From maurice at stanford.edu  Fri Feb  8 15:18:39 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Fri, 8 Feb 2013 15:18:39 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-08
	15:18:38: 900W recipe
Message-ID: <13578813.22.1360365519481.JavaMail.coral@snc-coraldb.stanford.edu>

Hi, Maurice, 
I deposited Al/Si yesterday using your recipe 900W. Here are some details of the Al film
Deposit time = 50min
stress is 150-190MPa tensile stress
thickness is 1.6um near the flat edge, 1.1um far away from the flat edge.
The film is shinning
Best,
Yongliang

From maurice at stanford.edu  Mon Feb 11 14:53:22 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Mon, 11 Feb 2013 14:53:22 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-11
 14:53:22: TiW target on left side
Message-ID: <32952394.66.1360623202302.JavaMail.coral@snc-coraldb.stanford.edu>

TiW  left
Al/Si  right
Ti  rear

From maurice at stanford.edu  Wed Feb 13 11:09:31 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Wed, 13 Feb 2013 11:09:31 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-11
 14:53:22: TiW target on left side
Message-ID: <17014834.69.1360782571818.JavaMail.coral@snc-coraldb.stanford.edu>

RF:  Ti
DC1/AC: Al-1%Si (left)
DC2/AC: Al-1%Si (right)

From maurice at stanford.edu  Wed Feb 13 11:09:44 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Wed, 13 Feb 2013 11:09:44 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-13
 11:09:44: DC1/AC: Al-1%Si (left)
Message-ID: <17461423.70.1360782584857.JavaMail.coral@snc-coraldb.stanford.edu>

RF:  Ti
DC1/AC: Al-1%Si (left)
DC2/AC: Al-1%Si (right)

From maurice at stanford.edu  Tue Feb 19 16:06:46 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Tue, 19 Feb 2013 16:06:46 -0800 (PST)
Subject: [intlvac_sputter-pcs] Shutdown intlvac_sputter SNF 2013-02-19
 16:06:46: right target cover stuck
Message-ID: <13055716.0.1361318806544.JavaMail.coral@snc-coraldb.stanford.edu>

After changing the target I got the cover stuck.  It was difficult to remove

From maurice at stanford.edu  Tue Feb 19 16:13:09 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Tue, 19 Feb 2013 16:13:09 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-19
 16:13:09: Si in front two targets
Message-ID: <19356212.1.1361319189325.JavaMail.coral@snc-coraldb.stanford.edu>

RF:  Ti
DC1/AC: Si (left)
DC2/AC: Si (right)

From maurice at stanford.edu  Wed Feb 20 09:34:11 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Wed, 20 Feb 2013 09:34:11 -0800 (PST)
Subject: [intlvac_sputter-pcs] Shutdown intlvac_sputter SNF 2013-02-19
 16:06:46: right target cover stuck
Message-ID: <17713715.21.1361381651820.JavaMail.coral@snc-coraldb.stanford.edu>

gentle tapped cover into place

From maurice at stanford.edu  Wed Feb 20 09:34:30 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Wed, 20 Feb 2013 09:34:30 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-01-18
 16:17:35: DC1/AC: Al-1%Si (left)
Message-ID: <23399182.22.1361381670871.JavaMail.coral@snc-coraldb.stanford.edu>

logged

From maurice at stanford.edu  Wed Feb 20 09:34:45 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Wed, 20 Feb 2013 09:34:45 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-13
 11:09:44: DC1/AC: Al-1%Si (left)
Message-ID: <17407032.23.1361381685914.JavaMail.coral@snc-coraldb.stanford.edu>

logged

From maurice at stanford.edu  Tue Feb 26 11:08:11 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Tue, 26 Feb 2013 11:08:11 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-19
 16:13:09: Si in front two targets
Message-ID: <21990023.50.1361905691105.JavaMail.coral@snc-coraldb.stanford.edu>

removed right Si and installed right Al/Si

From maurice at stanford.edu  Tue Feb 26 11:10:30 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Tue, 26 Feb 2013 11:10:30 -0800 (PST)
Subject: [intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-26
 11:10:29: RF: Ti DC1/AC: Si (left) DC2/AC: /AlSi (right)
Message-ID: <30943071.51.1361905830391.JavaMail.coral@snc-coraldb.stanford.edu>

RF:  Ti
DC1/AC: Si (left)     Silicon
DC2/AC: /AlSi (right)     Al with 1% Si

From maurice at stanford.edu  Thu Feb 28 13:38:43 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Thu, 28 Feb 2013 13:38:43 -0800 (PST)
Subject: [intlvac_sputter-pcs] Problem intlvac_sputter SNF 2013-02-28
	13:38:42: Etch not working
Message-ID: <3414928.6.1362087523626.JavaMail.coral@snc-coraldb.stanford.edu>

Lucas reports that the etch is not working

From maurice at stanford.edu  Thu Feb 28 14:20:47 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Thu, 28 Feb 2013 14:20:47 -0800 (PST)
Subject: [intlvac_sputter-pcs] Problem intlvac_sputter SNF 2013-02-28
 13:38:42: Etch not working
Message-ID: <8662644.5.1362090047658.JavaMail.coral@snc-coraldb.stanford.edu>

reset BR2
Ran etch program to verify