Status of innotec Pt source

Soogine Chong sgchong at
Fri Jan 14 14:26:18 PST 2011

Hi all, 

Does anyone know what the status of the innotec Pt source is?  It was pretty thin when I used it last time.  I would like to do a 60nm deposition over the weekend and would like to know if this would be possible.  If you have used it recently, it would be helpful to get some information.


Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at
mobile: +1-650-804-8556

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