[intlvac_sputter-pcs] Comment intlvac_sputter SNF 2013-02-26 11:10:29: RF: Ti DC1/AC: Si (left) DC2/AC: /AlSi (right)

maurice at stanford.edu maurice at stanford.edu
Tue Feb 26 11:10:30 PST 2013

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RF:  Ti
DC1/AC: Si (left)     Silicon
DC2/AC: /AlSi (right)     Al with 1% Si

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