New vacuum PORT next to the front panel at SCT sputter system
jperez at snf.stanford.edu
Thu Jan 7 07:53:56 PST 2010
You will no longer have to use the vacuum port that is across the room
by the door going into where the Thermco furnaces are.
A new vacuum port has been added between the SCT sputter system and
Innotec evaporator. This should make it easier and the
desire to want to vacuum more.
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