From leoyu at stanford.edu  Tue Jun  2 13:12:10 2009
From: leoyu at stanford.edu (Leo Yu)
Date: Tue, 2 Jun 2009 13:12:10 -0700 (PDT)
Subject: Innotec free from 1900-2300
Message-ID: <1687756252.2651741243973530647.JavaMail.root@zm03.stanford.edu>

Cannot make it. 
Sorry for the late notice.


From rshyam at stanford.edu  Wed Jun  3 00:15:05 2009
From: rshyam at stanford.edu (Shyam Raghunathan)
Date: Wed, 3 Jun 2009 00:15:05 -0700 (PDT)
Subject: innotec free from 6 am to 10 am
Message-ID: <1662870467.3352411244013305217.JavaMail.root@zm02.stanford.edu>



From rshyam at stanford.edu  Wed Jun  3 18:11:43 2009
From: rshyam at stanford.edu (Shyam Raghunathan)
Date: Wed, 3 Jun 2009 18:11:43 -0700 (PDT)
Subject: innotec free at 6 am tomorrow
Message-ID: <1733035644.3536981244077903950.JavaMail.root@zm02.stanford.edu>

ASML down


From xiangyuc at stanford.edu  Wed Jun  3 18:20:36 2009
From: xiangyuc at stanford.edu (Xiangyu Chen)
Date: Wed, 3 Jun 2009 18:20:36 -0700 (PDT)
Subject: Innotec release today 1900 to 2130
Message-ID: <152115332.106751244078436298.JavaMail.root@zm01.stanford.edu>

Sorry for late notice. Other equipments are down...

Enjoy!


From jasonlin at stanford.edu  Wed Jun  3 18:30:49 2009
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Wed, 3 Jun 2009 18:30:49 -0700
Subject: Innotec free Tomorrow 4-8pm
Message-ID: <346E828E-F115-4D3B-939A-C5107C067B8A@stanford.edu>



From haiwei at stanford.edu  Fri Jun  5 14:31:34 2009
From: haiwei at stanford.edu (Hai Wei)
Date: Fri, 5 Jun 2009 14:31:34 -0700
Subject: reservation released 3:30pm - 5:30pm
Message-ID: <001b01c9e625$001fc3f0$005f4bd0$@edu>

Sample not ready, sorry for the late notice.

 

 

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From jkoma at stanford.edu  Fri Jun  5 15:21:04 2009
From: jkoma at stanford.edu (Jason David Komadina)
Date: Fri, 5 Jun 2009 15:21:04 -0700 (PDT)
Subject: innotec released mon 6/8 2:30-6:30pm
Message-ID: <1885624838.509051244240464059.JavaMail.root@zm01.stanford.edu>



From ahazeghi at stanford.edu  Fri Jun  5 15:34:01 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Fri, 5 Jun 2009 15:34:01 -0700 (PDT)
Subject: innotec released mon 6/8 2:30-6:30pm
In-Reply-To: <1885624838.509051244240464059.JavaMail.root@zm01.stanford.edu>
Message-ID: <882557610.3360561244241241668.JavaMail.root@zm03.stanford.edu>

Taken, 

Thanks, 
Arash 
----- Original Message ----- 
From: "Jason David Komadina" <jkoma at stanford.edu> 
To: innotec at snf.stanford.edu 
Sent: Friday, June 5, 2009 3:21:04 PM GMT -08:00 US/Canada Pacific 
Subject: innotec released mon 6/8 2:30-6:30pm 

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From chen0622 at yahoo.com  Fri Jun  5 21:04:10 2009
From: chen0622 at yahoo.com (c.c.)
Date: Fri, 5 Jun 2009 21:04:10 -0700 (PDT)
Subject: innotec reservation released 6:30 AM to 9:30 AM (09/12)
Message-ID: <742892.76947.qm@web56801.mail.re3.yahoo.com>


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From leoyu at stanford.edu  Fri Jun  5 22:31:50 2009
From: leoyu at stanford.edu (Leo Yu)
Date: Fri, 5 Jun 2009 22:31:50 -0700 (PDT)
Subject: Innotec released Sat 1100-1500
Message-ID: <179743170.3420391244266310150.JavaMail.root@zm03.stanford.edu>



From ahazeghi at stanford.edu  Sat Jun  6 03:25:47 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Sat, 6 Jun 2009 03:25:47 -0700
Subject: Released 11AM-3PM Saturday
Message-ID: <000101c9e691$2857d120$79077360$@edu>

Ebeam lithography will not finish on time.

