From zguo at stanford.edu  Sun Mar  1 02:28:32 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Sun, 1 Mar 2009 02:28:32 -0800 (PST)
Subject: innotec interlock
In-Reply-To: <137554.8492.qm@web38903.mail.mud.yahoo.com>
Message-ID: <1386844517.567331235903312542.JavaMail.root@zm01.stanford.edu>

Hi everyone:

I was pumping down the innotec for 2 hours, and the pressure is 3.8e-7torr, when I try to deposite, found there is an "INTERLOCK WFS1", and the GUN FILAMENT appears as "INTLK", deposition can not begin.

I found in the log book some people met this before, and still can deposite, so if you see the email could you please tell me how to fix it`?

Thanks very much!

Zhiqiang


----- Original Message -----
From: "jim kruger" <jimkruger at yahoo.com>
To: "Innotec" <Innotec at snf.stanford.edu>
Sent: Thursday, February 26, 2009 6:16:03 PM GMT -08:00 US/Canada Pacific
Subject: innotec released tomorrow, Friday 2-27-09 1200 to 1500  eom




      


From ahryciw at stanford.edu  Mon Mar  2 05:26:14 2009
From: ahryciw at stanford.edu (Aaron Hryciw)
Date: Mon, 2 Mar 2009 05:26:14 -0800
Subject: System will not vent!
Message-ID: <4d36fb940903020526j5e9b8101hb5a67989f487912b@mail.gmail.com>

Hello,

My deposition went entirely as normal, but the system has now been "venting"
for about half an hour, and still the ATM light has not turned on.  The vent
valve is open, as verified on the "Manual" screen.  I have one wafer stuck
inside.  If the system finally reaches atmosphere, would the next user,
maintenance, etc., please remove it and place it in the wafer carrier marked
on the table.  If possible, please email me to let me know that it has been
removed.

Thanks,

 - Aaron


-- 
Dr. Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA  94305-4045

Tel.:  (650) 723-5840
Fax.:  (650) 736-1984
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090302/edb870eb/attachment.html>

From huin at altadevices.com  Mon Mar  2 21:33:12 2009
From: huin at altadevices.com (Hui Nie)
Date: Mon, 2 Mar 2009 21:33:12 -0800
Subject: Innotec free from 22:00 to 1:00AM today
In-Reply-To: <b02a013c0811041303j6d9b8481v70746f4b3621138c@mail.gmail.com>
References: <b02a013c0811041303j6d9b8481v70746f4b3621138c@mail.gmail.com>
Message-ID: <ABCB7A897A660F4A82DD477F0EA38090EDADFFB5B2@EXVMBX003-4.exch003intermedia.net>

Sorry for really short notice. My sample just won't be ready in time, so innotec will be free.

Thanks!

Hui
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090302/358eb950/attachment.html>

From gthareja at stanford.edu  Mon Mar  2 22:51:33 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Mon, 2 Mar 2009 22:51:33 -0800 (PST)
Subject: taken 11p-2a, today
Message-ID: <127528777.1038001236063093788.JavaMail.root@zm06.stanford.edu>



From gthareja at stanford.edu  Tue Mar  3 01:07:17 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Tue, 3 Mar 2009 01:07:17 -0800 (PST)
Subject: innotec free now
Message-ID: <1331507356.1061991236071237308.JavaMail.root@zm06.stanford.edu>



From mtang at stanford.edu  Tue Mar  3 13:43:19 2009
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 03 Mar 2009 13:43:19 -0800
Subject: Share-the-ride:  A new way to look at reservations
Message-ID: <49ADA477.9030805@stanford.edu>

Dear innotec user:

Reservations, reservations, reservations.  We know they are difficult to 
get and I'm afraid we don't have an easy solution.

However, it is clear that many people would like to deposit similar 
films.  So starting today, in order to encourage people to 
"share-the-ride", we are asking innotec users to list the film(s) you 
plan to deposit when you make your reservation.

To do this, make your reservation as usual -- but before you hit "OK", 
make sure to enter information about your deposition on the "Process" 
field (normally, this reads "default".)  It can be as simple as "100 A 
Cr/ 1000 A Au".

To check the films planned for existing reservations, just double-click 
on the time slot on the Reservations tab on Coral.  A pop-up window will 
show who has made the reservation (and in the case of staff members, for 
whom the reservation was made) as well as entries on the Process field.  
The Coral team is looking at ways to make it easier to look at 
Processes, but in the meantime, using the Reservations tab should be 
workable.

When you see a reservation with a Process you are interested in, please 
contact that person directly to make your arrangements.

No, this won't solve the reservations problem, it should be very handy 
for some people who have similar film needs --

Nice gifts (courtesy of Maurice's amazing design skills) will be 
provided to the first pair of documented ride-sharers.

Thanks for your attention --

Your Metals Quality Circle

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090303/337d92dd/attachment.html>

From kodama at stanford.edu  Tue Mar  3 13:57:41 2009
From: kodama at stanford.edu (Takashi Kodama)
Date: Tue, 3 Mar 2009 13:57:41 -0800 (PST)
Subject: Free from 6:00 am to 9:00 am on Wednesday
Message-ID: <624882425.956261236117461609.JavaMail.root@zm09.stanford.edu>


Hi All,

My previous fabrication process has not been finished.
So, I will not be able to use the instruments at my researvation time.

Thanks,

Takashi Kodama
kodama at stanford.edu


From eap at gloworm.Stanford.EDU  Tue Mar  3 14:23:04 2009
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Tue, 3 Mar 2009 14:23:04 -0800 (PST)
Subject: Share-the-ride:  A new way to look at reservations
In-Reply-To: <49ADA477.9030805@stanford.edu>
Message-ID: <Pine.GSO.4.44.0903031421530.87-100000@gloworm.Stanford.EDU>


A forum already exists:

http://www.lelandstanfordjunior.com/runsharefaq.html

Would that be useful?

-Eric


On Tue, 3 Mar 2009, Mary Tang wrote:

> Dear innotec user:
>
> Reservations, reservations, reservations.  We know they are difficult to
> get and I'm afraid we don't have an easy solution.
>
> However, it is clear that many people would like to deposit similar
> films.  So starting today, in order to encourage people to
> "share-the-ride", we are asking innotec users to list the film(s) you
> plan to deposit when you make your reservation.
>
> To do this, make your reservation as usual -- but before you hit "OK",
> make sure to enter information about your deposition on the "Process"
> field (normally, this reads "default".)  It can be as simple as "100 A
> Cr/ 1000 A Au".
>
> To check the films planned for existing reservations, just double-click
> on the time slot on the Reservations tab on Coral.  A pop-up window will
> show who has made the reservation (and in the case of staff members, for
> whom the reservation was made) as well as entries on the Process field.
> The Coral team is looking at ways to make it easier to look at
> Processes, but in the meantime, using the Reservations tab should be
> workable.
>
> When you see a reservation with a Process you are interested in, please
> contact that person directly to make your arrangements.
>
> No, this won't solve the reservations problem, it should be very handy
> for some people who have similar film needs --
>
> Nice gifts (courtesy of Maurice's amazing design skills) will be
> provided to the first pair of documented ride-sharers.
>
> Thanks for your attention --
>
> Your Metals Quality Circle
>
> --
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu
>
>



From mtang at stanford.edu  Tue Mar  3 16:25:03 2009
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 03 Mar 2009 16:25:03 -0800
Subject: Share-the-ride:  A new way to look at reservations
In-Reply-To: <Pine.GSO.4.44.0903031421530.87-100000@gloworm.Stanford.EDU>
References: <Pine.GSO.4.44.0903031421530.87-100000@gloworm.Stanford.EDU>
Message-ID: <49ADCA5F.6030903@stanford.edu>

Thanks Eric --

Yes, whatever works!!  (I take it that everyone who needs to knows the 
password to access this system?)

