From raneeyoo at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-11 16:15:47: Ni target will be installed on Monday Sept. 17th. Message-ID: <32029666.89.1347405348080.JavaMail.coral@shine> From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-09-17 09:55:59: Ni instaled in DC1 Message-ID: <18595407.19.1347900960101.JavaMail.coral@shine> RF: Ti DC1/AC: Ni DC2/AC: Al-1%Si From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-09-17 09:55:59: Ni instaled in DC1 Message-ID: <33366269.79.1348159692400.JavaMail.coral@shine> Removed Ni target From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-11 16:15:47: Ni target will be installed on Monday Sept. 17th. Message-ID: <18802534.80.1348159709409.JavaMail.coral@shine> Removed Ni target From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-07-12 13:56:13: Al-1%Si DC/AC, Ti RF Message-ID: <27838418.81.1348159724437.JavaMail.coral@shine> archived From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-20 09:50:17: Al-1%Si DC/AC, Ti RF Message-ID: <8279098.82.1348159818608.JavaMail.coral@shine> Installed 2 Al-1%Si targets in DC/AC cathodes, Ti in RF cathode From eldwin at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-09-22 23:09:08: flakes on wafer holder Message-ID: <10171297.3.1348380548637.JavaMail.coral@shine> Metal flaking noticed under the wafer holder. Removed large flakes but holder needs to be cleaned. From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-09-22 23:09:08: flakes on wafer holder Message-ID: <12713063.20.1348613484969.JavaMail.coral@shine> Yes, the TiW is stressed and peels From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-20 09:50:17: Al-1%Si DC/AC, Ti RF Message-ID: <18510486.21.1348613509220.JavaMail.coral@shine> archived From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-25 15:53:01: TiW in DC-L/AC Message-ID: <6229294.22.1348613581931.JavaMail.coral@shine> Installed TiW in DC-L/AC with Al-1%Si targets in DCR/AC cathodes, Ti in RF cathode From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-26 15:45:44: Al-1%Si DC/AD, Ti RF Message-ID: <8583803.45.1348699544592.JavaMail.coral@shine> two Al-1%Si targets in DC/AC cathodes, Ti in RF cathode From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-25 15:53:01: TiW in DC-L/AC Message-ID: <18761347.46.1348699556722.JavaMail.coral@shine> archived From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-09-27 14:59:03: Sputter etch not functioning Message-ID: <12770952.76.1348783144013.JavaMail.coral@shine> Sputter etch not functioning From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-09-27 14:59:03: Sputter etch not functioning Message-ID: <13757758.15.1349215601319.JavaMail.coral@shine> Working with Intlvac, we got the ion source back on line From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-10-25 11:41:02: DC1/AC: Ni (front left) Message-ID: <6291370.97.1351190462740.JavaMail.coral@shine> RF: Ti DC1/AC: Ni DC2/AC: Al-1%Si Ni scheduled to be removed tomorrow afternoon From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-10-25 11:41:02: DC1/AC: Ni (front left) Message-ID: <9991828.57.1351621452014.JavaMail.coral@shine> archived From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-10-30 11:25:23: TiW installed Message-ID: <6202017.58.1351621524044.JavaMail.coral@shine> RF: Ti DC1/AC: TiW DC2/AC: Al-1%Si Installing TiW target to generate more test wafers for the metal etcher acceptance. Target will be in until about Thursday. From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-10-30 11:25:23: TiW installed Message-ID: <24767317.112.1351706090872.JavaMail.coral@shine> removed TiW and installed al-1%Si From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-10-31 10:56:06: Al-1%Si and Ti Message-ID: <4145446.113.1351706166881.JavaMail.coral@shine> RF: Ti DC/AC: Al-1%Si -both are Al-1%Si From emyers at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-09-26 15:45:44: Al-1%Si DC/AD, Ti RF Message-ID: <9553054.114.1351706182888.JavaMail.coral@shine> archived From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Shutdown intlvac_sputter SNF 2012-11-08 15:36:37: system hot after deposition Message-ID: <17692299.50.1352417798145.JavaMail.coral@shine> After running a 900W Al dep System was a darker color inside and smelled "hot". Target collar was too hot to touch after 15 min cool down and an additional 10 min wait. (Keep may have come off back off tatget? Will check after system cools From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-11-08 16:37:05: still too hot Message-ID: <23836996.54.1352421432701.JavaMail.coral@shine> Vented system to pull off target colloars but they are still too hot. From jhaydon at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-11-12 13:56:53: Damaged cathodes Message-ID: <22905698.15.1352757414248.JavaMail.coral@shine> It will take a week or so before we get the cathodes back From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-11-12 13:56:53: Damaged cathodes Message-ID: <28732084.60.1355791044257.JavaMail.coral@shine> Cathodes repaired installed and sputter cleaned From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-11-08 16:37:05: still too hot Message-ID: <31360294.61.1355791071428.JavaMail.coral@shine> Cathodes repaired installed and sputter cleaned From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Comment intlvac_sputter SNF 2012-12-17 16:41:06: DC1/AC: Ni (left) Message-ID: <17549451.62.1355791267431.JavaMail.coral@shine> RF: Ti DC1/AC: Ni DC2/AC: Al-1%Si From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Shutdown intlvac_sputter SNF 2012-11-08 15:36:37: system hot after deposition Message-ID: <31565718.63.1355791301647.JavaMail.coral@shine> Cathodes repaired installed and sputter cleaned From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-12-17 16:43:29: water interlocks not working Message-ID: <20545290.65.1355791410346.JavaMail.coral@shine> Tool can only be used in primetime with staff onsite. Usage must be staff approved. From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Problem intlvac_sputter SNF 2012-12-18 22:55:59: etch not working Message-ID: <10551079.22.1355900160247.JavaMail.coral@shine> raneeyoo reports that the sputter etch is not working From maurice at snf.stanford.edu Sun Dec 23 08:58:39 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:58:39 -0000 Subject: Shutdown intlvac_sputter SNF 2012-12-19 15:14:49: Water interlock not working Message-ID: <8980685.34.1355958889235.JavaMail.coral@shine>