Ru deposition?

Kendra Pannell Kuhl kpkuhl at
Thu Sep 15 10:04:04 PDT 2011


I wondered if anyone is doing a Ru deposition that I could piggyback on?  We want to try something before investing in our lab's own Ru source if possible.  I only have 1 wafer and any thickness would be fine as long as it's thick enough to be a conformal coating.  Alternatively, if anyone is willing to loan us their Ru source for our own deposition it would be much appreciated.  Thanks, 

Jaramillo Lab

More information about the innotec mailing list