The Metal Quality Circle considered several different methods (such as a 
dedicated Google calendar).  It seemed simplest to use something that 
already exists in Coral -- maybe not quite as elegant as desired, but 
the Coral team is considering improvements.

Let us know how it goes!

Mary




Eric Perozziello wrote:
> A forum already exists:
>
> http://www.lelandstanfordjunior.com/runsharefaq.html
>
> Would that be useful?
>
> -Eric
>
>
> On Tue, 3 Mar 2009, Mary Tang wrote:
>
>   
>> Dear innotec user:
>>
>> Reservations, reservations, reservations.  We know they are difficult to
>> get and I'm afraid we don't have an easy solution.
>>
>> However, it is clear that many people would like to deposit similar
>> films.  So starting today, in order to encourage people to
>> "share-the-ride", we are asking innotec users to list the film(s) you
>> plan to deposit when you make your reservation.
>>
>> To do this, make your reservation as usual -- but before you hit "OK",
>> make sure to enter information about your deposition on the "Process"
>> field (normally, this reads "default".)  It can be as simple as "100 A
>> Cr/ 1000 A Au".
>>
>> To check the films planned for existing reservations, just double-click
>> on the time slot on the Reservations tab on Coral.  A pop-up window will
>> show who has made the reservation (and in the case of staff members, for
>> whom the reservation was made) as well as entries on the Process field.
>> The Coral team is looking at ways to make it easier to look at
>> Processes, but in the meantime, using the Reservations tab should be
>> workable.
>>
>> When you see a reservation with a Process you are interested in, please
>> contact that person directly to make your arrangements.
>>
>> No, this won't solve the reservations problem, it should be very handy
>> for some people who have similar film needs --
>>
>> Nice gifts (courtesy of Maurice's amazing design skills) will be
>> provided to the first pair of documented ride-sharers.
>>
>> Thanks for your attention --
>>
>> Your Metals Quality Circle
>>
>> --
>> Mary X. Tang, Ph.D.
>> Stanford Nanofabrication Facility
>> CIS Room 136, Mail Code 4070
>> Stanford, CA  94305
>> (650)723-9980
>> mtang at stanford.edu
>> http://snf.stanford.edu
>>
>>
>>     
>
>   


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From eap at gloworm.Stanford.EDU  Tue Mar  3 16:28:01 2009
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Tue, 3 Mar 2009 16:28:01 -0800 (PST)
Subject: Share-the-ride:  A new way to look at reservations
In-Reply-To: <49ADCA5F.6030903@stanford.edu>
Message-ID: <Pine.GSO.4.44.0903031626560.1118-100000@gloworm.Stanford.EDU>


Inside the lab it works without a password.

Outside the lab, it's

USER:   data
PASSWD: coop

This is for the whole site, not just the runshare.

-Eric


On Tue, 3 Mar 2009, Mary Tang wrote:

> Thanks Eric --
>
> Yes, whatever works!!  (I take it that everyone who needs to knows the
> password to access this system?)
>
> The Metal Quality Circle considered several different methods (such as a
> dedicated Google calendar).  It seemed simplest to use something that
> already exists in Coral -- maybe not quite as elegant as desired, but
> the Coral team is considering improvements.
>
> Let us know how it goes!
>
> Mary
>
>
>
>
> Eric Perozziello wrote:
> > A forum already exists:
> >
> > http://www.lelandstanfordjunior.com/runsharefaq.html
> >
> > Would that be useful?
> >
> > -Eric
> >
> >
> > On Tue, 3 Mar 2009, Mary Tang wrote:
> >
> >
> >> Dear innotec user:
> >>
> >> Reservations, reservations, reservations.  We know they are difficult to
> >> get and I'm afraid we don't have an easy solution.
> >>
> >> However, it is clear that many people would like to deposit similar
> >> films.  So starting today, in order to encourage people to
> >> "share-the-ride", we are asking innotec users to list the film(s) you
> >> plan to deposit when you make your reservation.
> >>
> >> To do this, make your reservation as usual -- but before you hit "OK",
> >> make sure to enter information about your deposition on the "Process"
> >> field (normally, this reads "default".)  It can be as simple as "100 A
> >> Cr/ 1000 A Au".
> >>
> >> To check the films planned for existing reservations, just double-click
> >> on the time slot on the Reservations tab on Coral.  A pop-up window will
> >> show who has made the reservation (and in the case of staff members, for
> >> whom the reservation was made) as well as entries on the Process field.
> >> The Coral team is looking at ways to make it easier to look at
> >> Processes, but in the meantime, using the Reservations tab should be
> >> workable.
> >>
> >> When you see a reservation with a Process you are interested in, please
> >> contact that person directly to make your arrangements.
> >>
> >> No, this won't solve the reservations problem, it should be very handy
> >> for some people who have similar film needs --
> >>
> >> Nice gifts (courtesy of Maurice's amazing design skills) will be
> >> provided to the first pair of documented ride-sharers.
> >>
> >> Thanks for your attention --
> >>
> >> Your Metals Quality Circle
> >>
> >> --
> >> Mary X. Tang, Ph.D.
> >> Stanford Nanofabrication Facility
> >> CIS Room 136, Mail Code 4070
> >> Stanford, CA  94305
> >> (650)723-9980
> >> mtang at stanford.edu
> >> http://snf.stanford.edu
> >>
> >>
> >>
> >
> >
>
>
> --
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu
>
>



From fanpy839 at stanford.edu  Tue Mar  3 21:56:29 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Tue, 3 Mar 2009 21:56:29 -0800 (PST)
Subject: innotec free 12am-2am tonight
Message-ID: <1089151318.1240721236146189728.JavaMail.root@zm01.stanford.edu>

Samples will not be ready.


From yychung at stanford.edu  Wed Mar  4 13:43:03 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Wed, 4 Mar 2009 13:43:03 -0800 (PST)
Subject: Does anyone plan to deposit Ti+Au in Innotec?
Message-ID: <1221318436.1931341236202983525.JavaMail.root@zm02.stanford.edu>

Dear Innotec users,

Is there anyone who plan to deposit Ti+Au in Innotec?  I would like to deposit on one wafer.  If we could share Innotec, that would be great!  Thanks.



