Innotec Planning Questionaire

Albert Lin mrlin at
Wed Mar 11 21:11:33 PDT 2009

Hi Ed,

I use Innotec to evap. metals on carbon nanotubes, which are 
destroyed in sputtering systems.

Also, when calculating utilization, you may want to do (non-staff 
usage) / (available time for students), that is, subtract training / 
staff usage time from the "avail time" since that will be the true 
time available to students. You may also want to compute a similar 
number for reservations. That utilization will then truly reflect how 
crazy it has been to use (or get a reservation) on the innotec.


At 01:44 PM 3/11/2009, Ed Myers wrote:
>Innotec Users,
>Attached are two documents regarding Innotec usage.  The utilization 
>graph shows the level of usage of the Innotec.  As you can see, the 
>utilization rate has climbed by ~25% over the last few years.  This, 
>along with the cancelation of reservations has created a lot of pain 
>for those depending on this tool.
>The second attachment (Usage Items) is a list of all the depositions 
>done in the system since mid-October 2008.  When I looked at the 
>depositions, it appears that ~75% of those depositions could be done 
>in a different tool.  I admit, there are a lot of assumptions 
>regarding this estimation, one being we may not have that other 
>tool.  We are attempting to do some equipment planning and we need 
>clarification as to why you have chosen to use the Innotec.
>To me, there are a couple of options to relieve the pressure on the 
>Innotec.  The simplest and the one you hear the most is a second 
>Innotec.  Option two may be adding/replacing/modifying a metal 
>system to off load the deposition which don't have to be on the 
>Innotec.  A third option may be addition of an ion mill system to 
>lower our dependence on lift-off processing.  Or options you can point out.
>I prefer we chose the correct tool for the right applications and 
>add capability if possible (we have not forgotten about the requests 
>for dielectric depositions).  For example, if we can identify 
>another tool which can off load the Innotec and provide new 
>capability this could also be a winning solution.  Another approach 
>could reconfigure the Gryphon or SCT or working on the uniformity of 
>the metalica.
>To help us in planning, could you please respond as to why you use 
>the Innotec.  The reasons may range from the need for very thin 
>films, uniformity of the deposition (then you should provide a 
>uniformity target), in-situ thickness monitoring (what range can you 
>tolerate?), multiple layers in a single pump down (how many?), 
>required for lift-off (what metals are you  sing) device sensitivity 
>(plasma damage), substrate (polymer or organic), contamination 
>categories (clean verse gold contaminated), large batch of wafers 
>(how many), or I would use a different tool (if it did...).....
>Please hit the reply button and share your reasons for using the 
>Innotec and what other approaches could serve your needs.
>Ed and your SNF staff

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