From Salowitz at stanford.edu Wed May 4 10:00:37 2011 From: Salowitz at stanford.edu (Nathan Salowitz) Date: Wed, 04 May 2011 10:00:37 -0700 Subject: Released tomorrow noon to 3:00 Message-ID: <4DC18635.7020902@stanford.edu> From nperez at stanford.edu Fri May 6 15:28:59 2011 From: nperez at stanford.edu (Jeannie Perez) Date: Fri, 06 May 2011 15:28:59 -0700 Subject: Log sheets Need to be filled out correctly! Message-ID: <4DC4762B.8080105@stanford.edu> Hi Everyone, I need help from all Users to completely fill out the log sheets . With this information we would have a better understanding of what, why, or when did problems start occurring. Users are not completely filling out the log sheets. What you may think is minor, can be very important to maintenance, staff and you as an User. This even means the Date, Pressure, how many pellets added, what frequency used, what recipe used, what gases used, what film etched or cleaned ( oxide, nitride, resist) or What is the DC Bias reading on Drytek 4. I need you to completely fill out the log sheets or I will have to start disqualifying Users. For all the good Users, you can stop by the office and have some peanuts. Have a nice week-end, Jeannie -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nperez.vcf Type: text/x-vcard Size: 346 bytes Desc: not available URL: From yuxinz at stanford.edu Sun May 8 11:02:45 2011 From: yuxinz at stanford.edu (Yuxin Zheng) Date: Sun, 8 May 2011 11:02:45 -0700 Subject: innotec 8pm~ session release Message-ID: <007f01cc0daa$22b4fdf0$681ef9d0$@edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From bilee at stanford.edu Sun May 8 19:12:26 2011 From: bilee at stanford.edu (Byoungil Lee) Date: Sun, 8 May 2011 19:12:26 -0700 Subject: innotec free 1-2 am tomorrow Message-ID: <2F1B6D572CCB4480BD86148EDA3CD93A@BILEEOFFICE> innotec free 1-2 am tomorrow. -- Byoungil Lee Ph.D Candidate in Electrical Engineering Center for Integrated Systems Stanford University Phone: +1-650-796-9791 Email: bilee at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From dwnam at stanford.edu Sun May 8 23:19:36 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Sun, 8 May 2011 23:19:36 -0700 Subject: Reservation released from 10am to noon on Tue (Innotec) Message-ID: Donguk -------------- next part -------------- An HTML attachment was scrubbed... URL: From lyjiao at stanford.edu Mon May 9 09:00:11 2011 From: lyjiao at stanford.edu (Liying Jiao) Date: Mon, 9 May 2011 09:00:11 -0700 (PDT) Subject: innotec free 2-4 pm today In-Reply-To: <2F1B6D572CCB4480BD86148EDA3CD93A@BILEEOFFICE> Message-ID: <1575785504.32518.1304956810977.JavaMail.root@zm08.stanford.edu> From edmyers at stanford.edu Thu May 12 08:58:18 2011 From: edmyers at stanford.edu (Ed Myers) Date: Thu, 12 May 2011 08:58:18 -0700 Subject: Intlvac PVD Update, 5/12/11 Message-ID: <6.2.5.6.2.20110512081125.02a88aa0@stanford.edu> Metal's Community, The Intlvac systems have been in the fab for awhile and I imagine many are wondering about their status. Intlvac_Evaporator: The system has a very different hearth and control system compared to the Innotec. I took me some time to understand and feel comfortable with the new configuration. After a few miss steps, I settled on an approach we will test as we release of the system. I waited to order the starter materials until I felt comfortable with the hardware configuration, since it could have required a source size change. The material order went out last month and they should be arriving soon. One question I hear, beside when can we use the system is what is the cleanliness category. It is my intention to bridge the gap between clean up to gold contaminated. I do not plan on allowing gold, or other known device killers (such as Fe) in the system. The sources I have ordered are Ni, Co, Pt, Al, Hf, Ta, Mo, W, Ti, Cr, Zr, Si, Ge, Pd, Nb and V. As we start metering in the lab member community (each new material will take some development the first time), we can discuss your material and substrate requirements. Please contact me regarding the evaporator and we can start putting together a plan for releasing your desired material. Intlvac_Sputter: Originally I felt this system would be released first, since sputtering is pretty straight forward. I even committed to an EE412 project on the system for the characterization the deposition rates, uniformity and some reactive depositions. The project is moving along with the student accomplishing most of the objectives. What I have also learned using the system and working with Intlvac is the system would suit us better with some configuration changes. Intlvac is here this week and I hope to have a time line on when the configuration changes will be completed (I'm guessing a few weeks). During this time there are a few depositions we can run, but we are also limited by target cooling water flow. You may have noticed the system in pieces last week. This resulted from an overheated water cooling line to one of the cathodes. The vendor specification for our cathode size is 1.6 gallons per minute. What we are delivering is 0.5 gpm, or lower. This restricted cooling means we can't put as much power to the cathodes as we would like. Currently the system is hooked up to the house process cooling water. This is not working, so we have ordered a dedicated heat exchanger for the system. I expect we will receive the chiller in a few weeks. With the cooling water issues, I expect it will be 3 to 4 weeks before we can start the wider release of the system. In the mean time, if you are interested we can talk about running some low power depositions. The majority