Yoonyoung


From jasonlin at stanford.edu  Wed Mar  4 23:01:07 2009
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Wed, 4 Mar 2009 23:01:07 -0800
Subject: Thurs 9pm - 1am Released
Message-ID: <6DBF2939-31A9-4A99-917A-1FCE096F7C68@stanford.edu>

Samples won't be ready.


From gthareja at stanford.edu  Wed Mar  4 23:20:27 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Wed, 4 Mar 2009 23:20:27 -0800 (PST)
Subject: innotec free from 5a-6a Thursday, 5a-7a Friday
Message-ID: <1679655521.1518331236237627639.JavaMail.root@zm06.stanford.edu>



From gthareja at stanford.edu  Thu Mar  5 02:27:02 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Thu, 5 Mar 2009 02:27:02 -0800 (PST)
Subject: inotec free now, done early.
Message-ID: <850981456.1540481236248822010.JavaMail.root@zm06.stanford.edu>



From chen0622 at yahoo.com  Thu Mar  5 16:03:47 2009
From: chen0622 at yahoo.com (c.c.)
Date: Thu, 5 Mar 2009 16:03:47 -0800 (PST)
Subject: reservation released Sat. 6:00 AM to 8:30 AM
Message-ID: <529989.46778.qm@web56803.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090305/16e07bf5/attachment.html>

From haiwei at stanford.edu  Fri Mar  6 00:09:07 2009
From: haiwei at stanford.edu (Hai Wei)
Date: Fri, 6 Mar 2009 00:09:07 -0800
Subject: reservation release Friday 9:30-11:30am
Message-ID: <002c01c99e32$d26c8310$77458930$@edu>

Sorry for late notice. Smaples are not ready.

 

Hai

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090306/a1fda3ad/attachment.html>

From chen0622 at yahoo.com  Fri Mar  6 13:20:53 2009
From: chen0622 at yahoo.com (c.c.)
Date: Fri, 6 Mar 2009 13:20:53 -0800 (PST)
Subject: reservation released from 1:30 PM to 4:30 PM (Sat.)
Message-ID: <121123.93140.qm@web56808.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090306/dae17feb/attachment.html>

From chen0622 at yahoo.com  Sat Mar  7 10:28:29 2009
From: chen0622 at yahoo.com (c.c.)
Date: Sat, 7 Mar 2009 10:28:29 -0800 (PST)
Subject: reservation released from 6:30 to 9:30 AM (Sun.)
Message-ID: <26207.19102.qm@web56801.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090307/fe914fb6/attachment.html>

From leoyu at stanford.edu  Sat Mar  7 17:37:27 2009
From: leoyu at stanford.edu (Leo Yu)
Date: Sat, 7 Mar 2009 17:37:27 -0800 (PST)
Subject: Innotec free from now to 2030
Message-ID: <126305051.1938521236476247758.JavaMail.root@zm03.stanford.edu>

Sample failed.
Sorry for the late notice.


From mferrier at stanford.edu  Sat Mar  7 23:59:28 2009
From: mferrier at stanford.edu (Marlene Ferrier)
Date: Sat, 7 Mar 2009 23:59:28 -0800 (PST)
Subject: Innotec free sunday 9:30am- 12:00pm
Message-ID: <1934315337.1844701236499168296.JavaMail.root@zm08.stanford.edu>



From fanpy839 at stanford.edu  Sun Mar  8 00:18:47 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Sun, 8 Mar 2009 00:18:47 -0800
Subject: innotec free sunday 7am-9:30am
Message-ID: <200903080018469847442@stanford.edu>



2009-03-08 



Pengyu Fan

PhD student, Materials Science & Engineering, Stanford University, Stanford, CA
BS in Physics 2008, School of Physics, Peking University, Beijing, China
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090308/4fa28518/attachment.html>

From jennyhu at stanford.edu  Sun Mar  8 15:35:48 2009
From: jennyhu at stanford.edu (Jenny Hu)
Date: Sun, 8 Mar 2009 15:35:48 -0700 (PDT)
Subject: Innotec Released 9:30PM - 12 AM Today
Message-ID: <687880750.2054221236551748194.JavaMail.root@zm06.stanford.edu>

Sorry, unable to use it.


Thanks,
Jenny


From jasonlin at stanford.edu  Sun Mar  8 20:49:08 2009
From: jasonlin at stanford.edu (J. Jason Lin)
Date: Sun, 8 Mar 2009 20:49:08 -0700
Subject: Innotec released Monday 7-11pm
Message-ID: <6E9A7E86-36B8-4209-8A3D-9098D40A4450@stanford.edu>



From wanki at stanford.edu  Mon Mar  9 16:12:10 2009
From: wanki at stanford.edu (Wanki Kim)
Date: Mon, 9 Mar 2009 16:12:10 -0700 (PDT)
Subject: innotec released from 4pm to 7pm today
Message-ID: <289822081.2266281236640330099.JavaMail.root@zm03.stanford.edu>


  Hi,

  My sample is not ready.
  Innotec is released from 4pm to 7pm today.
  Sorry for the late notice.
 
  Thanks,
  Wanki


From fanpy839 at stanford.edu  Mon Mar  9 23:33:58 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Mon, 9 Mar 2009 23:33:58 -0700 (PDT)
Subject: Bell jar won't come down
Message-ID: <1555300060.2573131236666838715.JavaMail.root@zm01.stanford.edu>

Hi ALL,

When I'm ready to start, the bell jar just won't come down. It doesn't seem to be jammed, there is just simply no movement at all. And the ATM light is also off, I'm not sure if that's normal.

BEST,
PENGYU


From chen0622 at yahoo.com  Tue Mar 10 08:03:23 2009
From: chen0622 at yahoo.com (c.c.)
Date: Tue, 10 Mar 2009 08:03:23 -0700 (PDT)
Subject: take out the reservation (6:00 to 8:30 AM) since the tool was down since midnight.  
Message-ID: <705464.30198.qm@web56804.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090310/bd331355/attachment.html>

From filip at stanford.edu  Tue Mar 10 08:45:17 2009
From: filip at stanford.edu (Filip Crnogorac)
Date: Tue, 10 Mar 2009 08:45:17 -0700 (PDT)
Subject: innotec free until 11am (EOM)
Message-ID: <1408677040.2252941236699917358.JavaMail.root@zm09.stanford.edu>




From jimkruger at yahoo.com  Tue Mar 10 17:18:38 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Tue, 10 Mar 2009 17:18:38 -0700 (PDT)
Subject: innotec released tomorrow, 3-11-09  1200 to 1430  EOM
Message-ID: <52271.4233.qm@web38902.mail.mud.yahoo.com>





      


From zguo at stanford.edu  Tue Mar 10 18:55:28 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Tue, 10 Mar 2009 18:55:28 -0700 (PDT)
Subject: innotec slot released tonight 23:00-2:00
In-Reply-To: <52271.4233.qm@web38902.mail.mud.yahoo.com>
Message-ID: <1539944147.2783111236736528947.JavaMail.root@zm01.stanford.edu>

Sample not readay.


