message -----
From: "J. Jason Lin" <jasonlin at stanford.edu>
To: "SangBum Kim" <kimsangb at stanford.edu>
Sent: Saturday, February 28, 2009 12:09:17 PM GMT -08:00 US/Canada Pacific
Subject: Re: interlock WFS1?
I had that problem as well (see problem on 11/21/2008 and more
recently 1/9/2009). In my case, I was not able to finish the
deposition, but I'm not sure if you'll have the same problem.
On Feb 28, 2009, at 11:43 AM, SangBum Kim wrote:
> While I was loading my sample, I noticed that 'interlock WFS1'
> message is shown on VSC screen. What does it mean? How do you clear
> that interlock?
> Is it OK to proceed?
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