innotec free from now until 2pm

[Sangmoo Jeong]

Dear innotec users

I started super early and finished super early.
So, it is now free til 2pm.

However, there seems to have a problem.
I planned to deposit 500nm thick Al, but when it reached 448nm, the e-beam was gone.
I could not get the e-beam again.
When I vented it, I could not find any suspicious things. 

So, I don't shut it down, and I hope that it does not happen to next users.