From yuxinz at stanford.edu Tue Aug 2 15:01:54 2011 From: yuxinz at stanford.edu (Yuxin Zheng) Date: Tue, 2 Aug 2011 15:01:54 -0700 Subject: today 7pm-9pm session released Message-ID: <002801cc515f$cad93fc0$608bbf40$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Tue Aug 2 15:11:05 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Tue, 02 Aug 2011 15:11:05 -0700 Subject: Attached PEN to the Logbooks Message-ID: <4E3875F9.9040004@stanford.edu> Now you have a pen attached to the logbook (Drytek4, Innotec, Metalica and STS PECVD). Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From Salowitz at stanford.edu Tue Aug 2 15:19:23 2011 From: Salowitz at stanford.edu (Nathan Salowitz) Date: Tue, 02 Aug 2011 15:19:23 -0700 Subject: Released tomorrow 9:30 to noon Message-ID: <4E3877EB.3090805@stanford.edu> From tazryu78 at stanford.edu Tue Aug 2 18:09:22 2011 From: tazryu78 at stanford.edu (Seung Wook Ryu) Date: Tue, 2 Aug 2011 18:09:22 -0700 (PDT) Subject: tomorrow 12:30~15:30 released Message-ID: <1492157293.627138.1312333762792.JavaMail.root@zm04.stanford.edu> I took another spot From chandran at stanford.edu Wed Aug 3 11:56:33 2011 From: chandran at stanford.edu (Anu Chandran) Date: Wed, 3 Aug 2011 11:56:33 -0700 Subject: Released session tomorrow morning 6:30 am to 9:00 . Took a later session EOM Message-ID: -- Anu Chandran Materials Science & Engineering 476 Lomita Mall,McCullough Building Stanford CA 94305-4045 T:6507236466 Lab T:6507234874 Office F:6507249851 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ghyrn at amprius.com Wed Aug 3 12:01:45 2011 From: ghyrn at amprius.com (Ghyrn Loveness) Date: Wed, 3 Aug 2011 12:01:45 -0700 Subject: Released Today 15:30 Message-ID: <70449B62-474F-4055-9467-A75C592618EC@amprius.com> Upstream process incomplete, sorry for the late notice. Ghyrn Loveness Scientist 1430C O'Brien Dr Menlo Park, CA 94025 ghyrn at amprius.com (206) 849-9460 DISCLAIMER: This email and any files transmitted with it are Amprius, Inc. confidential and intended solely for the use of the individual or entity to whom they are addressed. If you are not the named addressee you should not disseminate, distribute or copy this e-mail. Please notify the sender immediately by e-mail if you have received this e-mail by mistake and delete this e-mail from your system. If you are not the intended recipient you are notified that disclosing, copying, distributing or taking any action in reliance on the contents of this information is strictly prohibited. Thank you. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: pastedGraphic.tiff Type: image/tiff Size: 22826 bytes Desc: not available URL: From sgchong at stanford.edu Thu Aug 4 00:06:01 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Thu, 4 Aug 2011 00:06:01 -0700 (PDT) Subject: innotec free Saturday 8/6 8-10AM Message-ID: <362538392.837693.1312441561906.JavaMail.root@zm07.stanford.edu> -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From roberth at quswami.com Fri Aug 5 16:15:00 2011 From: roberth at quswami.com (Robert Huang) Date: Fri, 5 Aug 2011 16:15:00 -0700 Subject: innotec available Monday 8/8 7:30-10AM... Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB12CC8468BD4@QUSWAMI-DSRV1.quswami.local> Finished wafers using earlier slot. -Robert -------------- next part -------------- An HTML attachment was scrubbed... URL: From altamash at stanford.edu Sun Aug 7 10:55:22 2011 From: altamash at stanford.edu (Altamash Janjua) Date: Sun, 7 Aug 2011 10:55:22 -0700 (PDT) Subject: Innotec released 1pm to 3pm today afternoon Message-ID: <1613791625.468506.1312739722660.JavaMail.root@zm01.stanford.edu> Will not be able to complete my samples in time. Sorry, Altamash From munekazu at stanford.edu Mon Aug 8 18:38:49 2011 From: munekazu at stanford.edu (Munekazu Motoyama) Date: Mon, 8 Aug 2011 18:38:49 -0700 (PDT) Subject: Innotec free from 8:30p to 10p today Message-ID: <384593810.819332.1312853929222.JavaMail.root@zm04.stanford.edu> From nperez at stanford.edu Tue Aug 9 10:46:37 2011 From: nperez at stanford.edu (Nora Jean Perez) Date: Tue, 9 Aug 2011 10:46:37 -0700 (PDT) Subject: Finished early Message-ID: <414066477.843445.1312911997885.JavaMail.root@zm04.stanford.edu> From chienyuc at stanford.edu Wed Aug 10 14:46:24 2011 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Wed, 10 Aug 2011 14:46:24 -0700 (PDT) Subject: Reservation released Friday 8/12 5-7pm Message-ID: <496149871.549371.1313012784337.JavaMail.root@zm03.stanford.edu> Sample will not be ready. From chandran at stanford.edu Wed Aug 10 17:21:11 2011 From: chandran at stanford.edu (Anu Chandran) Date: Wed, 10 Aug 2011 17:21:11 -0700 Subject: Innotec free 6:00pm-8:00pm Message-ID: Sample not ready. Sorry for the late notice. Anu -- Anu Chandran Materials Science & Engineering 476 Lomita Mall,McCullough Building Stanford CA 94305-4045 T:6507236466 Lab T:6507234874 Office F:6507249851 -------------- next part -------------- An HTML attachment was scrubbed... URL: From roberth at quswami.com Thu Aug 11 16:57:34 2011 From: roberth at quswami.com (Robert Huang) Date: Thu, 11 Aug 2011 16:57:34 -0700 Subject: innotec available Friday, 8/12, 8-11AM... Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB12CC8468C69@QUSWAMI-DSRV1.quswami.local> Finished with an earlier time slot. -Robert -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Fri Aug 12 14:14:26 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 12 Aug 2011 14:14:26 -0700 Subject: Innotec Nickel recipe / program tampered with Message-ID: <4E4597B2.3020509@stanford.edu> Hi Everyone, We had a User that deposited 200nm of Nickel and discovered that it was only about 780 angstroms. This morning prior to running a nickel test I cheeked the recipe and the tooling factor had been changed. When I qualified the Innotec on July 29th with 100nm of Alum, all was OK. I changed the tooling factor on the Ni recipe from 100% to 40% before running this morning's test. This morning I ran two test wafers with 100nm of Alum and a second pump down running Nickel with 100nm. I quickly did a couple of measurements on the' Alpha Step 500 and the Nickel test wafer measured 1041 and 1063 angstroms. Jim Kruger will measure both test wafers, one on the Prometrix's and the other on Alpha Step 500 again. I checked several recipes and only found the Nickel with the wrong correction factor (tooling factor). UNDER NO CIRCUMSTANCES IS ANYONE TO CREATE, CHECKOUT OR EDIT A RECIPE ON INNOTEC. IF YOU FEEL YOU WOULD LIKE TO SEE A RECIPE, PLEASE NOTIFY STAFF AND THEY CAN ASSIST YOU. This is the second time we have found a problem with the Nickel recipe this summer. I also discovered the plastic baggy with the pellets inside had been melted. This means the the Nickel starter source need to be cooled more before venting or replacing back into the Jar. I replaced the Nickel starter source. This is the second one in two weeks. Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From ytcheng at stanford.edu Thu Aug 18 10:29:04 2011 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Thu, 18 Aug 2011 10:29:04 -0700 Subject: innotec free 7-10p Message-ID: <001f01cc5dcc$53a278d0$fae76a70$@stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From eperalta at stanford.edu Fri Aug 19 01:12:56 2011 From: eperalta at stanford.edu (Edgar Peralta) Date: Fri, 19 Aug 2011 01:12:56 -0700 Subject: can i piggyback on a silver deposition? Message-ID: Hi Innotech users, I'm wondering if I could throw in a wafer into someone's silver deposition, or if anyone has an unwanted dummy wafer (or piece thereof) with a silver coating that could have. I just need to cut out some tiny mirrors out of it. Thanks, -- *Edgar A. Peralta * *Ph.D. Candidate, *Stanford University Department of Applied Physics *M*: 954.940.2700 -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgchong at stanford.edu Mon Aug 22 09:53:23 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Mon, 22 Aug 2011 09:53:23 -0700 (PDT) Subject: innotec free Tuesday (8/23) 0-2AM Message-ID: <876735342.1547826.1314032003074.JavaMail.root@zm07.stanford.edu> Problems with upstream process. -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From hrleebh at stanford.edu Mon Aug 22 17:25:29 2011 From: hrleebh at stanford.edu (Hye Ryoung Lee) Date: Mon, 22 Aug 2011 17:25:29 -0700 (PDT) Subject: innotec free from 10pm to 12am Message-ID: <438892224.772457.1314059129771.JavaMail.root@zm02.stanford.edu> From zguo at stanford.edu Mon Aug 22 17:33:00 2011 From: zguo at stanford.edu (Zhiqiang Guo) Date: Mon, 22 Aug 2011 17:33:00 -0700 (PDT) Subject: innotec free from 2am to 4am In-Reply-To: <438892224.772457.1314059129771.JavaMail.root@zm02.stanford.edu> Message-ID: <1795806718.267219.1314059580194.JavaMail.root@zm01.stanford.edu> Taken an earlier session. From zguo at stanford.edu Tue Aug 23 19:21:25 2011 From: zguo at stanford.edu (Zhiqiang Guo) Date: Tue, 23 Aug 2011 19:21:25 -0700 (PDT) Subject: Innotec finished earlier Message-ID: <1955638111.298010.1314152485087.JavaMail.root@zm01.stanford.edu> From zeost at stanford.edu Thu Aug 25 05:11:11 2011 From: zeost at stanford.edu (Jaeho Lee) Date: Thu, 25 Aug 2011 05:11:11 -0700 (PDT) Subject: innotec is free tomorrow after 9:30 pm (eom) Message-ID: <1324564457.329647.1314274271765.JavaMail.root@zm01.stanford.edu> -- Jaeho Lee 650) 213-6263 From jasonlin at stanford.edu Thu Aug 25 15:40:32 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Thu, 25 Aug 2011 15:40:32 -0700 Subject: innotec released tonight 11pm - 1am Message-ID: Samples not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From yuxinz at stanford.edu Thu Aug 25 20:48:54 2011 From: yuxinz at stanford.edu (Yuxin Zheng) Date: Thu, 25 Aug 2011 20:48:54 -0700 Subject: 7am session release tomorrow Message-ID: <000601cc63a3$13b77130$3b265390$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From nperez at stanford.edu Fri Aug 26 15:13:32 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 26 Aug 2011 15:13:32 -0700 Subject: Miss use of Innotec supplies Message-ID: <4E581A8C.2000104@stanford.edu> Hi Everyone, Gold and Platinum must be above 50 grams before using them. If there are NO Pellets in the jar DO NOT USE the starter sources. Three Users did not have pellets to add and the beginning weight was 50grams or less. If you receive this e-mail twice you were one of the three. If you tell me you didn't know, NOW YOU DO!. Next incident may warrant you from using Innotec. Even though we keep dummy wafers in the tan box for loading when having to remove dummy wafer from planetary for peeling, broken, poor condition, we need to keep these spare wafers in there single slots (not double slotted). We should keep them as clean as possible until we can't use them any longer and dumped into the white plastic box, labeled "wafer rejects".I found wafers bunched up into five slots and there were ten wafers. You cause particles, stress on the metal that is on them and will peel when used again or before we can use them again. You are the ones that used Innotec after I used Innotec on 8/25/11 and when I used Innotec again this morning 8/26/11. THIS IS A WARNING! You have to keep things clean when going into a vacuum system. That includes all dummy wafers that are reusable. _*Do NOT handle wafers / dummy wafers with your hands, this is a vacuum system. *_Next incident may warrant you from using Innotec. Regards, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 359 bytes Desc: not available URL: From shuangli at stanford.edu Fri Aug 26 18:37:19 2011 From: shuangli at stanford.edu (Shuang Li) Date: Fri, 26 Aug 2011 18:37:19 -0700 Subject: Innotec free now to 8pm Message-ID: Finish early. From jweisse at stanford.edu Sun Aug 28 17:58:00 2011 From: jweisse at stanford.edu (Jeffrey M. Weisse) Date: Sun, 28 Aug 2011 17:58:00 -0700 (PDT) Subject: Innotec free now till 9pm Message-ID: <478730045.1064388.1314579480973.JavaMail.root@zm06.stanford.edu> Au mass is less than 50g and there are no more pellets From jasonlin at stanford.edu Sun Aug 28 19:13:57 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sun, 28 Aug 2011 19:13:57 -0700 Subject: innotec released tonight midnight - 2am Message-ID: samples won't be ready in time -------------- next part -------------- An HTML attachment was scrubbed... URL: From sgchong at stanford.edu Sun Aug 28 22:32:14 2011 From: sgchong at stanford.edu (Soogine Chong) Date: Sun, 28 Aug 2011 22:32:14 -0700 (PDT) Subject: innotec free tomorrow (8/29) 7:30-9:30AM Message-ID: <742662744.1895275.1314595934266.JavaMail.root@zm07.stanford.edu> -- Soogine Chong Stanford University PhD candidate in Electrical Engineering e-mail: sgchong at stanford.edu mobile: +1-650-804-8556 From ytcheng at stanford.edu Mon Aug 29 09:39:30 2011 From: ytcheng at stanford.edu (Yao-Te Cheng) Date: Mon, 29 Aug 2011 09:39:30 -0700 Subject: innotec free 3:30-7:30pm today Message-ID: <004e01cc666a$3a02a480$ae07ed80$@stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From kleedle at stanford.edu Tue Aug 30 12:44:46 2011 From: kleedle at stanford.edu (Ken Leedle) Date: Tue, 30 Aug 2011 12:44:46 -0700 Subject: Innotec free 7-9:30am tomorrow Message-ID: <4E5D3DAE.30709@stanford.edu> Samples won't be ready in time. - Ken From zguo at stanford.edu Tue Aug 30 16:49:19 2011 From: zguo at stanford.edu (Zhiqiang Guo) Date: Tue, 30 Aug 2011 16:49:19 -0700 (PDT) Subject: innotec Thu 18:00~20:00 released In-Reply-To: <1950448861.437926.1314745996684.JavaMail.root@zm01.stanford.edu> Message-ID: <1850910500.439538.1314748159765.JavaMail.root@zm01.stanford.edu> From zeost at stanford.edu Wed Aug 31 09:20:38 2011 From: zeost at stanford.edu (Jaeho Lee) Date: Wed, 31 Aug 2011 09:20:38 -0700 (PDT) Subject: innotec free today 2~4:30 pm (eom) Message-ID: <1884044695.450908.1314807638176.JavaMail.root@zm01.stanford.edu> -- Jaeho Lee 650) 213-6263