Depoistion of metal on quartz substrate

Takashi Kodama kodama at stanford.edu
Fri Apr 30 10:35:29 PDT 2010


Hi all,

I plan to fabricate metal patterns on a quartz substrate by lift-off process.
I would like to know what kind of metal can be used for the direct deposition.
I usually used a silicon oxide substrate for my project, so I do not have sufficient
experience to handle the quartz one. Please give me your advice if you are
familiar with the process.

Best,

Takashi Kodama
kodama at stanford.edu



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