Problem intlvac_sputter SNF 2012-09-22 23:09:08: flakes on wafer holder

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Sun Dec 23 08:58:39 PST 2012

Previous message: Comment intlvac_sputter SNF 2012-09-20 09:50:17: Al-1%Si DC/AC, Ti RF
Next message: Problem intlvac_sputter SNF 2012-09-22 23:09:08: flakes on wafer holder
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Metal flaking noticed under the wafer holder. Removed large flakes but holder needs to be cleaned.

Previous message: Comment intlvac_sputter SNF 2012-09-20 09:50:17: Al-1%Si DC/AC, Ti RF
Next message: Problem intlvac_sputter SNF 2012-09-22 23:09:08: flakes on wafer holder
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the intlvac_sputter-pcs mailing list