of the targets are on order so we are limited to Al, Ta, TiW, W and Cr. The final material set will be similar to the Intlvac_Evaporator except no precious materials (Pt and probably not Pd). Also the EE412 student will have priority for the next few weeks. Regards, Ed I apologize for the multiple copies of the email to those lab members on all the metal tool's distribution lists From ntayebi at stanford.edu Thu May 12 11:13:00 2011 From: ntayebi at stanford.edu (Noureddine Tayebi) Date: Thu, 12 May 2011 11:13:00 -0700 (PDT) Subject: Reservation released today from 11am to 2 PM, used earlier time slot. eom In-Reply-To: Message-ID: <1110441597.165437.1305223980121.JavaMail.root@zm02.stanford.edu> From dwnam at stanford.edu Sun May 15 19:55:08 2011 From: dwnam at stanford.edu (Donguk Nam) Date: Sun, 15 May 2011 19:55:08 -0700 Subject: Innotec is free from 9pm Message-ID: Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From chandran at stanford.edu Mon May 16 07:46:58 2011 From: chandran at stanford.edu (Anu Chandran) Date: Mon, 16 May 2011 07:46:58 -0700 (PDT) Subject: Innotec free 9:00 am to 11:30 am Message-ID: <1319626488.261376.1305557218449.JavaMail.root@zm06.stanford.edu> Sample not ready. Sorry for the late notice. Anu From jimkruger at yahoo.com Tue May 17 10:10:17 2011 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 17 May 2011 10:10:17 -0700 (PDT) Subject: Innotec released today, 5-17-11, 15:00 to 18:30 eom Message-ID: <615309.66570.qm@web38905.mail.mud.yahoo.com> An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Wed May 18 07:14:33 2011 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 18 May 2011 07:14:33 -0700 (PDT) Subject: Innotec released today, 5-18-11, 9:30 to12:30 eom Message-ID: <923042.67498.qm@web38903.mail.mud.yahoo.com> An HTML attachment was scrubbed... URL: From jaypark at stanford.edu Wed May 18 07:22:17 2011 From: jaypark at stanford.edu (Jason Matthew Parker) Date: Wed, 18 May 2011 07:22:17 -0700 (PDT) Subject: Innotec released today, 5-18-11, 9:30 to12:30 eom In-Reply-To: <923042.67498.qm@web38903.mail.mud.yahoo.com> Message-ID: <1056318665.405705.1305728537510.JavaMail.root@zm08.stanford.edu> I'll take the innotec time. Thanks. Jason From: "jim kruger" To: "Innotec" Sent: Wednesday, May 18, 2011 7:14:33 AM Subject: Innotec released today, 5-18-11, 9:30 to12:30 eom From chandran at stanford.edu Mon May 23 03:21:41 2011 From: chandran at stanford.edu (Anu Chandran) Date: Mon, 23 May 2011 03:21:41 -0700 Subject: Innotec free Monday 7:30 am- 10:00am Message-ID: Took a Sunday night no show slot. -- Anu Chandran Materials Science & Engineering 476 Lomita Mall,McCullough Building Stanford CA 94305-4045 T:6507236466 Lab T:6507234874 Office F:6507249851 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhaydon at stanford.edu Wed May 25 10:54:02 2011 From: jhaydon at stanford.edu (Jim Haydon) Date: Wed, 25 May 2011 10:54:02 -0700 Subject: planned shield change Message-ID: <4DDD423A.4090407@stanford.edu> The planned shield change for today is not going to happen as the shields were not picked up for shipment yesterday as planned. so the Innotec is free. I would like to change them out tomorrow as soon as possible I know this will inconvenience some people this will probably happen around 9:30 AM it will take about three hours to complete. I will not shut the Innotec down until I know I have the parts ready so if they don't come in for some reason I will not bump any unnecessarily. I am sorry for the late notice and any inconvenience this may cause. Jim From jasonlin at stanford.edu Wed May 25 21:19:12 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Wed, 25 May 2011 21:19:12 -0700 Subject: innotec released 2am - 4am Message-ID: Another tool had to be shutdown. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jperez at snf.stanford.edu Thu May 26 15:18:32 2011 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Thu, 26 May 2011 15:18:32 -0700 Subject: Fwd: Re: Shutdown innotec SNF 2011-05-26 10:26:51: Shield Change Message-ID: <4DDED1B8.9090308@snf.stanford.edu> -------- Original Message -------- Subject: Re: Shutdown innotec SNF 2011-05-26 10:26:51: Shield Change Date: Thu, 26 May 2011 15:11:01 -0700 From: jperez at snf.stanford.edu To: innotec-pcs at snf.stanford.edu Finished Shield Change late. Parts didn't arrive. Jim had to clean some parts that he doesn't have for a full third set. Aleta will coat and run test. I will read tests in the morning. -------------- next part -------------- An HTML attachment was scrubbed... URL: From bilee at stanford.edu Fri May 27 00:15:27 2011 From: bilee at stanford.edu (Byoungil Lee) Date: Fri, 27 May 2011 00:15:27 -0700 Subject: innotec free until 2:30am Message-ID: <1806CC64AD564AC79BE4915902203ABF@BILEEOFFICE> Samples failed at the last step. Sorry for the late notice. -- Byoungil Lee Ph.D Candidate in Electrical Engineering Center for Integrated Systems Stanford University Phone: +1-650-796-9791 Email: bilee at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From altamash at stanford.edu Fri May 27 22:07:18 2011 From: altamash at stanford.edu (Altamash Janjua) Date: Fri, 27 May 2011 22:07:18 -0700 (PDT) Subject: Innotec released from 6-8am tomorrow Message-ID: <586363310.545131.1306559238693.JavaMail.root@zm01.stanford.edu> Samples not ready. Altamash From jimkruger at yahoo.com Tue May 31 19:29:22 2011 From: jimkruger at yahoo.com (jim kruger) Date: Tue, 31 May 2011 19:29:22 -0700 (PDT) Subject: Innotec free tomorrow, 6/1/11, 11:30 to 15:00 eom Message-ID: <970290.93860.qm@web38904.mail.mud.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: