Comment intlvac_sputter SNF 2012-07-11 09:08:21: Ni, Al-Si, Ti Targets

emyers at snf.stanford.edu emyers at snf.stanford.edu
Wed Jul 11 09:08:22 PDT 2012


I installed a Ni target in DC1 location.  DC2-al-1%Si (can not use in AC mode), Ti in RF cathode




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