Slow pump down

Arash Hazeghi ahazeghi at stanford.edu
Wed Jun 24 01:26:22 PDT 2009


Innotec has been pumping down for 1:20 hrs and vaccum does not go below 6.8E-7 torr, one evening user has reported 4E-7 in 35 minutes I wonder what has happened to the system between then and now. 

Thanks, 
Arash 


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