Shutdown intlvac_sputter SNF 2012-11-08 15:36:37: system hot after deposition

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Dec 23 08:58:39 PST 2012


After running a 900W Al dep
System was a darker color inside and smelled "hot".  Target collar was too hot to touch after 15 min cool down and an additional 10 min wait.
(Keep may have come off back off tatget?  Will check after system cools



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