Comment intlvac_sputter SNF 2012-05-23 08:50:48: TiO2 and Al-Si Targets

emyers at snf.stanford.edu emyers at snf.stanford.edu
Wed May 23 08:50:48 PDT 2012

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TiO2 in AC/DC 1 and 2 cathodes.
Al-Si in RF cathode

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