Shutdown intlvac_sputter SNF 2012-04-10 08:18:10: Not reaching base

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue Apr 10 08:18:10 PDT 2012


System will not pump below 1E-6.  This is after a full day of pumping.  I've vented twice and looked at the door o-ring and did not find anything.




More information about the intlvac_sputter-pcs mailing list