 

Thanks,

Arash

 

 

 

Arash Hazeghi

 

PhD Candidate

Paul G Allen Center for Integrated Systems, CIS-X 300

420 Via Palou Mall, Stanford, CA 94305

 

Phone:+1-650-725-0418

Cell:+1-650-353-1866

web: www.stanford.edu/~ahazeghi

http://nano.stanford.edu/

 

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From kj.jackson at comcast.net  Sat Jun  6 13:39:18 2009
From: kj.jackson at comcast.net (kj.jackson at comcast.net)
Date: Sat, 6 Jun 2009 20:39:18 +0000 (UTC)
Subject: innotec available??
In-Reply-To: <6.2.5.6.2.20090202122451.01e20bd8@snf.stanford.edu>
Message-ID: <220843274.2754471244320758453.JavaMail.root@sz0050a.emeryville.ca.mail.comcast.net>

Hi 

Will anyone have extra non used innotec time at anytime on sunday 6/7 ?? 

My wafers should be ready at midnight on Sunday morning, I would need not more than 2 hours. 

thanks, can call anytime and will be in the fab after 5:00pm saturday 6/6 

Kathy Jackson 
408-888-7884 

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From zguo at stanford.edu  Sun Jun  7 03:57:23 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Sun, 7 Jun 2009 03:57:23 -0700 (PDT)
Subject: innotec slots released
Message-ID: <1472145730.1639431244372243564.JavaMail.root@zm01.stanford.edu>

Jun, 7 09:00p~0:00a
and Jun 8 7:30p~9:30p.


From rshyam at stanford.edu  Sun Jun  7 17:46:29 2009
From: rshyam at stanford.edu (Shyam Raghunathan)
Date: Sun, 7 Jun 2009 17:46:29 -0700 (PDT)
Subject: innotec free from 2 am to 6 am tonight
Message-ID: <809437806.4193491244421989953.JavaMail.root@zm02.stanford.edu>



From ahazeghi at stanford.edu  Mon Jun  8 11:37:43 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Mon, 8 Jun 2009 11:37:43 -0700
Subject: Released 14-16:30 today
Message-ID: <002e01c9e868$35a92490$a0fb6db0$@edu>

My sample will not be ready on time, I am releasing half of my reservation.

 

Thanks,

Arash

 

 

\

 

Arash Hazeghi

 

PhD Candidate

Paul G Allen Center for Integrated Systems, CIS-X 300

420 Via Palou Mall, Stanford, CA 94305

 

Phone:+1-650-725-0418

Cell:+1-650-353-1866

web: www.stanford.edu/~ahazeghi

http://nano.stanford.edu/

 

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From mrlin at stanford.edu  Mon Jun  8 12:47:09 2009
From: mrlin at stanford.edu (Albert Lin)
Date: Mon, 08 Jun 2009 12:47:09 -0700
Subject: innotec free today 22:30p-midnight
Message-ID: <6.2.5.6.2.20090608124611.03a49348@stanford.edu>

took earlier slot
may also be free earlier if pump down is fast and I finish faster...



From kimsangb at stanford.edu  Tue Jun  9 04:25:17 2009
From: kimsangb at stanford.edu (SangBum Kim)
Date: Tue, 9 Jun 2009 04:25:17 -0700 (PDT)
Subject: innotec free 6:30PM to 10PM
Message-ID: <42264657.2014281244546717337.JavaMail.root@zm01.stanford.edu>

Sample would not be ready.

SangBum


From jperez at snf.stanford.edu  Tue Jun  9 10:23:49 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Tue, 09 Jun 2009 10:23:49 -0700
Subject: Palladium in poor condition
Message-ID: <6.2.5.6.2.20090609101426.01cef4c0@snf.stanford.edu>

Good Morning,
I check the Palladium starter source after a complaint and sure 
enough it's in poor condition. There isn't a hole, but metal sticking 
out from the bottom which won't allow the
source to stay cool. Another  Pd starter source had been on ordered 
and will arrive this week.
Regards,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From yychung at stanford.edu  Tue Jun  9 17:22:23 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Tue, 9 Jun 2009 17:22:23 -0700 (PDT)
Subject: Innotec Available 6/11 (6:30-8:30am) - EOM
Message-ID: <822024288.4633091244593343866.JavaMail.root@zm02.stanford.edu>



From mrlin at stanford.edu  Thu Jun 11 02:25:31 2009
From: mrlin at stanford.edu (Albert Lin)
Date: Thu, 11 Jun 2009 02:25:31 -0700 (PDT)
Subject: innotec free (now) 2:30AM-6:30AM
Message-ID: <305113758.2030371244712331785.JavaMail.root@zm07.stanford.edu>

Started early, finished early. (Will be done in 10 min.)


From David.Druist at grandisinc.com  Thu Jun 11 18:00:52 2009
From: David.Druist at grandisinc.com (David Druist)
Date: Thu, 11 Jun 2009 18:00:52 -0700
Subject: Friday 6/12 12 noon-2:30 PM innotec free
Message-ID: <887C381D359942449ABF950AC2304699026609B1A4@PDCSERVER.grandis.local>

Tooling problems upstream....

