interlock WFS1?

SangBum Kim kimsangb at stanford.edu
Sat Feb 28 13:49:38 PST 2009


Here is an update. The 'interlock WFS1' has disappeared. It seems like an intermittent problem as Eric told to me.

Innotec is working fine as of now.

Thanks,
SangBum

----- Original Message -----
From: "J. Jason Lin" <jasonlin at stanford.edu>
To: "SangBum Kim" <kimsangb at stanford.edu>
Sent: Saturday, February 28, 2009 12:09:17 PM GMT -08:00 US/Canada Pacific
Subject: Re: interlock WFS1?

Hi SangBum,

I had that problem as well (see problem on 11/21/2008 and more  
recently 1/9/2009).  In my case, I was not able to finish the  
deposition, but I'm not sure if you'll have the same problem.

Jason


On Feb 28, 2009, at 11:43 AM, SangBum Kim wrote:

> Hello,
>
> While I was loading my sample, I noticed that 'interlock WFS1'  
> message is shown on VSC screen. What does it mean? How do you clear  
> that interlock?
>
> Is it OK to proceed?
>
> Thanks,
> SangBum




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