Problem intlvac_sputter SNF 2012-10-30 11:25:23: TiW installed

emyers at snf.stanford.edu emyers at snf.stanford.edu
Sun Dec 23 08:58:39 PST 2012


RF:  Ti
DC1/AC: TiW
DC2/AC: Al-1%Si
Installing TiW target to generate more test wafers for the metal etcher acceptance.  Target will be in until about Thursday.



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