David Druist
Memory Process and Device Integration
Grandis, Inc.
408-390-5381
David.Druist at GrandisInc.com



From ahazeghi at stanford.edu  Thu Jun 11 18:01:24 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Thu, 11 Jun 2009 18:01:24 -0700
Subject: Friday 6/12 12 noon-2:30 PM innotec free
In-Reply-To: <887C381D359942449ABF950AC2304699026609B1A4@PDCSERVER.grandis.local>
References: <887C381D359942449ABF950AC2304699026609B1A4@PDCSERVER.grandis.local>
Message-ID: <001801c9eaf9$4ead5b30$ec081190$@edu>

Taken,
Thanks

Arash

-----Original Message-----
From: David Druist [mailto:David.Druist at grandisinc.com] 
Sent: Thursday, June 11, 2009 6:01 PM
To: Innotec at snf.stanford.edu
Subject: Friday 6/12 12 noon-2:30 PM innotec free

Tooling problems upstream....

David Druist
Memory Process and Device Integration
Grandis, Inc.
408-390-5381
David.Druist at GrandisInc.com




From yychung at stanford.edu  Fri Jun 12 05:08:35 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Fri, 12 Jun 2009 05:08:35 -0700 (PDT)
Subject: Innotec Available - 10-12pm TODAY
Message-ID: <2109144119.5081581244808515129.JavaMail.root@zm02.stanford.edu>

Sorry for the late notice.

Samples are not ready yet.


From jperez at snf.stanford.edu  Fri Jun 12 11:44:29 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Fri, 12 Jun 2009 11:44:29 -0700
Subject: Palladium starter source just arrived 6/12/09 for Innotec
Message-ID: <6.2.5.6.2.20090612114341.01d60418@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From zguo at stanford.edu  Sat Jun 13 04:04:30 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Sat, 13 Jun 2009 04:04:30 -0700 (PDT)
Subject: innotec Sat. 8:30p~0:00a slot released
Message-ID: <984484684.2706881244891070837.JavaMail.root@zm01.stanford.edu>



From chen0622 at yahoo.com  Sat Jun 13 06:02:09 2009
From: chen0622 at yahoo.com (c.c.)
Date: Sat, 13 Jun 2009 06:02:09 -0700 (PDT)
Subject: reservation released Monday (06/15) morning (7:00 to 10:00 AM)
Message-ID: <19148.20700.qm@web56807.mail.re3.yahoo.com>

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From xutian at stanford.edu  Sat Jun 13 14:19:28 2009
From: xutian at stanford.edu (Xu Tian)
Date: Sat, 13 Jun 2009 14:19:28 -0700
Subject: Innotec released Sunday 9:30-11:30
References: <2109144119.5081581244808515129.JavaMail.root@zm02.stanford.edu>
Message-ID: <ECD45696A09A4A96B5732525FD2176A5@XuTian>

No longer need this session.

Xu


From gthareja at stanford.edu  Sun Jun 14 15:44:19 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Sun, 14 Jun 2009 15:44:19 -0700 (PDT)
Subject: innotec free tonight.
Message-ID: <1213363608.3880341245019459738.JavaMail.root@zm06.stanford.edu>



From jennyhu at stanford.edu  Sun Jun 14 16:34:34 2009
From: jennyhu at stanford.edu (Jenny Hu)
Date: Sun, 14 Jun 2009 16:34:34 -0700 (PDT)
Subject: Innotec Free Now
Message-ID: <312117865.3883281245022474382.JavaMail.root@zm06.stanford.edu>



From kj.jackson at comcast.net  Mon Jun 15 02:02:39 2009
From: kj.jackson at comcast.net (kj.jackson at comcast.net)
Date: Mon, 15 Jun 2009 09:02:39 +0000 (UTC)
Subject: innotec available??
In-Reply-To: <220843274.2754471244320758453.JavaMail.root@sz0050a.emeryville.ca.mail.comcast.net>
Message-ID: <1524473837.5278781245056559864.JavaMail.root@sz0050a.emeryville.ca.mail.comcast.net>



Hi 

Will anyone have extra non used innotec time at anytime on monday night or tues am?? (june 15 and 16) 

My wafers should be ready at ~10:00pm monday night,? I would need not more than 2 hours. 

thanks,?? can call anytime 

Kathy Jackson 
408-888-7884? 

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From kj.jackson at comcast.net  Mon Jun 15 02:02:39 2009
From: kj.jackson at comcast.net (kj.jackson at comcast.net)
Date: Mon, 15 Jun 2009 09:02:39 +0000 (UTC)
Subject: innotec available??
In-Reply-To: <220843274.2754471244320758453.JavaMail.root@sz0050a.emeryville.ca.mail.comcast.net>
Message-ID: <1524473837.5278781245056559864.JavaMail.root@sz0050a.emeryville.ca.mail.comcast.net>



Hi 

Will anyone have extra non used innotec time at anytime on monday night or tues am?? (june 15 and 16) 

My wafers should be ready at ~10:00pm monday night,? I would need not more than 2 hours. 

thanks,?? can call anytime 

Kathy Jackson 
408-888-7884? 

