From emyers at snf.stanford.edu Tue Apr 10 08:18:10 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 10 Apr 2012 08:18:10 -0700 Subject: Shutdown intlvac_sputter SNF 2012-04-10 08:18:10: Not reaching base Message-ID: System will not pump below 1E-6. This is after a full day of pumping. I've vented twice and looked at the door o-ring and did not find anything. From emyers at snf.stanford.edu Tue Apr 10 08:49:28 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 10 Apr 2012 08:49:28 -0700 Subject: Comment intlvac_sputter SNF 2012-04-10 08:49:27: O-ring Message-ID: I found a couple of scratches on the door and one on the O-ring. I tried to clean them. I put the system in to pumpdown to see if these were the root cause From emyers at snf.stanford.edu Fri Apr 13 10:54:05 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Apr 2012 10:54:05 -0700 Subject: Comment intlvac_sputter SNF 2012-04-10 08:49:27: O-ring Message-ID: no it seems to be a shutter feedthru leak. From emyers at snf.stanford.edu Fri Apr 13 10:56:52 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Apr 2012 10:56:52 -0700 Subject: Comment intlvac_sputter SNF 2012-04-13 10:56:52: 4/13/12 Update Message-ID: System reached process pressure after venting in 1hr 45min. A deep base was not reached over night. I burned off the targets and will see how deep of a vacuum we can get. From emyers at snf.stanford.edu Fri Apr 13 17:57:14 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Apr 2012 17:57:14 -0700 Subject: Comment intlvac_sputter SNF 2012-04-13 17:57:14: Targets in System Message-ID: RF cathode: TI AC/DC cathodes: Al-1%Si From emyers at snf.stanford.edu Fri Apr 13 17:58:48 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Apr 2012 17:58:48 -0700 Subject: Shutdown intlvac_sputter SNF 2012-04-10 08:18:10: Not reaching base Message-ID: Pressure at 9E-8 after 7 hours after target burn-ins. System was at 3E-7 prior after a 3 hour pumpdown From emyers at snf.stanford.edu Fri Apr 13 17:58:57 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Apr 2012 17:58:57 -0700 Subject: Comment intlvac_sputter SNF 2012-04-13 10:56:52: 4/13/12 Update Message-ID: zrchived From emyers at snf.stanford.edu Thu Apr 26 09:00:21 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 26 Apr 2012 09:00:21 -0700 Subject: Comment intlvac_sputter SNF 2012-04-26 09:00:20: No Al targets in system Message-ID: I removed the Al-Si targets and installed Pt in DC_Left and Ni in DC_Right. These targets will remain in the system until Friday afternoon. From emyers at snf.stanford.edu Fri Apr 27 17:09:47 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 27 Apr 2012 17:09:47 -0700 Subject: Comment intlvac_sputter SNF 2012-04-26 09:00:20: No Al targets in system Message-ID: Pt and Ni removed, Al-Si Installed From emyers at snf.stanford.edu Fri Apr 27 17:10:02 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 27 Apr 2012 17:10:02 -0700 Subject: Comment intlvac_sputter SNF 2012-04-13 17:57:14: Targets in System Message-ID: archived From emyers at snf.stanford.edu Fri Apr 27 17:10:45 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 27 Apr 2012 17:10:45 -0700 Subject: Comment intlvac_sputter SNF 2012-04-27 17:10:45: Al-Si and Ti Message-ID: Installed Al-Si targets in AC/DC cathodes. Ti target in RF cathode