innotec interlock

Zhiqiang Guo zguo at
Sun Mar 1 02:28:32 PST 2009

Hi everyone:

I was pumping down the innotec for 2 hours, and the pressure is 3.8e-7torr, when I try to deposite, found there is an "INTERLOCK WFS1", and the GUN FILAMENT appears as "INTLK", deposition can not begin.

I found in the log book some people met this before, and still can deposite, so if you see the email could you please tell me how to fix it`?

Thanks very much!


----- Original Message -----
From: "jim kruger" <jimkruger at>
To: "Innotec" <Innotec at>
Sent: Thursday, February 26, 2009 6:16:03 PM GMT -08:00 US/Canada Pacific
Subject: innotec released tomorrow, Friday 2-27-09 1200 to 1500  eom


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