      


From fanpy839 at stanford.edu  Wed Mar 11 01:11:26 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Wed, 11 Mar 2009 01:11:26 -0700 (PDT)
Subject: Bell jar problem
Message-ID: <1447734604.2879581236759086091.JavaMail.root@zm01.stanford.edu>

Hi all,

The bell jar problem is back again, and it could be lifted but can't be lowered. I saw Jim K. also ran into the same problem this morning, but somehow fixed it later.

Liz and I tried, but failed to figure out what Jim H. meant by the sticky switch in the maintenance logbook.

It feels terrible to leave the bell jar just open in the air, but there is really nothing we could do to fix the problem.

Cheers,
Pengyu



From edmyers at stanford.edu  Wed Mar 11 13:44:35 2009
From: edmyers at stanford.edu (Ed Myers)
Date: Wed, 11 Mar 2009 13:44:35 -0700
Subject: Innotec Planning Questionaire
Message-ID: <6.2.5.6.2.20090311094522.03266748@stanford.edu>

Innotec Users,

Attached are two documents regarding Innotec usage.  The utilization 
graph shows the level of usage of the Innotec.  As you can see, the 
utilization rate has climbed by ~25% over the last few years.  This, 
along with the cancelation of reservations has created a lot of pain 
for those depending on this tool.

The second attachment (Usage Items) is a list of all the depositions 
done in the system since mid-October 2008.  When I looked at the 
depositions, it appears that ~75% of those depositions could be done 
in a different tool.  I admit, there are a lot of assumptions 
regarding this estimation, one being we may not have that other 
tool.  We are attempting to do some equipment planning and we need 
clarification as to why you have chosen to use the Innotec.

To me, there are a couple of options to relieve the pressure on the 
Innotec.  The simplest and the one you hear the most is a second 
Innotec.  Option two may be adding/replacing/modifying a metal system 
to off load the deposition which don't have to be on the Innotec.  A 
third option may be addition of an ion mill system to lower our 
dependence on lift-off processing.  Or options you can point out.

I prefer we chose the correct tool for the right applications and add 
capability if possible (we have not forgotten about the requests for 
dielectric depositions).  For example, if we can identify another 
tool which can off load the Innotec and provide new capability this 
could also be a winning solution.  Another approach could reconfigure 
the Gryphon or SCT or working on the uniformity of the metalica.

To help us in planning, could you please respond as to why you use 
the Innotec.  The reasons may range from the need for very thin 
films, uniformity of the deposition (then you should provide a 
uniformity target), in-situ thickness monitoring (what range can you 
tolerate?), multiple layers in a single pump down (how many?), 
required for lift-off (what metals are you  sing) device sensitivity 
(plasma damage), substrate (polymer or organic), contamination 
categories (clean verse gold contaminated), large batch of wafers 
(how many), or I would use a different tool (if it did...).....

Please hit the reply button and share your reasons for using the 
Innotec and what other approaches could serve your needs.

Thanks,
Ed and your SNF staff
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Usage Items.xls
Type: application/octet-stream
Size: 50688 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090311/4d79f437/attachment.obj>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: InnotecUtilization.xls
Type: application/octet-stream
Size: 209408 bytes
Desc: not available
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090311/4d79f437/attachment-0001.obj>

From mihuhou at stanford.edu  Wed Mar 11 17:08:37 2009
From: mihuhou at stanford.edu (Ying Chen)
Date: Wed, 11 Mar 2009 17:08:37 -0700
Subject: Innotec Planning Questionaire
References: <6.2.5.6.2.20090311094522.03266748@stanford.edu>
Message-ID: <00fa01c9a2a6$b11bcdb0$069a0c80@stanford.edu>

Hi, Ed,

I used innotec (a few times) because it can process large batch of wafers. I 
used to processed 10~22 wafers at one pump down.

Ying


----- Original Message ----- 
From: "Ed Myers" <edmyers at stanford.edu>
To: <innotec at snf.stanford.edu>
Cc: "Yoshio Nishi" <nishiy at stanford.edu>
Sent: Wednesday, March 11, 2009 1:44 PM
Subject: Innotec Planning Questionaire


> Innotec Users,
>
> Attached are two documents regarding Innotec usage.  The utilization
> graph shows the level of usage of the Innotec.  As you can see, the
> utilization rate has climbed by ~25% over the last few years.  This,
> along with the cancelation of reservations has created a lot of pain
> for those depending on this tool.
>
> The second attachment (Usage Items) is a list of all the depositions
> done in the system since mid-October 2008.  When I looked at the
> depositions, it appears that ~75% of those depositions could be done
> in a different tool.  I admit, there are a lot of assumptions
> regarding this estimation, one being we may not have that other
> tool.  We are attempting to do some equipment planning and we need
> clarification as to why you have chosen to use the Innotec.
>
> To me, there are a couple of options to relieve the pressure on the
> Innotec.  The simplest and the one you hear the most is a second
> Innotec.  Option two may be adding/replacing/modifying a metal system
> to off load the deposition which don't have to be on the Innotec.  A
> third option may be addition of an ion mill system to lower our
> dependence on lift-off processing.  Or options you can point out.
>
> I prefer we chose the correct tool for the right applications and add
> capability if possible (we have not forgotten about the requests for
> dielectric depositions).  For example, if we can identify another
> tool which can off load the Innotec and provide new capability this
> could also be a winning solution.  Another approach could reconfigure
> the Gryphon or SCT or working on the uniformity of the metalica.
>
> To help us in planning, could you please respond as to why you use
> the Innotec.  The reasons may range from the need for very thin
> films, uniformity of the deposition (then you should provide a
> uniformity target), in-situ thickness monitoring (what range can you
> tolerate?), multiple layers in a single pump down (how many?),
> required for lift-off (what metals are you  sing) device sensitivity
> (plasma damage), substrate (polymer or organic), contamination
> categories (clean verse gold contaminated), large batch of wafers
> (how many), or I would use a different tool (if it did...).....
>
> Please hit the reply button and share your reasons for using the
> Innotec and what other approaches could serve your needs.
>
> Thanks,
> Ed and your SNF staff


--------------------------------------------------------------------------------


> 



From jimkruger at yahoo.com  Wed Mar 11 20:49:10 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 11 Mar 2009 20:49:10 -0700 (PDT)
Subject: Innotec Released 3-12-09    1130 TO 1430  Thursday  EOM
Message-ID: <159804.52273.qm@web38902.mail.mud.yahoo.com>





      


From mrlin at stanford.edu  Wed Mar 11 21:11:33 2009
From: mrlin at stanford.edu (Albert Lin)
Date: Wed, 11 Mar 2009 21:11:33 -0700
Subject: Innotec Planning Questionaire
In-Reply-To: <6.2.5.6.2.20090311094522.03266748@stanford.edu>
References: <6.2.5.6.2.20090311094522.03266748@stanford.edu>
Message-ID: <6.2.5.6.2.20090311210520.03d81e28@stanford.edu>

Hi Ed,

I use Innotec to evap. metals on carbon nanotubes, which are 
destroyed in sputtering systems.