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From ghyrn at amprius.com  Mon Jun 15 08:48:32 2009
From: ghyrn at amprius.com (Ghyrn Loveness)
Date: Mon, 15 Jun 2009 08:48:32 -0700
Subject: Innotec, done early.
Message-ID: <9c6d52a00906150848h65d010a8mb20f35e620114c18@mail.gmail.com>


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From ghyrn at amprius.com  Tue Jun 16 11:33:37 2009
From: ghyrn at amprius.com (Ghyrn Loveness)
Date: Tue, 16 Jun 2009 11:33:37 -0700
Subject: Innotec Released Friday 10am, eom.
Message-ID: <3C88AA95-06FC-4DAE-95E5-FD729B1B0287@amprius.com>



From dongrip at stanford.edu  Tue Jun 16 23:10:42 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Tue, 16 Jun 2009 23:10:42 -0700
Subject: Innotec tomorrow morning 5:30-9:30am released
Message-ID: <021501c9ef12$5841d910$08c58b30$@edu>

Upstream equipment was down, and I can't further my sample preparation.
Sorry about late notice.

Dong Rip

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From xiangyuc at stanford.edu  Wed Jun 17 17:32:29 2009
From: xiangyuc at stanford.edu (Xiangyu Chen)
Date: Wed, 17 Jun 2009 17:32:29 -0700 (PDT)
Subject: innotec release Thursday 15:00
Message-ID: <1186312417.3443891245285149254.JavaMail.root@zm01.stanford.edu>

Sample won't be ready. Enjoy!


From ahazeghi at stanford.edu  Wed Jun 17 17:33:19 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Wed, 17 Jun 2009 17:33:19 -0700
Subject: innotec release Thursday 15:00
In-Reply-To: <1186312417.3443891245285149254.JavaMail.root@zm01.stanford.edu>
References: <1186312417.3443891245285149254.JavaMail.root@zm01.stanford.edu>
Message-ID: <003501c9efac$613052a0$2390f7e0$@edu>

Taken, released 22:00-midnight

Arash

-----Original Message-----
From: Xiangyu Chen [mailto:xiangyuc at stanford.edu] 
Sent: Wednesday, June 17, 2009 5:32 PM
To: Innotec
Subject: innotec release Thursday 15:00

Sample won't be ready. Enjoy!



From gdiankov at stanford.edu  Wed Jun 17 21:07:43 2009
From: gdiankov at stanford.edu (Georgi Diankov)
Date: Wed, 17 Jun 2009 21:07:43 -0700 (PDT)
Subject: Innotec free 7:30 - 11 pm Friday
Message-ID: <1791632763.3064831245298063542.JavaMail.root@zm07.stanford.edu>

Sample won't be ready. 



From zguo at stanford.edu  Wed Jun 17 23:32:18 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Wed, 17 Jun 2009 23:32:18 -0700 (PDT)
Subject: Innotec Thu (June 18) 19:30~22:30 slot released
Message-ID: <896232249.3476611245306738834.JavaMail.root@zm01.stanford.edu>



From chen0622 at yahoo.com  Thu Jun 18 09:24:17 2009
From: chen0622 at yahoo.com (c.c.)
Date: Thu, 18 Jun 2009 09:24:17 -0700 (PDT)
Subject: Innotec reservation released June 20 (Sat.) 6:00 PM to 9:00 PM
Message-ID: <968342.66605.qm@web56802.mail.re3.yahoo.com>


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From jperez at snf.stanford.edu  Thu Jun 18 10:27:17 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Thu, 18 Jun 2009 10:27:17 -0700
Subject: Out of Palladium AGAIN!
Message-ID: <6.2.5.6.2.20090618102118.01d1a970@snf.stanford.edu>

Hi,
I just happen to put a new Palladium starter source in the Lab on 
Friday 6/12 and by Tuesday 6/16 someone damaged it. Another Pd is on order.
This is approximately $1000 each.
Please be careful when you are using any starter source. PLEASE 
REMEMBER TO CLEAN CRUCIBLE POCKET, when they don't fit properly in the crucible
Jeannie

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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From xutian at stanford.edu  Thu Jun 18 13:00:00 2009
From: xutian at stanford.edu (Xu Tian)
Date: Thu, 18 Jun 2009 13:00:00 -0700
Subject: release 20:30-22:30 today
References: <6.2.5.6.2.20090618102118.01d1a970@snf.stanford.edu>
Message-ID: <B4C6FAF2CCA646529C6C20F1411100AD@XuTian>

Sample won't be ready.

