FW: Thin film deposition with innotec

Robert Huang roberth at quswami.com
Mon Jun 27 10:18:52 PDT 2011

Fellow innotec users:

Not sure that Arash's email got through, so I'm forwarding (apologies if people get multiple emails).  In any case, if anyone has recent cross-section TEMs of metal layers directly on silicon, we'd be interested in comparing results.



From: Arash Hazeghi
Sent: Monday, June 27, 2011 10:10 AM
To: innotec at snf.stanford.edu
Cc: Robert Huang
Subject: Thin film deposition with innotec


I am interested to know if anyone has recently done cross-section TEMs on  Au, Pt, Al or Ag layers deposited on clean flat silicon surface. We are observing some strange silicide formation on the surface with Pt and substantial dislocations with gold, possibly during the evaporation and I wanted to check if anyone else has seen this.



Arash Hazeghi PhD

Device Research Scientist
Quswami, Inc.
505 Montgomery St. , Suite 300
San Francisco, CA 94111

Phone: 415-834-9910
Cell: 650-353-1866
Fax: 415-834-9975
arash at quswami.com<mailto:arash at quswami.com>

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