Also, when calculating utilization, you may want to do (non-staff 
usage) / (available time for students), that is, subtract training / 
staff usage time from the "avail time" since that will be the true 
time available to students. You may also want to compute a similar 
number for reservations. That utilization will then truly reflect how 
crazy it has been to use (or get a reservation) on the innotec.

Albert



At 01:44 PM 3/11/2009, Ed Myers wrote:
>Innotec Users,
>
>Attached are two documents regarding Innotec usage.  The utilization 
>graph shows the level of usage of the Innotec.  As you can see, the 
>utilization rate has climbed by ~25% over the last few years.  This, 
>along with the cancelation of reservations has created a lot of pain 
>for those depending on this tool.
>
>The second attachment (Usage Items) is a list of all the depositions 
>done in the system since mid-October 2008.  When I looked at the 
>depositions, it appears that ~75% of those depositions could be done 
>in a different tool.  I admit, there are a lot of assumptions 
>regarding this estimation, one being we may not have that other 
>tool.  We are attempting to do some equipment planning and we need 
>clarification as to why you have chosen to use the Innotec.
>
>To me, there are a couple of options to relieve the pressure on the 
>Innotec.  The simplest and the one you hear the most is a second 
>Innotec.  Option two may be adding/replacing/modifying a metal 
>system to off load the deposition which don't have to be on the 
>Innotec.  A third option may be addition of an ion mill system to 
>lower our dependence on lift-off processing.  Or options you can point out.
>
>I prefer we chose the correct tool for the right applications and 
>add capability if possible (we have not forgotten about the requests 
>for dielectric depositions).  For example, if we can identify 
>another tool which can off load the Innotec and provide new 
>capability this could also be a winning solution.  Another approach 
>could reconfigure the Gryphon or SCT or working on the uniformity of 
>the metalica.
>
>To help us in planning, could you please respond as to why you use 
>the Innotec.  The reasons may range from the need for very thin 
>films, uniformity of the deposition (then you should provide a 
>uniformity target), in-situ thickness monitoring (what range can you 
>tolerate?), multiple layers in a single pump down (how many?), 
>required for lift-off (what metals are you  sing) device sensitivity 
>(plasma damage), substrate (polymer or organic), contamination 
>categories (clean verse gold contaminated), large batch of wafers 
>(how many), or I would use a different tool (if it did...).....
>
>Please hit the reply button and share your reasons for using the 
>Innotec and what other approaches could serve your needs.
>
>Thanks,
>Ed and your SNF staff
>
>
>



From nperez at stanford.edu  Thu Mar 12 07:54:37 2009
From: nperez at stanford.edu (Jeannie Perez)
Date: Thu, 12 Mar 2009 07:54:37 -0700
Subject: Innotec Planning Questionaire
In-Reply-To: <6.2.5.6.2.20090311210520.03d81e28@stanford.edu>
References: <6.2.5.6.2.20090311094522.03266748@stanford.edu>
 <6.2.5.6.2.20090311210520.03d81e28@stanford.edu>
Message-ID: <6.2.5.6.2.20090312074650.01cd0ae8@stanford.edu>

During training I can or do depositions for users to help relieve 
Innotec. As long as it can help the trainee and not more then two
metals (do to the time restriction). This Friday I will be doing a 
150nm Aluminum deposition for a customer and it is posted on my 
reservation if anyone would like to share a ride.
Jeannie

At 09:11 PM 3/11/2009, Albert Lin wrote:
>Hi Ed,
>
>I use Innotec to evap. metals on carbon nanotubes, which are 
>destroyed in sputtering systems.
>
>Also, when calculating utilization, you may want to do (non-staff 
>usage) / (available time for students), that is, subtract training / 
>staff usage time from the "avail time" since that will be the true 
>time available to students. You may also want to compute a similar 
>number for reservations. That utilization will then truly reflect 
>how crazy it has been to use (or get a reservation) on the innotec.
>
>Albert
>
>
>
>At 01:44 PM 3/11/2009, Ed Myers wrote:
>>Innotec Users,
>>
>>Attached are two documents regarding Innotec usage.  The 
>>utilization graph shows the level of usage of the Innotec.  As you 
>>can see, the utilization rate has climbed by ~25% over the last few 
>>years.  This, along with the cancelation of reservations has 
>>created a lot of pain for those depending on this tool.
>>
>>The second attachment (Usage Items) is a list of all the 
>>depositions done in the system since mid-October 2008.  When I 
>>looked at the depositions, it appears that ~75% of those 
>>depositions could be done in a different tool.  I admit, there are 
>>a lot of assumptions regarding this estimation, one being we may 
>>not have that other tool.  We are attempting to do some equipment 
>>planning and we need clarification as to why you have chosen to use 
>>the Innotec.
>>
>>To me, there are a couple of options to relieve the pressure on the 
>>Innotec.  The simplest and the one you hear the most is a second 
>>Innotec.  Option two may be adding/replacing/modifying a metal 
>>system to off load the deposition which don't have to be on the 
>>Innotec.  A third option may be addition of an ion mill system to 
>>lower our dependence on lift-off processing.  Or options you can point out.
>>
>>I prefer we chose the correct tool for the right applications and 
>>add capability if possible (we have not forgotten about the 
>>requests for dielectric depositions).  For example, if we can 
>>identify another tool which can off load the Innotec and provide 
>>new capability this could also be a winning solution.  Another 
>>approach could reconfigure the Gryphon or SCT or working on the 
>>uniformity of the metalica.
>>
>>To help us in planning, could you please respond as to why you use 
>>the Innotec.  The reasons may range from the need for very thin 
>>films, uniformity of the deposition (then you should provide a 
>>uniformity target), in-situ thickness monitoring (what range can 
>>you tolerate?), multiple layers in a single pump down (how many?), 
>>required for lift-off (what metals are you  sing) device 
>>sensitivity (plasma damage), substrate (polymer or organic), 
>>contamination categories (clean verse gold contaminated), large 
>>batch of wafers (how many), or I would use a different tool (if it did...).....
>>
>>Please hit the reply button and share your reasons for using the 
>>Innotec and what other approaches could serve your needs.
>>
>>Thanks,
>>Ed and your SNF staff
>>
>>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090312/0aa6b097/attachment.html>

From chen0622 at yahoo.com  Thu Mar 12 19:44:22 2009
From: chen0622 at yahoo.com (c.c.)
Date: Thu, 12 Mar 2009 19:44:22 -0700 (PDT)
Subject: reservation released from 12:00 to 2:00 tonight
Message-ID: <724487.75178.qm@web56802.mail.re3.yahoo.com>