Xu
  ----- Original Message ----- 
  From: Jeannie Perez 
  To: innotec at snf.stanford.edu 
  Sent: Thursday, June 18, 2009 10:27 AM
  Subject: Out of Palladium AGAIN!


  Hi,
  I just happen to put a new Palladium starter source in the Lab on Friday 6/12 and by Tuesday 6/16 someone damaged it. Another Pd is on order.
  This is approximately $1000 each.
  Please be careful when you are using any starter source. PLEASE REMEMBER TO CLEAN CRUCIBLE POCKET, when they don't fit properly in the crucible
  Jeannie

  Jeannie Perez
  Science and Engineering Technician
  Stanford Nanofabrication Facility
  Stanford University
  Tel: (650) 723-7997
  Fax: (650) 725-6278


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From yychung at stanford.edu  Fri Jun 19 08:41:39 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Fri, 19 Jun 2009 08:41:39 -0700 (PDT)
Subject: Released at 1-3pm TODAY
Message-ID: <570950210.6015261245426099766.JavaMail.root@zm02.stanford.edu>

Samples are not ready yet.

Sorry for the late notice.


From jaypark at stanford.edu  Fri Jun 19 08:43:07 2009
From: jaypark at stanford.edu (Jason Parker)
Date: Fri, 19 Jun 2009 08:43:07 -0700
Subject: Released at 1-3pm TODAY
In-Reply-To: <570950210.6015261245426099766.JavaMail.root@zm02.stanford.edu>
References: <570950210.6015261245426099766.JavaMail.root@zm02.stanford.edu>
Message-ID: <000101c9f0f4$a49b2fd0$edd18f70$@edu>

Taken, thanks.

-----Original Message-----
From: Yoonyoung Chung [mailto:yychung at stanford.edu] 
Sent: Friday, June 19, 2009 8:42 AM
To: innotec
Subject: Released at 1-3pm TODAY

Samples are not ready yet.

Sorry for the late notice.



From jaypark at stanford.edu  Fri Jun 19 12:46:54 2009
From: jaypark at stanford.edu (Jason Parker)
Date: Fri, 19 Jun 2009 12:46:54 -0700
Subject: Innotec free NOW to 3 pm
In-Reply-To: <000101c9f0f4$a49b2fd0$edd18f70$@edu>
References: <570950210.6015261245426099766.JavaMail.root@zm02.stanford.edu> <000101c9f0f4$a49b2fd0$edd18f70$@edu>
Message-ID: <000c01c9f116$b3016f40$19044dc0$@edu>

Innotec free NOW (12:45 pm) to 3 pm.

Canceled reservation from 1-3 pm because I cannot do my clean before going into innotec since all 2" fluoroware is nowhere to be found in the lab. Needless to say if you have any idea where the clean 2" cassettes have gone, I would appreciate the info.

-Jason




-----Original Message-----
From: Jason Parker [mailto:jaypark at stanford.edu] 
Sent: Friday, June 19, 2009 8:43 AM
To: 'Yoonyoung Chung'; 'innotec'
Subject: RE: Released at 1-3pm TODAY

Taken, thanks.

-----Original Message-----
From: Yoonyoung Chung [mailto:yychung at stanford.edu] 
Sent: Friday, June 19, 2009 8:42 AM
To: innotec
Subject: Released at 1-3pm TODAY

Samples are not ready yet.

Sorry for the late notice.



From dongrip at stanford.edu  Sat Jun 20 19:24:43 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Sat, 20 Jun 2009 19:24:43 -0700
Subject: (innotec) tomorrow 5-9am relased
Message-ID: <003601c9f217$6fdf8920$4f9e9b60$@edu>

 

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From gthareja at stanford.edu  Sat Jun 20 21:18:55 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Sat, 20 Jun 2009 21:18:55 -0700 (PDT)
Subject: innotec free tomorrow evening.
Message-ID: <1521973948.4708851245557935867.JavaMail.root@zm06.stanford.edu>



From duygu at stanford.edu  Sun Jun 21 21:46:15 2009
From: duygu at stanford.edu (Duygu Kuzum)
Date: Sun, 21 Jun 2009 21:46:15 -0700 (PDT)
Subject: innotec is free at 6am-8am tmorrow
Message-ID: <949774177.5472761245645975163.JavaMail.root@zm03.stanford.edu>



From jweisse at stanford.edu  Mon Jun 22 10:07:45 2009
From: jweisse at stanford.edu (Jeffrey M. Weisse)
Date: Mon, 22 Jun 2009 10:07:45 -0700 (PDT)
Subject: innotec free tomorrow night 8:30-midnight
Message-ID: <1324860962.4831771245690465430.JavaMail.root@zm06.stanford.edu>



From ytcheng at stanford.edu  Mon Jun 22 10:09:24 2009
From: ytcheng at stanford.edu (Yao-Te Cheng)
Date: Mon, 22 Jun 2009 10:09:24 -0700
Subject: innotec free 1-5pm
Message-ID: <000301c9f35c$31416580$93c43080$@edu>

Sample is not ready.

