Comment intlvac_sputter SNF 2012-09-25 15:53:01: TiW in DC-L/AC

emyers at snf.stanford.edu emyers at snf.stanford.edu
Sun Dec 23 08:58:39 PST 2012

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Installed TiW in DC-L/AC with Al-1%Si targets in DCR/AC cathodes, Ti in RF cathode

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