Finished in an earlier slot today.? 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090312/92a6de7c/attachment.html>

From chen0622 at yahoo.com  Fri Mar 13 10:31:27 2009
From: chen0622 at yahoo.com (c.c.)
Date: Fri, 13 Mar 2009 10:31:27 -0700 (PDT)
Subject: reservation released, Sunday (Mar. 15)  morning  2:30 to 5:00 AM
Message-ID: <64004.8955.qm@web56805.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090313/6de064da/attachment.html>

From chen0622 at yahoo.com  Fri Mar 13 10:34:02 2009
From: chen0622 at yahoo.com (c.c.)
Date: Fri, 13 Mar 2009 10:34:02 -0700 (PDT)
Subject: reservation released, Sunday (Mar. 15)  morning  2:30 to 5:00 AM
Message-ID: <448075.45050.qm@web56807.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090313/2c9b1911/attachment.html>

From zguo at stanford.edu  Fri Mar 13 11:32:43 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Fri, 13 Mar 2009 11:32:43 -0700 (PDT)
Subject: reservation released, Sunday (Mar. 15)  morning  6:30 to 9:00 AM
In-Reply-To: <64004.8955.qm@web56805.mail.re3.yahoo.com>
Message-ID: <1698125620.3441371236969163002.JavaMail.root@zm01.stanford.edu>



From jperez at snf.stanford.edu  Fri Mar 13 16:48:52 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Fri, 13 Mar 2009 16:48:52 -0700
Subject: No Copper starter source for Innotec, Warning!
Message-ID: <6.2.5.6.2.20090313160902.01ddab20@snf.stanford.edu>

Users,

Your not paying attention to details. I find peeling on dummy wafers, 
dirty system, starter sources in poor condition, shutters needing to 
be changed every time I train.  Today I found five shutters used with 
splatters of metal in one week. This is telling me that your applying 
too much power too fast to the starter sources and NOT watching 
through the view port . I can't get the shutters turned around fast 
enough the way they are getting abused.
This is a WARNING........... I am going to check Innotec each and 
every day that I am here and if I found the system in the condition 
mentioned above, I will start disqualifying YOU!. If the previous 
user didn't do his/her job with inspections or vacuuming that doesn't 
mean you don't have to. If this happens to you just send me an 
E-mail  and I'll take care of the User, but still clean up the system!

The last new copper starter source was contaminated with something 
other than copper. This is the third starter source this year.  The 
second new Cu had residuals around the truncated cone shape from 
crucible pockets that no one is cleaning up.
It wouldn't sit in the pocket correctly and Jim couldn't remove the 
build-up. The first one this year blew up because it wasn't sitting 
down in the pocket, due to residuals built up  on the sides.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090313/c201d020/attachment.html>

From zguo at stanford.edu  Sat Mar 14 00:21:38 2009
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Sat, 14 Mar 2009 00:21:38 -0700 (PDT)
Subject: Reservation released, Sat (Mar. 14)  11:30~14:00
In-Reply-To: <1698125620.3441371236969163002.JavaMail.root@zm01.stanford.edu>
Message-ID: <1935285700.3576511237015298670.JavaMail.root@zm01.stanford.edu>

Slot time not long enough to finish the deposition.


From filip at stanford.edu  Mon Mar 16 02:37:27 2009
From: filip at stanford.edu (Filip Crnogorac)
Date: Mon, 16 Mar 2009 02:37:27 -0700 (PDT)
Subject: innotec free 12:30-14:30 MONDAY
Message-ID: <499348878.3249941237196247370.JavaMail.root@zm09.stanford.edu>

samples are not good, unfortunately.

Filip


From jperez at snf.stanford.edu  Mon Mar 16 14:48:00 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 16 Mar 2009 14:48:00 -0700
Subject: Innotec has a Temporary fix
Message-ID: <6.2.5.6.2.20090316142817.01dde5e8@snf.stanford.edu>

When Innotec comes back up, you won't be able to lift the bell Jar up 
all the way up. The base of the bottom of the Bell Jar can NOT be 
raised higher then the top of the red tape ( mark) on the right side 
of the bell jar.
You won't be able to clean / vacuum inside the bell jar for now. But 
if it starts to peel please notice Staff and we'll have to do the 
vacuuming until  it is fixed correctly.
Parts are on order...........  Jim is estimating one to two weeks for 
shaft to be fixed properly.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090316/9c066e28/attachment.html>

From jperez at snf.stanford.edu  Tue Mar 17 15:40:24 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Tue, 17 Mar 2009 15:40:24 -0700
Subject: Tomorrow morning 3/18/09 at 7AM Innotec will go down to
  correctly repair the Bell jar 
Message-ID: <6.2.5.6.2.20090317153611.01e02b18@snf.stanford.edu>

Huin, please do not start your Innotec reservation at 6:30 AM.
Thank you,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090317/8b08b10f/attachment.html>

From panjun at stanford.edu  Tue Mar 17 17:13:55 2009
From: panjun at stanford.edu (Jun Pan)
Date: Tue, 17 Mar 2009 17:13:55 -0700
Subject: free 9:30am 
Message-ID: <004301c9a75e$6d20cb80$09ad0c80@SolarThinkPad>

Due to issues in the upstream equipment.

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090317/f5ab4285/attachment.html>

From jimkruger at yahoo.com  Wed Mar 18 17:22:18 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 18 Mar 2009 17:22:18 -0700 (PDT)
Subject: Innotec released Thurs Mar 19 0930 to 1300  EOM
Message-ID: <683000.91083.qm@web38902.mail.mud.yahoo.com>





      


From chen0622 at yahoo.com  Wed Mar 18 17:26:00 2009
From: chen0622 at yahoo.com (c.c.)
Date: Wed, 18 Mar 2009 17:26:00 -0700 (PDT)
Subject: Innotec time released Sat. morning  6:00 AM to 9:00 AM
Message-ID: <727195.57449.qm@web56801.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090318/96e078f2/attachment.html>

From chen0622 at yahoo.com  Wed Mar 18 17:57:27 2009
From: chen0622 at yahoo.com (c.c.)
Date: Wed, 18 Mar 2009 17:57:27 -0700 (PDT)
Subject: reservation released  Wed. 11:30 PM to 2:00 AM
Message-ID: <529738.4935.qm@web56807.mail.re3.yahoo.com>

The schedule moved to next day morning.
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090318/0ff568d1/attachment.html>

From jimkruger at yahoo.com  Thu Mar 19 10:32:59 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Thu, 19 Mar 2009 10:32:59 -0700 (PDT)
Subject: Innotec Released 3-20-09 Friday   09:30 TO 1300  EOM
Message-ID: <973822.4485.qm@web38901.mail.mud.yahoo.com>





      


From wanki at stanford.edu  Thu Mar 19 12:58:43 2009
From: wanki at stanford.edu (Wanki Kim)
Date: Thu, 19 Mar 2009 12:58:43 -0700 (PDT)
Subject: Innotec Released 4:30pm~7:30pm Today
Message-ID: <845296739.4240521237492723650.JavaMail.root@zm03.stanford.edu>


  Innotec is released 4:30pm~7:30pm Today.
  My sample is not ready.
  I'm sorry for the late notice.