 

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From fanpy839 at stanford.edu  Mon Jun 22 11:07:35 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Mon, 22 Jun 2009 11:07:35 -0700 (PDT)
Subject: innotec Tue 06/23 6:30am-9:00am released
Message-ID: <33224085.4007991245694055368.JavaMail.root@zm01.stanford.edu>



From filip at stanford.edu  Mon Jun 22 11:10:06 2009
From: filip at stanford.edu (Filip Crnogorac)
Date: Mon, 22 Jun 2009 11:10:06 -0700 (PDT)
Subject: innotec free until 12:30pm EOM
Message-ID: <1038224743.4656411245694206121.JavaMail.root@zm09.stanford.edu>



From jperez at snf.stanford.edu  Mon Jun 22 14:51:50 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 22 Jun 2009 14:51:50 -0700
Subject: Removed my reservation on Innotec for June 26th and 29th
Message-ID: <6.2.5.6.2.20090622145024.01cbc198@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From jkoma at stanford.edu  Mon Jun 22 15:33:52 2009
From: jkoma at stanford.edu (Jason David Komadina)
Date: Mon, 22 Jun 2009 15:33:52 -0700 (PDT)
Subject: Removed my reservation on Innotec for June 26th and 29th
In-Reply-To: <6.2.5.6.2.20090622145024.01cbc198@snf.stanford.edu>
Message-ID: <1461194481.4088971245710032144.JavaMail.root@zm01.stanford.edu>

jun 29th 9-12 taken

----- Original Message -----
From: Jeannie Perez <jperez at snf.stanford.edu>
To: innotec at snf.stanford.edu
Sent: Mon, 22 Jun 2009 14:51:50 -0700 (PDT)
Subject: Removed my reservation on Innotec for June 26th and 29th



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278





From ghyrn at amprius.com  Mon Jun 22 17:39:59 2009
From: ghyrn at amprius.com (Ghyrn Loveness)
Date: Mon, 22 Jun 2009 17:39:59 -0700
Subject: Friday 26th reservation released (12:20 - 2:30pm), eom
Message-ID: <86C2278D-70D8-490A-B1DF-B02ADADB09B0@amprius.com>




Ghyrn Loveness





1430C O'Brien Dr
Menlo Park, CA 94025

ghyrn at amprius.com
(206) 849-9460




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From rtomita at stanford.edu  Mon Jun 22 19:40:07 2009
From: rtomita at stanford.edu (Ryuji Tomita)
Date: Mon, 22 Jun 2009 19:40:07 -0700 (PDT)
Subject: Innotec free from 2am-6am at 6/22
Message-ID: <1471166833.3719421245724807563.JavaMail.root@zm07.stanford.edu>

Sample is not ready.


From rtomita at stanford.edu  Mon Jun 22 19:42:32 2009
From: rtomita at stanford.edu (Ryuji Tomita)
Date: Mon, 22 Jun 2009 19:42:32 -0700 (PDT)
Subject: Innotec free from 2am-6am at 6/23
Message-ID: <2085313458.3719681245724952474.JavaMail.root@zm07.stanford.edu>

Last mail is wrong.
Innotec is free from 2am-6am at 6/23.


From hosotani at stanford.edu  Tue Jun 23 10:42:52 2009
From: hosotani at stanford.edu (Keiji Hosotani)
Date: Tue, 23 Jun 2009 10:42:52 -0700 (PDT)
Subject: Released my reservation today 1:30-4:30pm
Message-ID: <1381930138.4852261245778972083.JavaMail.root@zm09.stanford.edu>

Sample is not ready

Keiji


From jperez at snf.stanford.edu  Tue Jun 23 15:34:16 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Tue, 23 Jun 2009 15:34:16 -0700
Subject: Parcel Clean Parts exchange has been done on Innotec
Message-ID: <6.2.5.6.2.20090623153021.01d48778@snf.stanford.edu>

Pump Downs taking 40 minutes.
Jeannie

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From mferrier at stanford.edu  Tue Jun 23 18:41:16 2009
From: mferrier at stanford.edu (Marlene Ferrier)
Date: Tue, 23 Jun 2009 18:41:16 -0700 (PDT)
Subject: innotec free now until 8:30
Message-ID: <1891542687.4487341245807676713.JavaMail.root@zm08.stanford.edu>

