Al deposition in innotec in coming days

Marlene Ferrier mferrier at stanford.edu
Mon Nov 16 12:46:38 PST 2009


Hi,

I would like to deposit some Al on 2 pieces of wafer in the coming days.

As my requirements are pretty loose (any thickness above 1000A will work) and as this is a fairly common process, I was hopping to be able to share somebody's run

If you are planning some Al dep soon, I would appreciate if you could let me know

Best,

Marlene



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