Evaporation of Cr through 60nm holes (nanoparticles via lift-off)?

Katie Chang kgc at stanford.edu
Thu Jun 16 16:58:04 PDT 2011


Hi everyone,

Has anyone successfully evaporated Cr through a mask with holes less than or
equal to 60nm in diameter? We are attempting to make nanoparticles via
lift-off, but for some reason Cr did not deposit correctly through our
nanoimprinted PMMA mask. If anyone has any advice, it would be greatly
appreciated!

Thanks,

--Katie
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