Sample failed at the last minute
Please back up

Marlene


From ahazeghi at stanford.edu  Tue Jun 23 18:45:35 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Tue, 23 Jun 2009 18:45:35 -0700
Subject: innotec free now until 8:30
In-Reply-To: <1891542687.4487341245807676713.JavaMail.root@zm08.stanford.edu>
References: <1891542687.4487341245807676713.JavaMail.root@zm08.stanford.edu>
Message-ID: <003701c9f46d$77d1a390$6774eab0$@edu>

Taken, thanks

Arash

-----Original Message-----
From: Marlene Ferrier [mailto:mferrier at stanford.edu] 
Sent: Tuesday, June 23, 2009 6:41 PM
To: innotec
Subject: innotec free now until 8:30

Sample failed at the last minute
Please back up

Marlene



From audet at stanford.edu  Tue Jun 23 20:00:24 2009
From: audet at stanford.edu (Ross Audet)
Date: Tue, 23 Jun 2009 20:00:24 -0700
Subject: innotec released Wed 6/24 2:30 AM to 6 AM
Message-ID: <000001c9f477$ed475390$c7d5fab0$@edu>

 

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From ahazeghi at stanford.edu  Wed Jun 24 01:26:22 2009
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Wed, 24 Jun 2009 01:26:22 -0700 (PDT)
Subject: Slow pump down
In-Reply-To: <1292746178.5825321245831840233.JavaMail.root@zm03.stanford.edu>
Message-ID: <1928374176.5825421245831982233.JavaMail.root@zm03.stanford.edu>

Innotec has been pumping down for 1:20 hrs and vaccum does not go below 6.8E-7 torr, one evening user has reported 4E-7 in 35 minutes I wonder what has happened to the system between then and now. 

Thanks, 
Arash 


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From filip at stanford.edu  Wed Jun 24 11:32:15 2009
From: filip at stanford.edu (Filip Crnogorac)
Date: Wed, 24 Jun 2009 11:32:15 -0700 (PDT)
Subject: Innotec THU 10:30am-1pm free [EOM]
Message-ID: <2100158034.5076691245868335020.JavaMail.root@zm09.stanford.edu>



From mferrier at stanford.edu  Wed Jun 24 11:40:45 2009
From: mferrier at stanford.edu (Marlene Ferrier)
Date: Wed, 24 Jun 2009 11:40:45 -0700 (PDT)
Subject: Mo evaporation
Message-ID: <1918381492.4580681245868845804.JavaMail.root@zm08.stanford.edu>

Hi,

I have been trying to evaporate Mo and the surface came out extremely rough.

If you know if and how (max thickness?, Power?) this problem can be avoided I would really appreciate your feedback

Thanks in advance

Marlene 


From oguz.h.elibol at intel.com  Wed Jun 24 15:24:36 2009
From: oguz.h.elibol at intel.com (Elibol, Oguz H)
Date: Wed, 24 Jun 2009 15:24:36 -0700
Subject: Innotec Free on Wednesday 7:00 pm-10:30pm
Message-ID: <88D294E28D20D84C9350E231A79B0E6390EE0E50@orsmsx506.amr.corp.intel.com>

Sorry about the late notice...
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From jrjain at stanford.edu  Wed Jun 24 15:25:54 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Wed, 24 Jun 2009 15:25:54 -0700
Subject: Innotec Free on Wednesday 7:00 pm-10:30pm
In-Reply-To: <88D294E28D20D84C9350E231A79B0E6390EE0E50@orsmsx506.amr.corp.intel.com>
References: <88D294E28D20D84C9350E231A79B0E6390EE0E50@orsmsx506.amr.corp.intel.com>
Message-ID: <00b801c9f51a$bcec08f0$36c41ad0$@edu>

Taken.  Thanks.

 

From: Elibol, Oguz H [mailto:oguz.h.elibol at intel.com] 
Sent: Wednesday, June 24, 2009 3:25 PM
To: innotec at snf.stanford.edu
Subject: Innotec Free on Wednesday 7:00 pm-10:30pm

 

Sorry about the late notice. 

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From jrjain at stanford.edu  Wed Jun 24 16:11:31 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Wed, 24 Jun 2009 16:11:31 -0700
Subject: innotec free today 7-10:30pm
Message-ID: <001a01c9f521$1e6b3c80$5b41b580$@edu>

Upstream equipment (ASML) unavailable.  Apologies for late notice.

