My sample in the innotec chamber

Pengyu Fan fanpy839 at
Wed Jun 30 19:05:58 PDT 2010

Hi All,

When the fire alarm came up, I finished my deposition and turned off the
main power but did not get to start venting. Could the next user please help
me unload my samples (they are THREE dummy wafers with kapton taped chip on
them) and leave them on the table?

Thank you so much for your help!

Pengyu Fan

PhD Candidate
Materials Science & Engineering
Stanford University
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