Comment intlvac_sputter SNF 2011-05-10 14:04:39: Si and W targets

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue May 10 14:04:39 PDT 2011


I changed the targets so there are 2 Si targets in the AC cathodes and a W target in the RF cathode.




More information about the intlvac_sputter-pcs mailing list