 

 

 

Jinendra Raja Jain

PhD Candidate

Stanford University, Department of Electrical Engineering

Allen Center for Integrated Systems

420 Via Palou

Stanford, CA 94305

(650) 248-0770

 

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From jperez at snf.stanford.edu  Thu Jun 25 10:22:46 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Thu, 25 Jun 2009 10:22:46 -0700
Subject: Slow pump down
In-Reply-To: <1928374176.5825421245831982233.JavaMail.root@zm03.stanford
 .edu>
References: <1292746178.5825321245831840233.JavaMail.root@zm03.stanford.edu>
 <1928374176.5825421245831982233.JavaMail.root@zm03.stanford.edu>
Message-ID: <6.2.5.6.2.20090625101847.01cd3960@snf.stanford.edu>

To All Innotec Users,

Lots can happen! If your not careful and touch your face , oil, lay 
parts on table that has oil on it. Vacuum hose if not used correctly. 
Even if the previous use after his deposition could of done
something. Photo resist needs to be baked. Users are using their 
hands with or without vinyl gloves to unload wafers instead of tweezers.
I pumped down before the user with 35 minutes and with clean parts 
and all it only took 40 minutes for me.
These are just a few reasons why it is taking longer.
Jeannie


At 01:26 AM 6/24/2009, Arash Hazeghi wrote:
>Innotec has been pumping down for 1:20 hrs and vaccum does not go 
>below 6.8E-7 torr, one evening user has reported 4E-7 in 35 minutes 
>I wonder what has happened to the system between then and now.
>
>Thanks,
>Arash
>

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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From dgrbovic at snf.stanford.edu  Thu Jun 25 16:36:17 2009
From: dgrbovic at snf.stanford.edu (Dragoslav Grbovic)
Date: Thu, 25 Jun 2009 16:36:17 -0700
Subject: Au evaporation ride share
Message-ID: <6b5c2ea50906251636g711e812ajfc1b15e0bcdd401b@mail.gmail.com>

If anyone is planning to deposit >100 nm Au layer (or any stack that has
gold on top) in the next few days, please let me know.Thank you
Drago Grbovic
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From jimkruger at yahoo.com  Thu Jun 25 17:28:52 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Thu, 25 Jun 2009 17:28:52 -0700 (PDT)
Subject: Innotec released  Friday, 6-26-09, 1630-1830  EOM
Message-ID: <103162.70613.qm@web38908.mail.mud.yahoo.com>





      


From dongrip at stanford.edu  Thu Jun 25 17:49:52 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Thu, 25 Jun 2009 17:49:52 -0700
Subject: (innotec) 6/26 (Friday) 2:30-4:30am released
Message-ID: <015601c9f5f8$03f7b630$0be72290$@edu>

Sample won't be prepared by that time. 

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From mferrier at stanford.edu  Thu Jun 25 22:20:57 2009
From: mferrier at stanford.edu (Marlene Ferrier)
Date: Thu, 25 Jun 2009 22:20:57 -0700 (PDT)
Subject: innotec free friday 8am-10am
Message-ID: <1660428006.4980701245993657514.JavaMail.root@zm08.stanford.edu>



From jkoma at stanford.edu  Fri Jun 26 09:16:27 2009
From: jkoma at stanford.edu (Jason Komadina)
Date: Fri, 26 Jun 2009 09:16:27 -0700
Subject: mon 9a-noon released
Message-ID: <4A44F45B.7030609@stanford.edu>




From jennyhu at stanford.edu  Fri Jun 26 12:44:06 2009
From: jennyhu at stanford.edu (Jenny Hu)
Date: Fri, 26 Jun 2009 12:44:06 -0700 (PDT)
Subject: Innotec Free 2:30-4:30 PM
Message-ID: <1424486304.5450141246045446010.JavaMail.root@zm06.stanford.edu>

Pd target not available still.


From zguo at stanford.edu  Sun Jun 28 09:40:06 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Sun, 28 Jun 2009 09:40:06 -0700 (PDT)
Subject: innotec today 2:00~5:00p released
Message-ID: <145146292.4883861246207206653.JavaMail.root@zm01.stanford.edu>

sorry for the late notice.


From jrjain at stanford.edu  Sun Jun 28 11:44:38 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Sun, 28 Jun 2009 11:44:38 -0700
Subject: innotect free until 2pm
Message-ID: <006c01c9f820$7e3d0560$7ab71020$@edu>

Wafers aren't going to ready in time, so have to take a later time.
Apologies for the late notice.

 

Best,

Raja

 

 

 

 

Jinendra Raja Jain

PhD Candidate

Stanford University, Department of Electrical Engineering

Allen Center for Integrated Systems

420 Via Palou

Stanford, CA 94305

(650) 248-0770

 

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From jperez at snf.stanford.edu  Mon Jun 29 13:49:32 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 29 Jun 2009 13:49:32 -0700
Subject: Make sure you are cleaning out crucible before placing
  sources, Pd is in
Message-ID: <6.2.5.6.2.20090629134804.01cf4770@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From yychung at stanford.edu  Tue Jun 30 01:30:31 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Tue, 30 Jun 2009 01:30:31 -0700 (PDT)
Subject: Wednesday 6:30-8am Available - EOM
Message-ID: <153526020.7447721246350631234.JavaMail.root@zm02.stanford.edu>