From jasonlin at snf.stanford.edu Sat Jun 2 02:52:43 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sat, 2 Jun 2012 02:52:43 -0700 Subject: Problem intlvac_sputter SNF 2012-06-02 02:52:42: Flaking on planetary Message-ID: Planetary is showing signs of flaking. I didn't find the vacuum head so I only wiped it with a clean wipe. Probably needs some vacuuming or other cleaning. From emyers at snf.stanford.edu Wed Jun 6 08:59:45 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 6 Jun 2012 08:59:45 -0700 Subject: Comment intlvac_sputter SNF 2012-05-30 09:22:53: 2xAl, Ti in RF Message-ID: targets chaned to Six2 and Mo in RF From emyers at snf.stanford.edu Wed Jun 6 09:00:25 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 6 Jun 2012 09:00:25 -0700 Subject: Problem intlvac_sputter SNF 2012-06-02 02:52:42: Flaking on planetary Message-ID: Need to keep scrubbing the carrier after use From emyers at snf.stanford.edu Wed Jun 6 09:01:14 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 6 Jun 2012 09:01:14 -0700 Subject: Comment intlvac_sputter SNF 2012-06-06 09:01:14: Si in DC/AC, Mo in RF Message-ID: From emyers at snf.stanford.edu Thu Jun 7 13:36:40 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 7 Jun 2012 13:36:40 -0700 Subject: Shutdown intlvac_sputter SNF 2012-06-07 13:36:39: Si target failed Message-ID: The silicon target delaminated from the backing plate. I put the system down until I can change out the targets. The hardware is OK, just bad targets currently loaded From emyers at snf.stanford.edu Mon Jun 11 08:58:43 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 11 Jun 2012 08:58:43 -0700 Subject: Shutdown intlvac_sputter SNF 2012-06-07 13:36:39: Si target failed Message-ID: removed failed Si targets From emyers at snf.stanford.edu Mon Jun 11 08:59:43 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 11 Jun 2012 08:59:43 -0700 Subject: Comment intlvac_sputter SNF 2012-06-11 08:59:42: Al-1%Si in DC/AC, Ti in RF Message-ID: Al-1%Si targets in DC/AC cathodes and Ti in RF cathode From emyers at snf.stanford.edu Mon Jun 11 08:59:56 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 11 Jun 2012 08:59:56 -0700 Subject: Comment intlvac_sputter SNF 2012-06-06 09:01:14: Si in DC/AC, Mo in RF Message-ID: Targets removed From zzp at snf.stanford.edu Wed Jun 13 21:07:03 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Wed, 13 Jun 2012 21:07:03 -0700 Subject: Comment intlvac_sputter SNF 2012-06-13 21:07:02: deposited Al/Si milky Message-ID: film not shining at all, 14min. AC yields ~5000A From fpurkl at snf.stanford.edu Fri Jun 15 18:38:13 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Fri, 15 Jun 2012 18:38:13 -0700 Subject: Comment intlvac_sputter SNF 2012-06-15 18:38:13: pumpdown time 2h30min Message-ID: pumpdown time has increased from 2h when I used it 3 days ago to 2h30min now both for me and the previous user. I only had the chamber open for ~3min. From maurice at snf.stanford.edu Wed Jun 20 11:05:30 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jun 2012 11:05:30 -0700 Subject: Comment intlvac_sputter SNF 2012-06-20 11:05:30: pumptime 02:25:00 Message-ID: From emyers at snf.stanford.edu Fri Jun 29 09:22:57 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Jun 2012 09:22:57 -0700 Subject: Problem intlvac_sputter SNF 2012-05-31 17:35:06: pure Al film looks hazy/clouded Message-ID: We remeasured the film and the resistivity was what was expected From emyers at snf.stanford.edu Fri Jun 29 09:23:30 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Jun 2012 09:23:30 -0700 Subject: Comment intlvac_sputter SNF 2012-06-13 21:07:02: deposited Al/Si milky Message-ID: Film is rough not milky (O2) From emyers at snf.stanford.edu Fri Jun 29 09:23:43 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Jun 2012 09:23:43 -0700 Subject: Comment intlvac_sputter SNF 2012-06-15 18:38:13: pumpdown time 2h30min Message-ID: noted