Ru deposition?

Kendra Pannell Kuhl kpkuhl at stanford.edu
Thu Sep 15 10:04:04 PDT 2011


Hi,

I wondered if anyone is doing a Ru deposition that I could piggyback on?  We want to try something before investing in our lab's own Ru source if possible.  I only have 1 wafer and any thickness would be fine as long as it's thick enough to be a conformal coating.  Alternatively, if anyone is willing to loan us their Ru source for our own deposition it would be much appreciated.  Thanks, 

Kendra
Jaramillo Lab
ChemE



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