From yychung at stanford.edu  Thu Mar 19 13:10:37 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Thu, 19 Mar 2009 13:10:37 -0700 (PDT)
Subject: Friday 6:30am-9:30am - Available
Message-ID: <526851263.5266871237493437758.JavaMail.root@zm02.stanford.edu>



From jperez at snf.stanford.edu  Thu Mar 19 14:25:25 2009
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Thu, 19 Mar 2009 14:25:25 -0700
Subject: new copper starter source in jar.
Message-ID: <6.2.5.6.2.20090319141437.01cab2b8@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From dongrip at stanford.edu  Thu Mar 19 16:10:04 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Thu, 19 Mar 2009 16:10:04 -0700
Subject: Friday 6:30am-9:30am - Available
In-Reply-To: <526851263.5266871237493437758.JavaMail.root@zm02.stanford.edu>
References: <526851263.5266871237493437758.JavaMail.root@zm02.stanford.edu>
Message-ID: <000001c9a8e7$d6cb01b0$84610510$@edu>

Taken, Thanks ? Dong Rip

 

From: Yoonyoung Chung [mailto:yychung at stanford.edu] 
Sent: Thursday, March 19, 2009 1:11 PM
To: innotec
Subject: Friday 6:30am-9:30am - Available

 

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090319/69089495/attachment.html>

From jweisse at stanford.edu  Thu Mar 19 16:45:20 2009
From: jweisse at stanford.edu (Jeffrey M. Weisse)
Date: Thu, 19 Mar 2009 16:45:20 -0700 (PDT)
Subject: Innotec Released 5:30pm~9pm Friday
In-Reply-To: <1356425565.4260221237506249818.JavaMail.root@zm06.stanford.edu>
Message-ID: <1978587593.4260541237506320283.JavaMail.root@zm06.stanford.edu>

Innotec Released from 5:30pm - 9pm tomorrow

Took earlier time slot


From dongrip at stanford.edu  Fri Mar 20 06:05:01 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Fri, 20 Mar 2009 06:05:01 -0700
Subject: Innotec - today 6:00-9:30am reservation released
In-Reply-To: <000001c9a8e7$d6cb01b0$84610510$@edu>
References: <526851263.5266871237493437758.JavaMail.root@zm02.stanford.edu> <000001c9a8e7$d6cb01b0$84610510$@edu>
Message-ID: <002201c9a95c$7ace5e00$706b1a00$@edu>

I finished up the sample preparation to use Innotec right before, but it was pretty bad. I?m really sorry for the late notice. 

You can use my reservation slot from 6:00-9:30 am today, even if it is now reserved under ?jweisse?.

 

Dong Rip

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090320/863a1c56/attachment.html>

From leoyu at stanford.edu  Sat Mar 21 01:02:10 2009
From: leoyu at stanford.edu (Leo Yu)
Date: Sat, 21 Mar 2009 01:02:10 -0700 (PDT)
Subject: Innotec free from 0900-1300 on Saturday
Message-ID: <1996906086.4487331237622530578.JavaMail.root@zm03.stanford.edu>

Sample preparation not ready. 
Sorry for the late notice. 


From mzi9890 at yahoo.com  Sat Mar 21 13:13:01 2009
From: mzi9890 at yahoo.com (Mohammed Islam)
Date: Sat, 21 Mar 2009 13:13:01 -0700 (PDT)
Subject: Innotec free Sunday 11:30am-2:30pm
Message-ID: <880761.88060.qm@web83501.mail.sp1.yahoo.com>

Samples not ready
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090321/ac3dde67/attachment.html>

From jimkruger at yahoo.com  Mon Mar 23 10:13:49 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Mon, 23 Mar 2009 10:13:49 -0700 (PDT)
Subject: Innotec Released 3-24-09,  Tues.,   12:00 TO 1500  EOM
Message-ID: <747487.12087.qm@web38904.mail.mud.yahoo.com>





      


From dongrip at stanford.edu  Mon Mar 23 23:54:56 2009
From: dongrip at stanford.edu (Dong Rip Kim)
Date: Mon, 23 Mar 2009 23:54:56 -0700
Subject: Innotec - 3/24 (Tuesday, tonight) 2-6 am released
Message-ID: <010e01c9ac4d$7148de70$53da9b50$@edu>

My sample preparation was bad. Sorry for late notice.

- Dong Rip

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090323/18a99690/attachment.html>

From chen0622 at yahoo.com  Tue Mar 24 13:56:52 2009
From: chen0622 at yahoo.com (c.c.)
Date: Tue, 24 Mar 2009 13:56:52 -0700 (PDT)
Subject: reservation released  Wed.  from 6:00 AM to 9:00 AM 
Message-ID: <115842.5280.qm@web56803.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090324/e19ad381/attachment.html>

From xutian at stanford.edu  Tue Mar 24 23:40:03 2009
From: xutian at stanford.edu (Xu Tian)
Date: Tue, 24 Mar 2009 23:40:03 -0700 (PDT)
Subject: Innotec free until 2am
In-Reply-To: <747487.12087.qm@web38904.mail.mud.yahoo.com>
Message-ID: <2030090941.6053761237963203087.JavaMail.root@zm02.stanford.edu>

Done early.

----- Original Message -----
From: "jim kruger" <jimkruger at yahoo.com>
To: "Innotec" <Innotec at snf.stanford.edu>
Sent: Monday, March 23, 2009 10:13:49 AM GMT -08:00 US/Canada Pacific
Subject: Innotec Released 3-24-09,  Tues.,   12:00 TO 1500  EOM





      


From David.Druist at grandisinc.com  Wed Mar 25 17:15:15 2009
From: David.Druist at grandisinc.com (David Druist)
Date: Wed, 25 Mar 2009 17:15:15 -0700
Subject: Friday March 27th  3-6PM available
Message-ID: <887C381D359942449ABF950AC230469901F10B8F33@PDCSERVER.grandis.local>

Samples won't be ready due to upstream equipment issues.

Regards,

David Druist
Memory Process and Device Integration
Grandis, Inc.
408-945-2168
David.Druist at GrandisInc.com



From zhangy at stanford.edu  Wed Mar 25 17:22:52 2009
From: zhangy at stanford.edu (Yuan Zhang)
Date: Wed, 25 Mar 2009 17:22:52 -0700
Subject: Innotec free from 9:30p-12 tonight
Message-ID: <20090326002256.941A4170B6A@smtp1.stanford.edu>

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090325/13cb24d5/attachment.html>

From takane at stanford.edu  Wed Mar 25 17:23:36 2009
From: takane at stanford.edu (Takane Usui)
Date: Wed, 25 Mar 2009 17:23:36 -0700
Subject: Friday March 27th  3-6PM available
In-Reply-To: <887C381D359942449ABF950AC230469901F10B8F33@PDCSERVER.grandis.local>
References: <887C381D359942449ABF950AC230469901F10B8F33@PDCSERVER.grandis.local>
Message-ID: <49CACB08.8000704@stanford.edu>

I took it - Thanks, Takane

David Druist wrote:
> Samples won't be ready due to upstream equipment issues.
>
> Regards,
>
> David Druist
> Memory Process and Device Integration
> Grandis, Inc.
> 408-945-2168
> David.Druist at GrandisInc.com
>
>
>   


From mrjpark at stanford.edu  Wed Mar 25 17:40:22 2009
From: mrjpark at stanford.edu (mrjpark at stanford.edu)
Date: Wed, 25 Mar 2009 17:40:22 -0700 (PDT)
Subject: Innotec free from 9:30p-12 tonight
In-Reply-To: <20090326002256.941A4170B6A@smtp1.stanford.edu>
References: <20090326002256.941A4170B6A@smtp1.stanford.edu>
Message-ID: <5BD6D2E7-6860-4320-8993-B0898AF88009@stanford.edu>

Taken

On Mar 25, 2009, at 17:23, "Yuan Zhang" <zhangy at stanford.edu> wrote:

>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090325/bd5dccfa/attachment.html>

From fanpy839 at stanford.edu  Wed Mar 25 19:56:39 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Wed, 25 Mar 2009 19:56:39 -0700 (PDT)
Subject: innotec free now
Message-ID: <760041087.1392001238036199411.JavaMail.root@zm01.stanford.edu>

Hi All,

finished early today. It's free now.

Cheers,
Pengyu


From jimkruger at yahoo.com  Wed Mar 25 20:15:44 2009
From: jimkruger at yahoo.com (jim kruger)
Date: Wed, 25 Mar 2009 20:15:44 -0700 (PDT)
Subject: Innotec released 3-36-09  1030-1330 Thursday  EOM
Message-ID: <350371.37456.qm@web38905.mail.mud.yahoo.com>





      


From chen0622 at yahoo.com  Fri Mar 27 10:12:25 2009
From: chen0622 at yahoo.com (c.c.)
Date: Fri, 27 Mar 2009 10:12:25 -0700 (PDT)
Subject: reservation released Apr. 1  from 12:00 AM t0 2:00 AM
Message-ID: <101642.32669.qm@web56806.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090327/4d45929d/attachment.html>

From yychung at stanford.edu  Sat Mar 28 09:43:46 2009
From: yychung at stanford.edu (Yoonyoung Chung)
Date: Sat, 28 Mar 2009 09:43:46 -0700 (PDT)
Subject: Ion Gauge Problem
Message-ID: <746703444.14991238258626620.JavaMail.root@zm02.stanford.edu>

Dear Innotec users,

The chamber has been pumped down for an hour, and the pressure is now 0.0X10-8.  It seems that the ion gauge does not work properly.  There was not any comment from previous users.  Thanks.



Yoonyoung


From audet at stanford.edu  Sun Mar 29 10:59:38 2009
From: audet at stanford.edu (Ross Audet)
Date: Sun, 29 Mar 2009 10:59:38 -0700
Subject: innotec free now to 1:30pm
Message-ID: <000301c9b098$21167fd0$63437f70$@edu>





From chen0622 at yahoo.com  Sun Mar 29 21:02:44 2009
From: chen0622 at yahoo.com (c.c.)
Date: Sun, 29 Mar 2009 21:02:44 -0700 (PDT)
Subject: reservation released Mon. mornining 6:00 to 8:00 AM
Message-ID: <508569.56488.qm@web56806.mail.re3.yahoo.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090329/58efcf6d/attachment.html>

From erhan.yenilmez at gmail.com  Mon Mar 30 16:48:48 2009
From: erhan.yenilmez at gmail.com (Erhan Yenilmez)
Date: Mon, 30 Mar 2009 16:48:48 -0700
Subject: Innotec free Wed 6-10am
Message-ID: <716d72d40903301648q39144aadm20e3b9066d5df994@mail.gmail.com>

Releasing my slot, I will not be able to use the system.


From jkoma at stanford.edu  Mon Mar 30 16:51:01 2009
From: jkoma at stanford.edu (Jason Komadina)
Date: Mon, 30 Mar 2009 16:51:01 -0700
Subject: Innotec free Wed 6-10am, 10a-2p moved
In-Reply-To: <716d72d40903301648q39144aadm20e3b9066d5df994@mail.gmail.com>
References: <716d72d40903301648q39144aadm20e3b9066d5df994@mail.gmail.com>
Message-ID: <49D15AE5.5060908@stanford.edu>

Moved my timeslot from 10-2 to 930-130 (class at 10)

Erhan Yenilmez wrote:
> Releasing my slot, I will not be able to use the system.
>
>   



From gthareja at stanford.edu  Mon Mar 30 21:56:00 2009
From: gthareja at stanford.edu (Gaurav Thareja)
Date: Mon, 30 Mar 2009 21:56:00 -0700 (PDT)
Subject: innotec free from 2a-6a tomorrow. sorry for the short notice.
Message-ID: <71056261.399761238475360869.JavaMail.root@zm06.stanford.edu>



From chen0622 at yahoo.com  Tue Mar 31 11:18:40 2009
From: chen0622 at yahoo.com (c.c.)
Date: Tue, 31 Mar 2009 11:18:40 -0700 (PDT)
Subject: reservation released on Thurs. morning from 6:00 to 8:00 AM
Message-ID: <126089.93616.qm@web56805.mail.re3.yahoo.com>

Moved to a later time slots.? 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090331/72751839/attachment.html>

From nperez at stanford.edu  Tue Mar 31 11:19:02 2009
From: nperez at stanford.edu (Nora Jean Perez)
Date: Tue, 31 Mar 2009 11:19:02 -0700 (PDT)
Subject: Cancelled reservation from 8 to noon 4/2
Message-ID: <936838682.335141238523542869.JavaMail.root@zm04.stanford.edu>



From chen0622 at yahoo.com  Tue Mar 31 11:23:26 2009
From: chen0622 at yahoo.com (c.c.)
Date: Tue, 31 Mar 2009 11:23:26 -0700 (PDT)
Subject: reservation released on Thurs. morning from 6:00 to 8:00 AM
Message-ID: <73424.8398.qm@web56807.mail.re3.yahoo.com>

The schedule moved to a later time slots.? 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/innotec/attachments/20090331/ac218e14/attachment.html>

From mrlin at stanford.edu  Tue Mar 31 15:42:38 2009
From: mrlin at stanford.edu (Albert Lin)
Date: Tue, 31 Mar 2009 15:42:38 -0700 (PDT)
Subject: will finish early; innotec free ~4-6pm
Message-ID: <1228820172.500351238539358403.JavaMail.root@zm07.stanford.edu>

will finish early