[intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-11 14:53:22: TiW target on left side

maurice at stanford.edu maurice at stanford.edu
Wed Feb 13 11:09:31 PST 2013


RF:  Ti
DC1/AC: Al-1%Si (left)
DC2/AC: Al-1%Si (right)


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