Bell jar problem = possibly up / down switch problem

Kyunglok Kim kyunglok at
Sat Sep 4 19:41:54 PDT 2010

Dear innotec users,

I have read problem reports related to innotec in this year and found that there were more than three bell jar lift problems. And the resolving methods were very similar : fix up / down switches.
When I lifted down the bell jar after finishing my deposition, there was no problem. I passed the use of the machine to Szu-Lin at the early stage of pumping down procedure as a final step. Szu-Lin tried to lift it up but it did not go up. I don't know what exact thing can make this problem. But I suspect that up-down switch might be out of order, which was not detected by me when I had lifted the bell jar down by pressing down switch.


On Sat, Sep 4, 2010 at 3:16 PM, Szu-Lin Cheng <slcheng at> wrote:

I can’t pull up the bell after venting the chamber.

Try to repump the system and vent it again. Got the same results.

Therefore, I gave up and release the time.



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